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    • 75. 发明授权
    • Galvano-mirror
    • Galvano镜
    • US06262827B1
    • 2001-07-17
    • US09559093
    • 2000-04-27
    • Satoshi UedaHisao Okuda
    • Satoshi UedaHisao Okuda
    • G02B2608
    • G02B26/0841
    • A galvano-mirror includes a mirror substrate provided with a frame, a mirror element and torsion bars rotatably connecting the mirror element to the frame. The mirror element is provided with a body having an obverse surface and a reverse surface. A mirror surface is formed on the obverse surface, while first electrodes are formed on the reverse surface. The galvano-mirror also includes an electrode substrate provided with second electrodes arranged in facing relation to the first electrodes. The electrode substrate is formed with a through-hole extending through a thickness thereof and facing the mirror element.
    • 电流镜包括设置有框架的镜基板,镜子元件和将镜子元件可旋转地连接到框架的扭力杆。 镜元件设置有具有正面和反面的主体。 在正面上形成镜面,而在反面上形成第一电极。 电流镜还包括设置有与第一电极相对设置的第二电极的电极基板。 电极基板形成有贯穿其厚度并且面向镜子元件的通孔。