会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 71. 发明授权
    • Method for forming charge storage structure
    • 电荷储存结构形成方法
    • US5994183A
    • 1999-11-30
    • US996696
    • 1997-12-23
    • Kuo-Tai HuangWen-Yi HsiehTri-Rung Yew
    • Kuo-Tai HuangWen-Yi HsiehTri-Rung Yew
    • H01L21/02H01L21/285H01L21/768H01L21/8242H01L27/108
    • H01L28/60H01L21/28518H01L27/10852
    • A method for forming a high capacitance charge storage structure that can be applied to a substrate wafer having MOS transistor already formed thereon. The method is to form an insulating layer above the substrate wafer. Next, a contact window exposing a source/drain region is formed in the insulating layer. Then, a tungsten suicide layer, which functions as a lower electrode for the charge storage structure, is formed over the substrate. Thereafter, a tungsten nitride layer is formed over the tungsten silicide layer, and then a dielectric layer is formed over the tungsten nitride layer. The dielectric layer is preferably a tantalum oxide layer. Finally, a titanium nitride layer, which functions as an upper electrode for the charge storage structure, is formed over the tantalum oxide layer.
    • 一种用于形成可以应用于已经形成有MOS晶体管的衬底晶片的高电容电荷存储结构的方法。 该方法是在衬底晶片之上形成绝缘层。 接下来,在绝缘层中形成暴露源极/漏极区域的接触窗口。 然后,在基板上形成用作电荷存储结构的下电极的硅化钨层。 此后,在硅化钨层之上形成氮化钨层,然后在氮化钨层上形成电介质层。 电介质层优选为氧化钽层。 最后,在钽氧化物层上形成用作电荷存储结构的上电极的氮化钛层。
    • 72. 发明授权
    • Dual damascence process
    • 双重大马士革过程
    • US5990015A
    • 1999-11-23
    • US41567
    • 1998-03-12
    • Tony LinYimin HuangTri-Rung Yew
    • Tony LinYimin HuangTri-Rung Yew
    • H01L21/768H01L21/44
    • H01L21/76813H01L21/76807
    • A dual damascene process can be used to form an interconnect. A first dielectric layer is formed on a semiconductor substrate having a device layer formed thereon. A stop layer is formed on the first dielectric layer and a second dielectric layer is formed on the stop layer. A hard mask layer is formed and patterned on the second dielectric layer so that an opening is formed to expose the second dielectric layer therewithin. The second dielectric layer, the stop layer and a part of the first dielectric layer are etched within the opening by photolithography and etching, so that a contact window is formed. Using the hard mask layer as a hard mask, an etching is performed so that a metal trench penetrating through the second dielectric layer is formed, and the device layer within the contact window is exposed.
    • 可以使用双镶嵌工艺来形成互连。 在其上形成有器件层的半导体衬底上形成第一介电层。 在第一电介质层上形成阻挡层,在停止层上形成第二电介质层。 在第二电介质层上形成并图案化硬掩模层,从而形成开口以在其中露出第二介电层。 通过光刻和蚀刻在开口内蚀刻第二介电层,停止层和第一介电层的一部分,从而形成接触窗。 使用硬掩模层作为硬掩模,进行蚀刻,从而形成穿过第二介电层的金属沟槽,并且暴露接触窗内的器件层。
    • 73. 发明授权
    • Method for fabricating interconnections with carbon nanotubes
    • 制造与碳纳米管互连的方法
    • US08461037B2
    • 2013-06-11
    • US13094388
    • 2011-04-26
    • Hsin-wei WuChung-Min TsaiTri-Rung Yew
    • Hsin-wei WuChung-Min TsaiTri-Rung Yew
    • H01L21/00
    • H01L23/53276H01L21/76849H01L21/76876H01L21/76879H01L2221/1094H01L2924/0002H01L2924/00
    • A method for fabricating interconnections with carbon nanotubes of the present invention comprises the following steps: forming a dual-layer that contains a catalytic layer and an upper covering layer on the periphery of a hole connecting with a substrate; and growing carbon nanotubes on the catalytic layer with the upper covering layer covering the carbon nanotubes. The present invention grows the carbon nanotubes between the catalytic layer and the upper covering layer. The upper covering layer protects the catalytic layer from being oxidized and thus enhances the growth of the carbon nanotubes. The carbon nanotubes are respectively connected with the lower substrate and an upper conductive wire via the catalytic layer and the upper covering layer, which results in a lower contact resistance. Moreover, the upper covering layer also functions as a metal-diffusion barrier layer to prevent metal from spreading to other materials via diffusion or other approaches.
    • 本发明的制造与碳纳米管的互连的方法包括以下步骤:在与基板连接的孔的周围形成包含催化剂层和上覆盖层的双层; 并在上覆盖层覆盖碳纳米管的催化层上生长碳纳米管。 本发明在催化层和上覆盖层之间生长碳纳米管。 上覆盖层保护催化层不被氧化,从而增强碳纳米管的生长。 碳纳米管分别通过催化层和上覆盖层与下基板和上导电线连接,导致较低的接触电阻。 此外,上覆盖层还用作金属扩散阻挡层,以防止金属通过扩散或其它方法扩散到其它材料。
    • 74. 发明申请
    • ELECTRIC CONDUCTIVITY-BASED BIOSENSOR
    • 基于电导率的生物传感器
    • US20120148449A1
    • 2012-06-14
    • US13114717
    • 2011-05-24
    • Ya-Hsuan ChuangKuo-Liang LiuTri-Rung Yew
    • Ya-Hsuan ChuangKuo-Liang LiuTri-Rung Yew
    • G01N27/00
    • G01N27/125
    • An electric conductivity-based biosensor electrochemically detects the concentration of tested objects via measuring impedance or capacitance variation of the tested objects. The biosensor comprises a substrate, two electric-conduction electrodes arranged on the substrate, an antibody adhesion layer arranged on a region of the substrate and a plurality of antibodies arranged on the antibody adhesion layer. The antibody adhesion layer is between the two electric-conduction electrodes. The antibodies are connected with a plurality of tested objects. The tested objects connected with the antibodies form an electric-conduction group contacting the two electric-conduction electrodes. The concentration of the tested objects can be provided via measuring impedance or capacitance between the two electric-conduction electrodes.
    • 基于电导率的生物传感器通过测量被测物体的阻抗或电容变化来电化学地检测被测物体的浓度。 生物传感器包括衬底,布置在衬底上的两个导电电极,布置在衬底的区域上的抗体粘附层和布置在抗体粘附层上的多个抗体。 抗体粘附层位于两个导电电极之间。 抗体与多个测试对象连接。 与抗体连接的测试对象形成接触两个导电电极的导电组。 可以通过测量两个导电电极之间的阻抗或电容来提供被测物体的浓度。
    • 77. 发明授权
    • Specimen kit and fabricating method thereof
    • 试样套件及其制造方法
    • US07807979B2
    • 2010-10-05
    • US11952148
    • 2007-12-07
    • Kuo-Liang LiuTri-Rung Yew
    • Kuo-Liang LiuTri-Rung Yew
    • G01F23/00
    • H01J37/20H01J37/26H01J2237/2003
    • A specimen kit for enclosing a specimen is described, including a first substrate, a second substrate and a sealant. The first substrate has a first observation window at which a thickness thereof is smaller than that of the other parts thereof. The second substrate has a second observation window at which a thickness thereof is smaller than that of the other parts thereof, and is disposed on the first substrate such that the second observation window is aligned to the first observation window and an interval is present between the first and the second substrates. The sealant is disposed between the first and the second substrates and surrounds the first and the second observation windows to seal a space between fringes of the first and the second substrate, thus defining a specimen cell between the first and the second substrates.
    • 描述了用于封装样本的标本试剂盒,包括第一基底,第二基底和密封剂。 第一基板具有第一观察窗,其第一观察窗的厚度小于其他部分的厚度。 第二基板具有第二观察窗,其第二观察窗的厚度小于其他部分的厚度,并且设置在第一基板上,使得第二观察窗对准于第一观察窗,并且在第二观察窗之间存在间隔 第一和第二基板。 密封剂设置在第一和第二基板之间并且围绕第一和第二观察窗口以密封第一和第二基板的边缘之间的空间,从而在第一和第二基板之间限定了样本池。
    • 78. 发明申请
    • SPECIMEN KIT AND FABRICATING METHOD THEREOF
    • 样本套件及其制作方法
    • US20080135778A1
    • 2008-06-12
    • US11952148
    • 2007-12-07
    • Kuo-Liang LiuTri-Rung Yew
    • Kuo-Liang LiuTri-Rung Yew
    • H01J37/20B29C65/54
    • H01J37/20H01J37/26H01J2237/2003
    • A specimen kit for enclosing a specimen is described, including a first substrate, a second substrate and a sealant. The first substrate has a first observation window at which a thickness thereof is smaller than that of the other parts thereof. The second substrate has a second observation window at which a thickness thereof is smaller than that of the other parts thereof, and is disposed on the first substrate such that the second observation window is aligned to the first observation window and an interval is present between the first and the second substrates. The sealant is disposed between the first and the second substrates and surrounds the first and the second observation windows to seal a space between fringes of the first and the second substrate, thus defining a specimen cell between the first and the second substrates.
    • 描述了用于封装样本的标本试剂盒,包括第一基底,第二基底和密封剂。 第一基板具有第一观察窗,其第一观察窗的厚度小于其他部分的厚度。 第二基板具有第二观察窗,其第二观察窗的厚度小于其他部分的厚度,并且设置在第一基板上,使得第二观察窗对准于第一观察窗,并且在第二观察窗之间存在间隔 第一和第二基板。 密封剂设置在第一和第二基板之间并且围绕第一和第二观察窗口以密封第一和第二基板的边缘之间的空间,从而在第一和第二基板之间限定了样本池。