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    • 75. 发明申请
    • Optical disk apparatus
    • US20060002251A1
    • 2006-01-05
    • US11172545
    • 2005-06-30
    • Akira YoshikawaKenji Kondo
    • Akira YoshikawaKenji Kondo
    • G11B7/00
    • G11B7/0946G11B7/08511G11B7/0908G11B2007/0013
    • An optical disk apparatus is provided with an actuator that moves a beam spot that is formed by an optical head on an optical disk to recording surfaces; position control portions that control a position of the beam spot based on the output signal of the optical head; a disturbance estimation observer relating to the actuator; and a summing circuit that takes a sum of the output of the position control portion and the output of the observer, so as to drive the actuator based on the output of the summing circuit. The optical disk apparatus further is provided with a system controller that turns the observer on and off, a LPF that attenuates the high-frequency components of the output of the observer and retains the final value of the observer when the observer is turned off, and a switching circuit that switches between the output of the observer and the output of the LPF according to whether the observer is on or off. When the observer processing is off, the output of the LPF is supplied to the summing circuit. Thereby, instability in the control due to observer processing can be avoided even at the time of mode transition or addition of disturbance from outside.
    • 76. 发明授权
    • Investigation device and investigation method
    • 调查手段及调查方法
    • US06968079B2
    • 2005-11-22
    • US09886976
    • 2001-06-25
    • Akira YoshikawaKazuhisa MachidaHitoshi KomuroTakehiro HiraiKatsuhiro Kitahashi
    • Akira YoshikawaKazuhisa MachidaHitoshi KomuroTakehiro HiraiKatsuhiro Kitahashi
    • G01N21/956G06T1/00G06T7/00G06T7/60H01L21/66G06K9/00
    • G06T7/001G06T7/0002G06T7/60G06T2200/24G06T2207/30148
    • The present invention relates to an inspection device and inspection method of a specimen, particularly to the inspection device and inspection method of defects of semiconductor wafers, and the object is to cope with the increase of inspection images and provide an inspection device and inspection method which is capable of classification by sub class, meeting the user needs, in addition to the automatic classification by an inspection device.To achieve the afore-mentioned object, the present invention provides an inspection device, comprising a storage means for storing the images obtained and a display means equipped with the first display area for displaying multiple images stored in the storage means and the second display area for displaying the images which are classified according to the characteristics of the displayed images (called the classified images), wherein the display means displays the class of the specimen, displays the sub class which is set manually for each class, and also displays the images selected by the sub class as a mass of the classified images for each sub class.
    • 本发明涉及一种试样的检查装置和检查方法,特别涉及检查装置和半导体晶片的缺陷检查方法,其目的是应对检查图像的增加,并提供检查装置和检查方法, 能够通过子类进行分类,满足用户需求,除了通过检查设备进行自动分类。 为了实现上述目的,本发明提供了一种检查装置,包括:存储装置,用于存储所获得的图像;以及显示装置,配备有用于显示存储在存储装置中的多个图像的第一显示区域和第二显示区域, 显示根据显示图像的特性(称为分类图像)分类的图像,其中显示装置显示样本的类别,显示为每个类别手动设置的子类,并且还显示所选择的图像 通过子类作为每个子类的分类图像的质量。