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    • 71. 发明授权
    • Thin film device transfer method, thin film device, thin film integrated circuit device, active matrix board, liquid crystal display, and electronic apparatus
    • 薄膜器件转移方法,薄膜器件,薄膜集成电路器件,有源矩阵板,液晶显示器和电子设备
    • US06521511B1
    • 2003-02-18
    • US09242923
    • 1999-02-26
    • Satoshi InoueTatsuya ShimodaWakao Miyazawa
    • Satoshi InoueTatsuya ShimodaWakao Miyazawa
    • H01L2130
    • H01L27/1266B23K26/40B23K26/57B23K2103/172G02F1/13454G02F1/1362H01L21/2007H01L21/76264H01L21/76275H01L21/76283H01L21/76289H01L27/1214H01L29/78603H01L2221/68359H01L2221/68368
    • A thin film device fabrication method in which a thin film device formed on a substrate are transferred to a primary destination-of-transfer part and then the thin film device is transferred to a secondary destination-of-transfer part. A first separation layer (120) made of such a material as amorphous silicon is provided on a substrate (100) which allows passage of laser. A thin film device (140) such as TFTs are formed on the substrate (100). Further, a second separation layer (160) such as a hot-melt adhesive layer is formed on the thin film devices (140), and a primary destination-of-transfer part (180) is mounted thereon. The bonding strength of the first separation layer is weakened by irradiation with light, and the substrate (100) is removed. Thus, the thin film device (140) is transferred to the primary destination-of-transfer part. Then, a secondary destination-of-transfer part (200) is attached onto the bottom of an exposed part of the thin film device (140) via an adhesive layer (190). Thereafter, the bonding strength of the second separation layer is weakened by such means as thermal fusion, and the primary destination-of-transfer part is removed. In this manner, the thin film device (140) can be transferred to the secondary destination-of-transfer part (200) while maintaining layering relationship with respect to the substrate (100).
    • 一种薄膜器件制造方法,其中形成在衬底上的薄膜器件被转移到第一转移部件,然后将薄膜器件转移到次级转移部件。 由诸如非晶硅的材料制成的第一分离层(120)设置在允许激光通过的基板(100)上。 在基板(100)上形成诸如TFT的薄膜器件(140)。 此外,在薄膜器件(140)上形成诸如热熔粘合剂层的第二分离层(160),并且其上安装有主要转移部件(180)。 通过照射光使第一分离层的结合强度减弱,并除去基板(100)。 因此,薄膜器件(140)被传送到主要转移部件。 然后,经由粘合剂层(190)将次要转移部件(200)附着到薄膜器件(140)的暴露部分的底部。 此后,第二分离层的结合强度通过热熔融的方式被削弱,并且去除了主要转移部分。 以这种方式,薄膜器件(140)可以在保持与衬底(100)的分层关系的同时被转移到次级转移部件(200)。
    • 74. 发明授权
    • Piezoelectric transducer and electrophoretic ink display apparatus using piezoelectric transducer
    • 使用压电换能器的压电换能器和电泳油墨显示装置
    • US06373461B1
    • 2002-04-16
    • US09494051
    • 2000-01-28
    • Kazumasa HasegawaTatsuya Shimoda
    • Kazumasa HasegawaTatsuya Shimoda
    • G09G334
    • H01L27/20B06B1/0688G02F1/167G09G3/344G09G3/3493G09G2300/08H01L41/107Y10T428/24322Y10T428/24331
    • A first electrode layer 12, a first piezoelectric film layer 13, a second electrode layer 14, a second piezoelectric film layer 15, and a third electrode layer 16 are layered in that order on a substrate 11; these are constrained so as not to expand or contract in a thickness direction and a piezoelectric transducer is constructed thereby. A plurality of gate lines 201 and 202, a plurality of data lines 203 and 204 intersecting with the gate lines, and thin film transistors 205 and 207, disposed at the intersections of the abovementioned gate lines and data lines, are established; one source-drain of the abovementioned thin film transistors is connected to the abovementioned data lines; another source-drain of the abovementioned thin film transistors is connected to the input sides of the abovementioned thin film piezoelectric transducers 208 through 210; the output sides of the abovementioned thin film piezoelectric transducers are connected to the electrodes of electrophoretic ink display elements; and an electrophoretic ink display apparatus is constructed thereby.
    • 第一电极层12,第一压电膜层13,第二电极层14,第二压电膜层15和第三电极层16依次层叠在基板11上; 这些被限制为不在厚度方向上膨胀或收缩,并且由此构造压电换能器。 建立了多条栅极线201和202,与栅极线交叉的多条数据线203和204以及设置在上述栅极线和数据线的交点处的薄膜晶体管205和207; 上述薄膜晶体管的一个源极 - 漏极连接到上述数据线; 上述薄膜晶体管的另一源极 - 漏极连接到上述薄膜压电换能器208至210的输入侧; 上述薄膜压电换能器的输出侧连接到电泳油墨显示元件的电极; 并由此构成电泳油墨显示装置。