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    • 74. 发明授权
    • Substrate processing apparatus and method for manufacturing semiconductor device
    • 基板处理装置及半导体装置的制造方法
    • US08828141B2
    • 2014-09-09
    • US12379420
    • 2009-02-20
    • Masanori SakaiYuji TakebayashiTsutomu KatoShinya SasakiHirohisa Yamazaki
    • Masanori SakaiYuji TakebayashiTsutomu KatoShinya SasakiHirohisa Yamazaki
    • C23C16/455C23C16/458C23C16/46C23C16/52C23F1/00H01L21/306C23C16/40C23C16/44C23C16/06C23C16/22
    • C23C16/4584C23C16/405C23C16/4412C23C16/45546C23C16/45591
    • A substrate processing apparatus of the present invention comprises: a processing chamber for storing and processing substrates stacked in multiple stages in horizontal posture; a processing gas supply unit for supplying two or more types of the processing gases to the inside of the processing chamber; an inactive gas supply unit for supplying an inactive gas to the inside of the processing chamber; and an exhaust unit for exhausting an atmosphere of the inside of the processing chamber, wherein the processing gas supply unit has at least two processing gas supply nozzles which extend running along an inner wall of the processing chamber in the stacking direction of the substrates and supply the processing gas to the inside of the processing chamber, and the inactive gas supply unit has a pair of inactive gas supply nozzles which are provided so as to extend running along the inner wall of the processing chamber in the stacking direction of the substrates and so as to sandwich at least one processing gas supply nozzle of the at least two processing gas supply nozzles from both sides thereof, along the circumferential direction of the substrates, and which supply the inactive gas to the inside of the processing chamber.
    • 本发明的基板处理装置包括:处理室,用于以水平姿态多层堆放和处理基板; 处理气体供应单元,用于将两种或多种类型的处理气体供应到处理室的内部; 用于向处理室的内部供应惰性气体的非活性气体供应单元; 以及用于排出处理室内部的气氛的排气单元,其中处理气体供应单元具有至少两个处理气体供应喷嘴,所述处理气体供应喷嘴沿着基板的堆叠方向沿处理室的内壁延伸并且供应 处理室内部的处理气体和非活性气体供给单元具有一对非活性气体供给喷嘴,其设置成沿着基板的堆叠方向沿着处理室的内壁延伸,因此 从而沿着基板的圆周方向从其两侧夹着至少两个处理气体供给喷嘴的至少一个处理气体供给喷嘴,并将惰性气体供给到处理室的内部。
    • 79. 发明授权
    • Connection structure or fastening structure with resonant circuit
    • 具有谐振电路的连接结构或紧固结构
    • US07244142B2
    • 2007-07-17
    • US10913500
    • 2004-08-09
    • Tsutomu Kato
    • Tsutomu Kato
    • G08B13/14
    • F16B1/0071F16B2001/0092F16L37/0985F16L37/144F16L2201/10
    • A connection structure or a fastening structure including a circuit which functions as a resonant circuit whose connection or fastening is confirmed by resonance of radio waves, the connection structure or a fastening structure has a connector for connecting a member to be connected or a clip for fastening a member to be fastened; a first circuit having first contacts on respective ends thereof; and a closed circuit functioning as a resonance circuit supported on the retainer or clip when in contact with the first contacts. Alternatively, the connection structure of fastening structure has a second circuit which disables a function of a resonance circuit upon contacting the first contact, and the first contacts and the second circuit are brought into contact simultaneously with connection of the connector or fastening of the clip.
    • 连接结构或紧固结构包括用作谐振电路的电路,其连接或紧固通过无线电波的共振确认,连接结构或紧固结构具有用于连接要连接的构件的连接器或用于紧固的夹子 要扣紧的会员 第一电路,其在其相应端部具有第一触点; 以及当与第一触点接触时作为支撑在保持器或夹子上的谐振电路的闭路。 或者,紧固结构的连接结构具有第二电路,其在与第一接触接触时禁用谐振电路的功能,并且第一触点和第二电路在连接器的连接或夹子的紧固的同时被接触。
    • 80. 发明授权
    • Electrical circuit for reducing switching losses in a switching element
    • 用于减少开关元件中的开关损耗的电路
    • US07148662B2
    • 2006-12-12
    • US10732488
    • 2003-12-11
    • Tsutomu Kato
    • Tsutomu Kato
    • G05F1/613
    • H02M1/34H02M3/158H02M2001/342Y02B70/1491
    • A switching power supply circuit which is capable of reducing switching losses which occur when a switching element goes into the on state from the off state or goes into the off state from the on state. Switching elements are alternately actuated to on and off with dead times during which period both the switching elements are off. When one of the switching elements goes into the on state from the off state, a diode that is coupled in parallel with the switching element goes into the on state due to the energy released from a choking coil. Consequently, the switching element is switched on at a voltage of 0V (zero volts). Thus, switching losses can be reduced. Besides, when the switching element goes into the off state from the on state, the voltage rises moderately across the switching element as compared to the current passing through the switching element because of a capacitor that is coupled in parallel with the switching element. Thus, switching losses can be reduced. The same is true in the case of the other switching element.
    • 一种开关电源电路,其能够减少当开关元件从断开状态进入接通状态或从接通状态进入断开状态时发生的开关损耗。 开关元件交替地致动以断开时间,在此期间两个开关元件都断开。 当其中一个开关元件从断开状态进入导通状态时,由于从阻塞线圈释放的能量,与开关元件并联耦合的二极管进入导通状态。 因此,开关元件在0V(零伏特)的电压下接通。 因此,可以减少开关损耗。 此外,当开关元件从导通状态进入截止状态时,与通过开关元件的电流相比,由于与开关元件并联耦合的电容器,电压跨越开关元件适度上升。 因此,可以减少开关损耗。 在另一个开关元件的情况下也是如此。