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    • 76. 发明授权
    • Manufacturing system
    • 制造系统
    • US4544318A
    • 1985-10-01
    • US477895
    • 1983-03-23
    • Hiroto NagatomoHisashi MaejimaJun SuzukiKeishin Fujikawa
    • Hiroto NagatomoHisashi MaejimaJun SuzukiKeishin Fujikawa
    • B65G49/07H01L21/00H01L21/02H01L21/67H01L21/677H01L21/68B65G1/06
    • H01L21/67276H01L21/67724H01L21/67727H01L21/67736H01L21/67769Y10T29/5196
    • A manufacturing system in which the automatic control of the system and the automatic control of a process management are organically coupled, thereby to sharply reduce the number of workers to be engaged in the manufacture. In order to establish both the versatility necessary for multiple type of treatment and the high efficiency necessary for large-quantity treatments, the arrangement of respective treatment sections is made the job-shop-type, and the construction of treating devices themselves included in the treatment sections is made the flow-shop-type, to achieve the consecutive automation. In order to also automate the management of the process, a stocker in which unfinished products are put is situated in a specified place of the system such as the central part thereof, while the process is put forward in such a manner that a conveyor machine controlled by a control unit having a computer reciprocates between the stocker and the groups of treatment sections. The manufacturing system is suitable for the fabrication of semiconductor devices which have many kinds of articles where each kind of article needs to be mass-produced.
    • 其中系统的自动控制和过程管理的自动控制的制造系统被有机地耦合,从而大大减少了从事制造的工人的数量。 为了确定多种类型的治疗所需的通用性和大量治疗所需的高效率,各处理部的布置成为工作车间型,并且包括在处理中的处理装置本身的构造 部分采用流动车间式,实现连续自动化。 为了使过程的管理自动化,将未完成产品放置的储料器位于诸如其中央部分的系统的指定位置,同时以使输送机控制的方式提出该过程 通过具有计算机的控制单元在储盘器和处理区组之间往复运动。 该制造系统适合制造具有多种制品的半导体器件,每种制品需要大量生产。
    • 80. 发明授权
    • Reflective film laminate
    • 反光膜层压板
    • US08603648B2
    • 2013-12-10
    • US12984056
    • 2011-01-04
    • Sho KatsuraNobuhiro KobayashiJun SuzukiToshiki Sato
    • Sho KatsuraNobuhiro KobayashiJun SuzukiToshiki Sato
    • B32B17/06B32B15/04C23C14/00
    • C23C14/5853C22C21/00C23C14/205G02B5/0858Y10T428/265
    • A reflective film laminate is provided with high productivity and at low cost in which a protective film with minimized pinholes is provided to improve the alkali resistance and warm water resistance of the reflective film laminate including a pure Al film or an Al-based alloy film so that a reflectivity reduction resulting from the elution or oxidization of the Al film in an alkaline or warm water environment is less likely to occur. The reflective film laminate of the present invention includes, over a substrate, a pure Al film or an Al-based alloy film as a first layer, and an oxide film of a metal containing one or more elements selected from the group consisting of Zr, Cr, Y, Nb, Hf, Ta, W, Ti, Si, and Mo as a second layer over the first layer. The thickness of the second layer is 0.1 to 10 nm.
    • 以低成本提供反射膜层叠体,其中提供具有最小化的针孔的保护膜以提高包括纯Al膜或Al基合金膜的反射膜层压体的耐碱性和耐温水性, 在碱性或温水环境中由于Al膜的洗脱或氧化引起的反射率降低不太可能发生。 本发明的反射膜层叠体在基板上包括作为第一层的纯Al膜或Al基合金膜,以及含有选自Zr, Cr,Y,Nb,Hf,Ta,W,Ti,Si和Mo作为第一层上的第二层。 第二层的厚度为0.1〜10nm。