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    • 71. 发明申请
    • METHOD OF OPTIMIZING PROCESS RECIPE OF SUBSTRATE PROCESSING SYSTEM
    • 基板加工系统优化方法的方法
    • US20100198386A1
    • 2010-08-05
    • US12760017
    • 2010-04-14
    • Kaname YAMAJIKiyoshi SuzukiYuichi Takenaga
    • Kaname YAMAJIKiyoshi SuzukiYuichi Takenaga
    • G05B13/02
    • C23C16/52G05B13/021H01L21/67005H01L22/12H01L22/20
    • The present invention is a method of optimizing a process recipe of a substrate processing system including: a substrate processing apparatus that performs a film deposition process of a substrate to be processed according to a process recipe; a data processing unit that executes a calculation for optimizing the process recipe; and a host computer; the substrate processing apparatus, the data processing unit, and the host computer being connected to each other through a network. The present invention includes the steps of: measuring a film thickness of a substrate to be processed that has been subjected to a film deposition process by the substrate processing apparatus; sending a command for conducting a process-recipe optimizing process from the host computer to the substrate processing apparatus, when the measured film thickness is deviated from a target film thickness and the deviation is beyond an allowable range; and in response to the command for conducing a process-recipe optimizing process from the host computer, sending required data from the substrate processing apparatus to the data processing unit, causing the data processing unit to execute a process-recipe optimizing calculation to calculate an optimum process recipe for achievement of the target film thickness, and updating the process recipe in the substrate processing apparatus based on the calculated result.
    • 本发明是一种优化基板处理系统的工艺配方的方法,包括:基板处理装置,其根据处理配方进行待加工基板的成膜处理; 数据处理单元,其执行用于优化处理配方的计算; 和主机; 基板处理装置,数据处理单元和主机通过网络彼此连接。 本发明包括以下步骤:测量由基板处理装置进行的膜沉积处理的被处理基板的膜厚; 当测量的膜厚度偏离目标膜厚度并且偏差超出允许范围时,发送用于进行从主机到基板处理装置的处理配方优化处理的命令; 并且响应于从主计算机进行处理配方优化处理的命令,将所需数据从基板处理装置发送到数据处理单元,使数据处理单元执行处理配方优化计算以计算最佳值 用于实现目标膜厚度的处理配方,以及基于计算结果更新基板处理装置中的处理配方。
    • 78. 发明授权
    • Display control apparatus having a display of text data and image data
and display control method for the same
    • 具有显示文本数据和图像数据的显示控制装置及其显示控制方法
    • US6067070A
    • 2000-05-23
    • US791465
    • 1997-01-27
    • Kiyoshi SuzukiTakio Yoshida
    • Kiyoshi SuzukiTakio Yoshida
    • G06F15/02G06F3/033G06F3/041G06F3/048G06F3/14G09G5/00G09G5/26G09G5/36G09G5/40
    • G09G5/00G06F3/0481G06F3/0485G06F2203/04803
    • When text data and image data are displayed in a scale-down display area in a one-sight display, the text data is scaled down with a first scale-down percentage according to which characters are recognizable, and the image data is scaled down with a second scale-down percentage according to which the image can be all accommodated horizontally and the configuration as a whole can be easily recognized. Moreover, when the text data is displayed in the scale-down display area, a character series included in the text data is adjusted into a character series layout in which a line end is set to correspond to a number of characters per line in the scale-down display area, so that no line in the scale-down display area has an undisplayed character that is not accommodated in that line. The character arrangement of the text data is set according to the character series layout. Consequently, a display control apparatus of excellent visual recognition and operability that allows content of both the text data and the image data to be easily confirmed in the one-sight display (mixed one-sight display) where the text data and the image data are displayed in the same screen at the same time.
    • 当在一次性显示中的缩小显示区域中显示文本数据和图像数据时,以可识别的字符的第一缩小比例缩放文本数据,并且图像数据按比例缩小, 第二缩小百分比,根据该比例,图像可以全部被水平地容纳,并且可以容易地识别整体的配置。 此外,当在缩小显示区域中显示文本数据时,包括在文本数据中的字符系列被调整为字符串列布局,其中行端被设置为对应于比例中每行的字符数 下拉显示区域,使得缩小显示区域中的任何线条都不具有未显示的字符,该字符不在该行中。 文字数据的字符排列按照字符序列布局设置。 因此,能够容易地在文本数据和图像数据的一次性显示(混合一次性显示)中确认文本数据和图像数据两者的内容的优异的视觉识别和可操作性的显示控制装置 同时显示在同一屏幕上。