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    • 76. 发明授权
    • Method for the formation of silica thin films
    • 二氧化硅薄膜的形成方法
    • US06191183B1
    • 2001-02-20
    • US09412219
    • 1999-10-05
    • Akihiko KobayashiKatsutoshi MineTakashi NakamuraMotoshi SasakiKiyotaka Sawa
    • Akihiko KobayashiKatsutoshi MineTakashi NakamuraMotoshi SasakiKiyotaka Sawa
    • C08J328
    • C09D183/04C08G77/12H01L21/316Y10T428/31663
    • The instant invention pertains to a composition that can form silica thin films, wherein said composition performs well as a substrate planarizing coating when applied to a substrate and can be converted by exposure to high-energy radiation into silica thin film with an excellent electrical insulating performance. The composition for the formation of silica thin films comprises (A) a hydrogen silsesquioxane resin that contains at least 45 weight % hydrogen silsesquioxane resin with a molecular weight no greater than 1,500; and (B) solvent. A silica thin film is produced by evaporating the solvent (B), and then converting at least a portion of the hydrogen silsesquioxane resin (A) to silica by exposing the surface of the said substrate to high-energy radiation. The preferred substrate is a semiconductor substrate having at least one electrically conductive layer.
    • 本发明涉及可以形成二氧化硅薄膜的组合物,其中所述组合物在施加到基底上时作为基底平面化涂层表现良好,并且可以通过暴露于高能辐射而转化成具有优异电绝缘性能的二氧化硅薄膜 。 用于形成二氧化硅薄膜的组合物包括(A)含有至少45重量%的分子量不超过1500的氢倍半硅氧烷树脂的氢倍半硅氧烷树脂; 和(B)溶剂。 通过蒸发溶剂(B)制备二氧化硅薄膜,然后通过将所述基材的表面暴露于高能辐射而将至少一部分氢倍半硅氧烷树脂(A)转化为二氧化硅。 优选的衬底是具有至少一个导电层的半导体衬底。
    • 79. 发明授权
    • Two-part curable liquid silicone composition
    • 两部分可固化液体硅酮组合物
    • US5708054A
    • 1998-01-13
    • US738486
    • 1996-10-28
    • Katsutoshi MineTakae TakeuchiKimio Yamakawa
    • Katsutoshi MineTakae TakeuchiKimio Yamakawa
    • C08L83/05C08K5/5419C08L83/04C08L83/07C08K9/06
    • C08L83/04C08G77/12C08G77/18C08G77/20
    • A two-part composition comprising a liquid composition (I) composed of the components (A), (C), and (E) described below and a liquid composition (II) composed of the components (A) (B), (C), and (D) described below, which yield upon mixing a curable liquid silicone composition comprising (A) an alkenyl-substituted poyorganopolysiloxane; (B) a hydrogen-substituted organopolysiloxane in an amount that provides 0.3 to 10 moles silicon-bonded hydrogen from component (B) per 1 mole alkenyl in component (A); (C) an inorganic filler that has a specific surface of 50 to 500 m.sup.2 /g; (D) an alkoxy-substituted organopolysiloxane; and (E) platinum catalyst in a quantity sufficient to cure the instant composition; wherein the curable silicone composition that results when liquid composition (I) and liquid composition (II) are mixed, is thixotropic and has a viscosity, immediately upon the mixing that is greater than the viscosity of liquid composition (II).
    • 包含由下述组分(A),(C)和(E)组成的液体组合物(I)和由组分(A)(B),(C)组成的液体组合物(II)的两部分组合物 )和(D),其在混合包含(A)链烯基取代的聚有机聚硅氧烷的可固化液体硅氧烷组合物时产率; (B)组分(A)中每1摩尔烯烃从组分(B)提供0.3至10摩尔与硅键合的氢的量的氢取代的有机聚硅氧烷; (C)比表面积为50〜500m 2 / g的无机填料; (D)烷氧基取代的有机聚硅氧烷; 和(E)铂催化剂,其量足以固化本发明组合物; 其中当混合液体组合物(I)和液体组合物(II)时产生的可固化有机硅组合物是触变性的并且在混合时立即具有大于液体组合物(II)的粘度的粘度)。