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71. 发明授权

US08028400B2 Method for manufacturing a magnetic write head 有权
标题翻译：磁写头制造方法
公开(公告)号：US08028400B2
公开(公告)日：2011-10-04
申请号：US12043381
申请日：2008-03-06
申请人： Christian Rene Bonhote , Jeffrey S. Lille , Scott Arthur MacDonald
发明人： Christian Rene Bonhote , Jeffrey S. Lille , Scott Arthur MacDonald
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3116 , C25D5/022 , C25D5/34 , C25D5/48 , G11B5/1278 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T428/11
摘要： A method for forming a tapered, electroplated structure. The method involves forming a first mask structure having an opening. A shrink material is deposited into the opening, such that the thickness of the shrink material is less than the thickness of the first mask structure. The first mask structure and the shrink material are then heated causing the sides of the opening in the mask structure to bulge inward. The shrink material is then removed, and a first electrically conductive material can then be electroplated into the opening to a thickness that is much less than the thickness of the mask. The bulbous shaped of the deformed photoresist mask forms a taper on the first electrically conductive material. The first mask can then be removed and a second electrically conductive material can be electroplated over the first electrically conductive material.
摘要翻译：一种形成锥形电镀结构的方法。该方法包括形成具有开口的第一掩模结构。收缩材料沉积到开口中，使得收缩材料的厚度小于第一掩模结构的厚度。然后加热第一掩模结构和收缩材料，使得掩模结构中的开口的侧面向内凸出。然后去除收缩材料，然后可以将第一导电材料电镀到开口中至比掩模厚度小得多的厚度。变形的光致抗蚀剂掩模的球形形状在第一导电材料上形成锥形。然后可以去除第一掩模，并且可以在第一导电材料上电镀第二导电材料。

72. 发明授权

US08028399B2 Magnetic write pole fabrication 有权
标题翻译：磁写磁极制造
公开(公告)号：US08028399B2
公开(公告)日：2011-10-04
申请号：US11957481
申请日：2007-12-16
申请人： Amanda Baer , Jeffrey S. Lille , Aron Pentek
发明人： Amanda Baer , Jeffrey S. Lille , Aron Pentek
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49032 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： Write elements and methods of fabricating magnetic write poles are described. For one method, a vertical mask structure is formed on a magnetic layer in locations of a pole tip and a yoke of a write pole. The vertical mask structure may be formed by coating vertical surfaces of resists with an atomic layer deposition (ALD) process or a similar process. A removal process is then performed around the vertical mask structure to define the pole tip and part of the yoke of the write pole, and the vertical mask structure is removed. A lower portion of the pole tip is them masked while the upper portion of the pole tip and the part of the yoke is exposed. The upper portion of the pole tip and the part of the yoke are then expanded with magnetic material, such as with a plating process.
摘要翻译：描述制造磁性写入极的写入元件和方法。对于一种方法，在写入极的极尖和磁轭的位置的磁性层上形成垂直掩模结构。垂直掩模结构可以通过用原子层沉积（ALD）工艺或类似工艺涂覆抗蚀剂的垂直表面而形成。然后围绕垂直掩模结构执行去除处理以限定磁极尖端和写极的磁轭的一部分，并且去除垂直掩模结构。极尖的下部被掩蔽，而极尖的上部和轭的一部分露出。然后用磁性材料例如电镀工艺使磁极尖端的上部和磁轭的一部分膨胀。

73. 发明申请

US20100252440A1 Electroplating on ultra-thin seed layers 审中-公开
标题翻译：电镀超薄种子层
公开(公告)号：US20100252440A1
公开(公告)日：2010-10-07
申请号：US12802613
申请日：2010-06-09
申请人： Christian R. Bonhote , Jeffrey S. Lille , Xhavin Sinha
发明人： Christian R. Bonhote , Jeffrey S. Lille , Xhavin Sinha
IPC分类号： C25D5/10 , C25D5/00
CPC分类号： C25D5/02 , C25D7/123 , H01L21/76873 , H01L2221/1089
摘要： Methods and structures for the electroplating on ultra-thin seed layers are disclosed. A dual layer structure is utilized, consisting of a thicker, highly conductive layer surrounding device structures. Within the device die, an ultra-thin seed layer is employed, which is electrically coupled to the conduction layer. Using this technique, electroplating of critical device structures can be carefully controlled and made uniform across the full diameter of the wafer. The technique also allow for the deployment of ultra-thin seed layers of varying thickness and composition in different locations within the circuit device, or in different die on the wafer.
摘要翻译：公开了在超薄种子层上电镀的方法和结构。使用双层结构，由围绕器件结构的较厚的高导电层组成。在器件管芯内部，采用超薄种子层，其电耦合到导电层。使用这种技术，关键器件结构的电镀可以被仔细地控制并在晶片的整个直径上均匀。该技术还允许在电路装置内的不同位置或晶片上的不同模具中部署不同厚度和组成的超薄种子层。

74. 发明申请

US20100163520A1 STRUCTURE FORMATION USING METAL DEPOSITED ON A RIE-ABLE SEEDLAYER 失效
标题翻译：结构形成使用金属沉积在一个独立的SEEDLAYER
公开(公告)号：US20100163520A1
公开(公告)日：2010-07-01
申请号：US12345457
申请日：2008-12-29
申请人： Christian R. Bonhote , Jeffrey S. Lille , Ricardo Ruiz
发明人： Christian R. Bonhote , Jeffrey S. Lille , Ricardo Ruiz
IPC分类号： B44C1/22 , B05D5/12
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3123
摘要： Methods for fabricating a device component are provided. A substrate comprising a RIE stop layer, an oxide layer formed on the RIE stop layer, and a RIE-able layer formed on the oxide layer may be provided. A resist layer may be patterned on the RIE-able layer. A metal layer may be formed on portions of the RIE-able layer that are not covered by the resist layer. The resist layer may be removed and an RIE performed to remove exposed portions of the RIE-able layer and portions of the oxide layer beneath the exposed portions of the RIE-able layer. Thereafter, the metal layer may be removed, and the component may be formed in an opening in the oxide layer formed during the RIE.
摘要翻译：提供了制造器件部件的方法。可以提供包括RIE停止层，形成在RIE停止层上的氧化物层和形成在氧化物层上的RIE能层的衬底。抗蚀剂层可以在RIE能层上图案化。可以在RIE能层的未被抗蚀剂层覆盖的部分上形成金属层。可以去除抗蚀剂层，并执行RIE以去除RIE能层的暴露部分和在RIE能层的暴露部分下方的氧化物层的部分。此后，可以去除金属层，并且可以在RIE中形成的氧化物层的开口中形成该部件。

75. 发明授权

US07719069B2 Three terminal magnetic sensor having a collector region electrically isolated from a carrier substrate body 有权
标题翻译：三端子磁传感器具有与载体衬底本体电隔离的集电极区域
公开(公告)号：US07719069B2
公开(公告)日：2010-05-18
申请号：US11125648
申请日：2005-05-10
申请人： Jeffrey S. Lille
发明人： Jeffrey S. Lille
IPC分类号： H01L21/76
CPC分类号： H01L43/08 , G11B5/3993 , H01L29/66984
摘要： In one illustrative example, a three terminal magnetic sensor includes a collector region made of a semiconductor material, a base region, and an emitter region. An insulator layer is formed between the collector region and a carrier substrate body which carries the three terminal magnetic sensor. The insulator layer serves to reduce a capacitance otherwise present between the collector region and magnetic media at a magnetic field sensing plane of the three terminal magnetic sensor. Thus, the insulator layer electrically isolates the collector region from the carrier substrate body. The structure may be formed through use of a separation by implanting oxygen (SIMOX) technique or a wafer-bonding technique, as examples.
摘要翻译：在一个说明性示例中，三端磁传感器包括由半导体材料制成的集电极区域，基极区域和发射极区域。在集电体区域和承载三端子磁传感器的载体基板体之间形成绝缘体层。绝缘体层用于在三端子磁传感器的磁场感测平面处减小在集电极区域和磁介质之间存在的电容。因此，绝缘体层将集电极区域与载体基板主体电隔离。作为示例，可以通过使用通过注入氧气的分离（SIMOX）技术或晶片结合技术来形成该结构。

76. 发明申请

US20090168247A1 MAGNETIC HEAD WITH EMBEDDED SOLDER CONNECTION AND METHOD FOR MANUFACTURE THEREOF 审中-公开
标题翻译：具有嵌入式焊接连接的磁头及其制造方法
公开(公告)号：US20090168247A1
公开(公告)日：2009-07-02
申请号：US11966059
申请日：2007-12-28
申请人： Christian Rene Bonhote , Jeffrey S. Lille
发明人： Christian Rene Bonhote , Jeffrey S. Lille
IPC分类号： G11B5/60
CPC分类号： G11B5/4853 , G11B5/3163
摘要： A slider for magnetic data recording, the slider including a plurality of solder pads that are embedded into the head. The solder pads can be formed during the formation of read and/or write heads, and can each be contained within a cavity. These cavities can be photolithographically patterned so that they can be formed very close together. In addition, because the solder pads are contained within the cavities, they do not flow into one another as would standard solder balls so that the embedded solder balls can be spaced much more closely together than standard solder balls can, without the risk of shorting between solder pads.
摘要翻译：一种用于磁数据记录的滑动器，该滑块包括嵌入到头部中的多个焊盘。可以在形成读取和/或写入头期间形成焊盘，并且每个可以包含在腔内。这些空腔可以光刻图案化，使得它们可以非常接近地形成。另外，由于焊盘被包含在空腔内，它们不像标准焊球那样流入彼此，使得嵌入的焊球可以与标准焊球相隔得更紧密地在一起，而不会发生短路之间的短路焊盘

77. 发明申请

US20080232001A1 PERPENDICULAR WRITE HEAD HAVING A STEPPED FLARE STRUCTURE AND METHOD OF MANUFACTURE THEREOF 有权
标题翻译：具有阶梯式结构的平头书写头及其制造方法
公开(公告)号：US20080232001A1
公开(公告)日：2008-09-25
申请号：US11683972
申请日：2007-03-08
申请人： Christian Rene Bonhote , Thomas Dudley Boone , Quang Le , Jui-Lung Li , Jeffrey S. Lille , Scott Arthur MacDonald , Neil Leslie Robertson , Xhavin Sinha , Petrus Antonius Van Der Heijden
发明人： Christian Rene Bonhote , Thomas Dudley Boone , Quang Le , Jui-Lung Li , Jeffrey S. Lille , Scott Arthur MacDonald , Neil Leslie Robertson , Xhavin Sinha , Petrus Antonius Van Der Heijden
IPC分类号： G11B5/33 , G11B5/127 , G11B5/147
CPC分类号： G11B5/3146 , G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3166 , G11B5/3169
摘要： A magnetic write head for data recording having a magnetic write pole with a stepped magnetic shell structure that defines a secondary flare point. The secondary flare point defined by the magnetic shell portion can be more tightly controlled with respect to its distance from the air bearing surface (ABS) of the write head than can a traditional flare point that is photolithographically on the main pole structure. This allows the effective flare point of the write head to be moved much closer to the ABS than would otherwise be possible using currently available tooling and photolithography techniques. The write head may also include a magnetic trailing shield that wraps around the main pole portion. The trailing shield can have a hack edge defining a trailing shield throat height that is either between the secondary flare point or coincident or behind the secondary flare point, depending on design requirements
摘要翻译：一种用于数据记录的磁写头，具有限定二次闪光点的阶梯状磁性壳结构的磁性写入极。由磁性壳体部分限定的次级火炬点可以相对于与写入磁头的空气轴承表面（ABS）的距离比在主极结构上光刻的传统闪光点更加严格地控制。这使得使用当前可用的工具和光刻技术可以使写入头的有效喇叭点移动得更接近ABS。写头还可以包括围绕主极部分包裹的磁性后挡板。后挡板可以具有限定根据设计要求定义在次级火炬点之间或重合或后面的次要耀斑点之间的尾部屏蔽喉部高度的黑色边缘

78. 发明授权

US07397625B2 Large protrusion recording head for controlled magnetic spacing recording/reading 失效
标题翻译：用于受控磁距记录/读取的大型突起记录头
公开(公告)号：US07397625B2
公开(公告)日：2008-07-08
申请号：US11201635
申请日：2005-08-10
申请人： Jeffrey S. Lille
发明人： Jeffrey S. Lille
IPC分类号： G11B21/02 , G11B5/596 , G11B5/127 , G11B5/17
CPC分类号： G11B5/187 , G11B5/3106 , G11B5/3116 , G11B5/3133 , G11B5/3906 , G11B5/607 , Y10T29/49021
摘要： A magnetic head structure having enhanced protrusion and having a first pole structure, a second pole structure forming a yoke with the fist pole, a coil structure disposed in the yoke, and a layer of partially cured polymer operatively coupled to the yoke. Also disclosed is a magnetic head having a first pole structure, a second pole structure forming a yoke with the fist pole, a coil structure disposed in the yoke, and a layer of at least partially insulative material operatively coupled to the read and/or write head for providing enhanced protrusion, the at least partially insulative material having a coefficient of thermal expansion higher than a coefficient of thermal expansion of fully cured hard bake novalac. Further embodiments include disk drive systems having the head structures described herein.
摘要翻译：一种磁头结构，其具有增强的突起并且具有第一极结构，形成与第一极的轭的第二极结构，设置在轭中的线圈结构以及可操作地耦合到轭的部分固化的聚合物层。还公开了一种磁头，其具有第一极结构，形成与第一极的轭的第二极结，设置在磁轭中的线圈结构以及可操作地耦合到读和/或写的至少部分绝缘材料的层用于提供增强的突起的头部，所述至少部分绝缘材料的热膨胀系数高于完全固化的硬烘焙novalac的热膨胀系数。其他实施例包括具有本文所述头部结构的磁盘驱动器系统。

79. 发明申请

US20080151422A1 Enhanced planarization liftoff structure and method for making the same 有权
标题翻译：增强平面化提升结构及其制作方法
公开(公告)号：US20080151422A1
公开(公告)日：2008-06-26
申请号：US11644159
申请日：2006-12-22
申请人： Jeffrey S. Lille , Amanda Baer , John Jaekoyun Yang
发明人： Jeffrey S. Lille , Amanda Baer , John Jaekoyun Yang
IPC分类号： G11B5/127 , B44C1/22
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163 , G11B5/3169 , G11B5/3173
摘要： Systems and methods for enhanced planarization liftoff structures. In accordance with a first method embodiment, a method for manufacturing a pole tip for magnetic recording comprises accessing a wafer comprising a plurality of pole tips and a plurality of pole tip masks corresponding to the plurality of pole tips. Non magnetic material is filled adjacent to the plurality of pole tips. Material adjacent to the plurality of pole tips is etched. Subsequent to the etching, the wafer is planarized to a level equal to or higher than a level of the trailing edges of the plurality of pole tips. The enhanced liftoff structure enables decreased planarization processing, resulting in a decreased process window. As a beneficial result, manufacturing throughput and quality are improved.
摘要翻译：用于增强平面化起飞结构的系统和方法。根据第一方法实施例，一种用于制造用于磁记录的极尖的方法包括访问包括多个极尖的晶片和与多个极尖相对应的多个极尖端掩模。非磁性材料与多个极尖相邻地填充。蚀刻与多个极尖相邻的材料。在蚀刻之后，晶片被平坦化到等于或高于多个极尖的后缘的水平的水平。增强的提升结构使平坦化处理减少，从而减少了处理窗口。作为有益的结果，提高了生产量和质量。

80. 发明申请

US20080112079A1 PERPENDICULAR MAGNETIC RECORDING SYSTEM WITH PATTERNED MEDIUM AND MANUFACTURING PROCESS FOR THE MEDIUM 失效
标题翻译：具有中等尺寸的中等磁记录系统和中等制造工艺
公开(公告)号：US20080112079A1
公开(公告)日：2008-05-15
申请号：US11558846
申请日：2006-11-10
申请人： Eric Edward Fullerton , Olav Hellwig , Jeffrey S. Lille , James Terrence Olson , Petrus Antonius VanDerHeijden , Henry Hung Yang
发明人： Eric Edward Fullerton , Olav Hellwig , Jeffrey S. Lille , James Terrence Olson , Petrus Antonius VanDerHeijden , Henry Hung Yang
IPC分类号： G11B5/17
CPC分类号： G11B5/855 , G11B5/66 , G11B5/667 , G11B5/7325
摘要： A patterned perpendicular magnetic recording medium of the type that has spaced-apart pillars with magnetic material on their ends and with nonmagnetic trenches between the pillars is made with a method that allows use of a pre-etched substrate. The substrate has a generally planar surface at the trenches and comprises material that when heated will diffuse into the magnetic recording layer material and chemically react with one or more of the elements typically used in the recording layer. The pillars are formed of material that will not diffuse into the recording layer. After the recording layer is formed over the entire substrate so as to cover both the pillar ends and the trenches, the substrate is annealed. This results in the destruction or at least substantial reduction of any ferromagnetism in the recording layer material in the trenches so that the trenches are nonmagnetic. The annealing does not affect the recording layer on the ends of the pillars because the pillars are formed of material that will not diffuse into the recording layer.
摘要翻译：具有在其端部上具有磁性材料的间隔开的柱和在柱之间的非磁性沟槽的类型的垂直磁记录介质是通过允许使用预蚀刻的衬底的方法制成的。衬底在沟槽处具有大致平坦的表面，并且包括当加热时将扩散到磁记录层材料中并与通常用于记录层中的一种或多种元素发生化学反应的材料。支柱由不会扩散到记录层中的材料形成。在整个基板上形成记录层以覆盖柱端和沟槽两者之后，将基板退火。这导致在沟槽中的记录层材料中的任何铁磁体的破坏或至少显着减少，使得沟槽是非磁性的。退火不会影响支柱端部的记录层，因为支柱由不会扩散到记录层中的材料形成。

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