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71. 发明授权

US07014530B2 Slider fabrication system for sliders with integrated electrical lapping guides 失效
标题翻译：滑块制造系统，用于带集成电动研磨导轨的滑块
公开(公告)号：US07014530B2
公开(公告)日：2006-03-21
申请号：US10675043
申请日：2003-09-29
申请人： Prakash Kasiraj , Quang Le , Huey Tzeng , Xiao Z. Wu
发明人： Prakash Kasiraj , Quang Le , Huey Tzeng , Xiao Z. Wu
IPC分类号： B24B49/00
CPC分类号： B24B49/16 , B24B37/00 , G11B5/3169
摘要： A slider is described with a resistive electro-lapping guide (ELG), which is aligned with a structure in the write head such as the throat height or trailing shield thickness and extends from the lapping region through the ABS and is connected to pads on the surface of the slider. In a second embodiment the ELG is disposed entirely in the section of the slider which will be removed by lapping. Another embodiment of the invention is a system for single slider lapping which simultaneously monitors the resistance of the read sensor or a read head ELG and at least one ELG that is aligned with a structure in the write head. A controller uses the resistance information to implement an algorithm which decides when lapping should be terminated.
摘要翻译：使用电阻式电动研磨引导件（ELG）描述滑块，其与写入头部中的结构对准，例如喉部高度或尾部屏蔽层厚度，并从研磨区域穿过ABS延伸并连接到滑块的表面。在第二实施例中，ELG完全设置在滑块的将通过研磨去除的部分中。本发明的另一个实施例是用于单个滑块研磨的系统，其同时监视读取传感器或读取头ELG和与写入头中的结构对准的至少一个ELG的电阻。控制器使用电阻信息来实现一种算法，该算法决定何时结束研磨。

72. 发明申请

US20050219744A1 Method for manufacturing a perpendicular write head 失效
标题翻译：用于制造垂直写头的方法
公开(公告)号：US20050219744A1
公开(公告)日：2005-10-06
申请号：US10813836
申请日：2004-03-31
申请人： Michael Feldbaum , Quang Le
发明人： Michael Feldbaum , Quang Le
IPC分类号： G11B5/127 , G11B5/147
CPC分类号： G11B5/1278 , G11B5/1475 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49052
摘要： A method for manufacturing a write head having a small write pole tip that emits magnetic flux sufficient for effective perpendicular recording. The method creates a leading edge taper (LET) between the write pole tip and a magnetic flux guide to create a sufficient magnetic flux in the write pole. The LET is fabricated by ion milling away a sacrificial striated material whose layers have different rates of ion milling. The top layer of material thus mills away faster than lower layers, creating the required tapering of a negative mold. An endpoint material stops the milling. The LET magnetic material is then spattered into the negative mold, resulting in a well defined taper of magnetic flux shaping material extending the magnetic flux guide to the write pole tip, such that the write pole tip is able to emit sufficient magnetic flux for perpendicular recording.
摘要翻译：一种用于制造写头的方法，所述写头具有发射足以有效垂直记录的磁通量的小写尖端。该方法在写极尖和磁通引导之间产生前缘锥形（LET），以在写入极中产生足够的磁通量。 LET通过离子铣削除去具有不同离子铣削速率的牺牲条纹材料来制造。因此，顶层材料的磨料速度比较低，从而产生了负模具所需的锥形化。端点材料停止铣削。然后将LET磁性材料溅入阴模中，产生明确限定的磁通量成形材料的锥形，该磁通量成形材料将磁通引导件延伸到写入磁极尖端，使得写入磁极尖端能够发射足够的磁通量用于垂直记录。

73. 发明申请

US20050047014A1 Apparatus for patterning a self-aligned coil using a damascene process 有权
标题翻译：用于使用镶嵌工艺图案化自对准线圈的装置
公开(公告)号：US20050047014A1
公开(公告)日：2005-03-03
申请号：US10652877
申请日：2003-08-29
申请人： Daniel Bedell , Quang Le , Edward Lee , Son Nguyen , Vladimir Nikitin , Murali Ramasubramanian
发明人： Daniel Bedell , Quang Le , Edward Lee , Son Nguyen , Vladimir Nikitin , Murali Ramasubramanian
IPC分类号： G11B5/127 , G11B5/147
CPC分类号： G11B5/127
摘要： An apparatus for patterning a self-aligned coil using a damascene process is disclosed. Coil pockets are formed in a first insulation layer disposed over a first pole layer. A barrier/seed layer is deposited along walls of the coil pockets in the insulation layer. Copper is formed in the coil pockets and over the insulation layer. The copper is planarized down to the insulation layer. The self-aligned coil process packs more copper into the same coil pocket and relaxes the coil alignment tolerance. Protrusions are prevented because of the more efficient and uniform spacing of the coil to reduce heat buildup in the head during a write.
摘要翻译：公开了一种使用镶嵌工艺图案化自对准线圈的装置。在设置在第一极层上的第一绝缘层中形成线圈腔。隔离层/籽晶层沿绝缘层中的线圈袋的壁被沉积。在线圈袋中形成铜，并在绝缘层上形成铜。铜平坦化到绝缘层。自对准线圈工艺将更多的铜包装到相同的线圈袋中，并松弛线圈对准公差。由于在写入期间线圈的间隔更加有效和均匀以减少头部的积聚，所以防止了突起。

74. 发明申请

US20050047013A1 Methods of forming an electrical connection in a magnetic head using a damascene process 失效
标题翻译：使用镶嵌工艺在磁头中形成电连接的方法
公开(公告)号：US20050047013A1
公开(公告)日：2005-03-03
申请号：US10651532
申请日：2003-08-29
申请人： Quang Le , Jeffrey Lille
发明人： Quang Le , Jeffrey Lille
IPC分类号： G11B5/127 , G11B5/147
CPC分类号： G11B5/127 , Y10T29/49021 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T29/49071
摘要： In one illustrative example disclosed, a method for use in making a magnetic head involves forming a thermal-assist heater for the magnetic head; forming a plurality of coil layers of a write coil using a damascene process; and simultaneously forming an electrical connection to the thermal-assist heater in the same damascene process used to form the write coil. Advantageously, fabrication steps are reduced using a parallel process that provides for relatively small dimensions and reduces the possibility of electrical shorting. The method may be alternatively used to form an electrical connection to any other suitable electrical device for the magnetic head, such as an electrical lapping guide (ELG) or other component.
摘要翻译：在所公开的一个说明性示例中，用于制造磁头的方法包括形成用于磁头的热辅助加热器; 使用镶嵌工艺形成写入线圈的多个线圈层; 并且在用于形成写入线圈的相同的镶嵌工艺中同时形成与热辅助加热器的电连接。有利的是，使用提供相对小的尺寸并减少电短路的可能性的并行工艺来减少制造步骤。该方法可以替代地用于形成用于磁头的任何其它合适的电气装置的电连接，例如电研磨引导件（ELG）或其它部件。

75. 发明授权

US08907666B2 Magnetic bias structure for magnetoresistive sensor having a scissor structure 有权
标题翻译：具有剪刀结构的磁阻传感器的磁偏置结构
公开(公告)号：US08907666B2
公开(公告)日：2014-12-09
申请号：US13251100
申请日：2011-09-30
申请人： Quang Le , Simon H. Liao , Shuxia Wang , Guangli Liu , Yongchul Ahn
发明人： Quang Le , Simon H. Liao , Shuxia Wang , Guangli Liu , Yongchul Ahn
IPC分类号： G01R33/02 , G01R33/00 , G01R33/09
CPC分类号： G01R33/0011 , G01R33/0017 , G01R33/093
摘要： A scissor style magnetic sensor having a novel hard bias structure for improved magnetic biasing robustness. The sensor includes a sensor stack that includes first and second magnetic layers separated by a non-magnetic layer such as an electrically insulating barrier layer or an electrically conductive spacer layer. The first and second magnetic layers have magnetizations that are antiparallel coupled, but that are canted in a direction that is neither parallel with nor perpendicular to the air bearing surface by a magnetic bias structure. The magnetic bias structure includes a neck portion extending from the back edge of the sensor stack and having first and second sides that are aligned with first and second sides of the sensor stack. The bias structure also includes a tapered or wedged portion extending backward from the neck portion.
摘要翻译：具有改进的磁偏置鲁棒性的新型硬偏置结构的剪刀式磁传感器。该传感器包括传感器堆叠，该传感器堆叠包括由诸如电绝缘阻挡层或导电隔离层之类的非磁性层分开的第一和第二磁性层。第一和第二磁性层具有反平行耦合的磁化，但是通过磁偏置结构在不与空气轴承表面平行或垂直的方向上倾斜。磁偏置结构包括从传感器堆叠的后边缘延伸的颈部，并且具有与传感器堆叠的第一和第二侧对准的第一和第二侧。偏置结构还包括从颈部部分向后延伸的锥形或楔形部分。

76. 发明申请

US20130082696A1 MAGNETIC BIAS STRUCTURE FOR MAGNETORESISTIVE SENSOR HAVING A SCISSOR STRUCTURE 有权
标题翻译：具有扫描结构的磁传感器的磁偏置结构
公开(公告)号：US20130082696A1
公开(公告)日：2013-04-04
申请号：US13251100
申请日：2011-09-30
申请人： Quang Le , Simon H. Liao , Shuxia Wang , Guangli Liu , Yongchul Ahn
发明人： Quang Le , Simon H. Liao , Shuxia Wang , Guangli Liu , Yongchul Ahn
IPC分类号： G01R33/02 , C23F1/04
CPC分类号： G01R33/0011 , G01R33/0017 , G01R33/093
摘要： A scissor style magnetic sensor having a novel hard bias structure for improved magnetic biasing robustness. The sensor includes a sensor stack that includes first and second magnetic layers separated by a non-magnetic layer such as an electrically insulating barrier layer or an electrically conductive spacer layer. The first and second magnetic layers have magnetizations that are antiparallel coupled, but that are canted in a direction that is neither parallel with nor perpendicular to the air bearing surface by a magnetic bias stricture. The magnetic bias structure includes a neck portion extending from the back edge of the sensor stack and having first and second sides that are aligned with first and second sides of the sensor stack. The bias structure also includes a tapered or wedged portion extending backward from the neck portion.
摘要翻译：具有改进的磁偏置鲁棒性的新型硬偏置结构的剪刀式磁传感器。该传感器包括传感器堆叠，该传感器堆叠包括由诸如电绝缘阻挡层或导电隔离层之类的非磁性层分开的第一和第二磁性层。第一和第二磁性层具有反平行耦合的磁化，但是通过磁偏置狭窄不能平行于或垂直于空气轴承表面的方向倾斜。磁偏置结构包括从传感器堆叠的后边缘延伸的颈部，并且具有与传感器堆叠的第一和第二侧对准的第一和第二侧。偏置结构还包括从颈部部分向后延伸的锥形或楔形部分。

77. 发明授权

US08137570B2 Additive write pole process for wrap around shield 有权
标题翻译：围绕屏蔽的附加写极过程
公开(公告)号：US08137570B2
公开(公告)日：2012-03-20
申请号：US12100284
申请日：2008-04-09
申请人： Quang Le
发明人： Quang Le
IPC分类号： G11B5/127 , B44C1/22
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic write head having a wrap around magnetic trailing shield and a very narrow track width. A magnetic write pole is formed by forming a mask over a magnetic write pole material and performing a first ion milling to define the write pole. The mask includes a hard mask layer such as diamond like carbon (DLC) and further mask layers formed over the hard mask layer. In order to facilitate manufacture at very narrow track widths processes are employed to remove re-deposited material and the remaining portions of the mask structure (except the hard mask). Further processing can then be employed without the risk of a very narrow mask structure and redep bending or breaking during later manufacturing steps.
摘要翻译：一种用于制造磁性写头的方法，所述磁性写头具有围绕磁性后挡板的环绕和非常窄的轨道宽度。通过在磁性写入磁极材料上形成掩模并且执行第一离子铣削以限定写入极来形成磁性写入磁极。掩模包括诸如类金刚石碳（DLC）的硬掩模层和形成在硬掩模层上的另外的掩模层。为了便于在非常窄的轨道宽度下的制造，采用工艺来去除重新沉积的材料和掩模结构的剩余部分（硬掩模除外）。然后可以采用进一步的处理，而不会在随后的制造步骤期间具有非常窄的掩模结构和重新弯曲弯曲或断裂的风险。

78. 发明授权

US08048281B2 Method for producing tight pitched coil with reduced processing steps 有权
标题翻译：减少加工步骤生产紧密螺旋线圈的方法
公开(公告)号：US08048281B2
公开(公告)日：2011-11-01
申请号：US12286993
申请日：2008-10-02
申请人： Christian Rene Bonhote , Quang Le , Ihavin Sinha
发明人： Christian Rene Bonhote , Quang Le , Ihavin Sinha
IPC分类号： C25D5/02 , G11B5/17
CPC分类号： H01F41/34 , G11B5/17 , G11B5/3123 , G11B5/3163
摘要： Methods for fabricating thin film magnetic head coil structures are disclosed. The methods disclose deposition of a first thick seed layer, followed by deposition of an ultra-thin second seed layer. Coil structures having sub-micron pitch and high aspect ratios are deposited on the second ultra-thin seed layer, which is removed from between the coil windings via an isotropic etch process such as wet etching or RIE. Subsequent to selective removal of the ultra-thin second seed layer, the first thick seed layer is utilized to deposit pole and backgap structures, eliminating the need to deposit (and remove) a subsequent seed layer on the coil structure.
摘要翻译：公开了制造薄膜磁头线圈结构的方法。该方法公开了第一厚种子层的沉积，然后沉积超薄的第二种子层。具有亚微米间距和高纵横比的线圈结构沉积在第二超薄种子层上，其通过各向同性蚀刻工艺（例如湿蚀刻或RIE）从线圈绕组之间移除。在选择性去除超薄第二种子层之后，利用第一厚种子层来沉积极和后隙结构，消除了在线圈结构上沉积（和去除）随后种子层的需要。

79. 发明授权

US08021535B2 Methods for plating write pole shield structures with ultra-thin metal gap seed layers 有权
标题翻译：用超薄金属间隙种子层写电极屏蔽结构的方法
公开(公告)号：US08021535B2
公开(公告)日：2011-09-20
申请号：US12005556
申请日：2007-12-26
申请人： Christian Rene Bonhote , Quang Le , Xhavin Sinha
发明人： Christian Rene Bonhote , Quang Le , Xhavin Sinha
IPC分类号： C25D5/02
CPC分类号： C25D7/123 , C25D5/022
摘要： Methods and structures for electroplating shield structures for perpendicular thin film write poles having ultra thin non-magnetic top gaps on the order of a few nanometers are disclosed. Ultra thin, conductive seed layers serve a dual purpose as both plating seed layer and non-magnetic top gap for the write pole. Due to reduced current carrying capacity of ultra thin seed layers, an additional thick seed layer is also employed to aid delivering plating current to regions near the pole.
摘要翻译：公开了具有几纳米数量级的超薄非磁性顶部间隙的垂直薄膜写入极的电镀屏蔽结构的方法和结构。超薄导电种子层具有双重目的，作为电极种子层和写入极的非磁性顶部间隙。由于超薄种子层的电流承载能力降低，还使用另外的厚种子层来帮助将电镀电流传递到极附近的区域。

80. 发明授权

US08011084B2 Method for fabricating narrow magnetic read width TMR/CPP sensors 有权
标题翻译：制造窄磁读宽TMR / CPP传感器的方法
公开(公告)号：US08011084B2
公开(公告)日：2011-09-06
申请号：US12184054
申请日：2008-07-31
申请人： Quang Le , Jui-Lung Li
发明人： Quang Le , Jui-Lung Li
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3909 , B82Y10/00 , B82Y25/00 , G01R33/093 , G01R33/098 , G11B5/3163 , G11B5/3932 , G11B2005/3996 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a manufacturing a magnetoresistive sensor that allows the sensor to be constructed with a very narrow and well controlled track width. The method includes depositing a layer of diamond like carbon over a series of sensor layers. A first mask is then formed to define a sensor, and an ion milling is performed to remove sensor material not protected by the first mask. Then, a second mask is formed, and a hard bias layer is deposited to the thickness of the sensor layers. The second mask is then lifted off and a CMP is performed to remove the first mask structure. Because all areas other than the area directly over the sensor are substantially planar a quick, gentle CMP can be used to remove the first mask layer even if the first mask is small, such as for definition of a very narrow track-width sensor.
摘要翻译：一种用于制造磁阻传感器的方法，该传感器允许传感器被构造成具有非常窄且良好控制的轨道宽度。该方法包括在一系列传感器层上沉积一层类似金刚石的碳。然后形成第一掩模以限定传感器，并且执行离子铣削以去除未被第一掩模保护的传感器材料。然后，形成第二掩模，并且在传感器层的厚度上沉积硬偏置层。然后将第二掩模剥离并执行CMP以除去第一掩模结构。由于除传感器正上方的区域以外的所有区域基本上是平面的（由于第二掩模的移除和硬偏置材料的低水平），可以使用快速，温和的CMP来去除第一掩模层，即使第一个掩模很小，如定义非常窄的轨道宽度传感器。

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