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    • 77. 发明授权
    • Single-crystal nitride-based semiconductor substrate and method of manufacturing high-quality nitride-based light emitting device by using the same
    • 单晶氮化物系半导体基板及其制造方法
    • US07795050B2
    • 2010-09-14
    • US12416414
    • 2009-04-01
    • June O Song
    • June O Song
    • H01L21/00
    • H01L33/0075C30B25/18C30B29/403H01L33/12
    • A nitride-based light emitting device is manufactured by using a single-crystal nitride-based semiconductor substrate. A seed material layer is deposited on a first substrate where organic residues including a natural oxide layer are removed from an upper surface of the first substrate. A multifunctional substrate is grown from the seed material layer. The single-crystal nitride-based semiconductor layer including a nitride-based buffer layer is formed on the multifunctional substrate. The seed material layer primarily assists the growth of the multifunctional substrate, which is essentially required for the growth of the single-crystal nitride-based semiconductor substrate. The multifunctional substrate is prepared in the form of a single-crystal layer or a poly-crystal layer having a hexagonal crystalline structure. The light emitting device employing the single-crystal nitride-based semiconductor substrate is used as a next-generation white light source having high capacity, large area, high brightness and high performance.
    • 通过使用单晶氮化物系半导体基板制造氮化物系发光元件。 种子材料层沉积在第一衬底上,其中包括自然氧化物层的有机残余物从第一衬底的上表面去除。 从种子材料层生长多功能底物。 在多功能基板上形成包含氮化物系缓冲层的单晶氮化物系半导体层。 种子材料层主要帮助生长基本上为单晶氮化物基半导体衬底的生长所需的多功能衬底的生长。 多功能基板以具有六方晶系结构的单晶层或多晶层的形式制备。 采用单晶氮化物类半导体衬底的发光器件用作具有高容量,大面积,高亮度和高性能的下一代白光源。