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    • 78. 发明授权
    • Thin film transistor including titanium oxides as active layer and method of manufacturing the same
    • 包括钛氧化物作为活性层的薄膜晶体管及其制造方法
    • US07768042B2
    • 2010-08-03
    • US12058399
    • 2008-03-28
    • Jae-Woo ParkSeunghyup Yoo
    • Jae-Woo ParkSeunghyup Yoo
    • H01L29/80
    • H01L29/7869
    • Disclosed herein is a method of manufacturing a thin film transistor including titanium oxides as an active layer and the structure of the thin film transistor film manufactured using the method. The thin film transistor includes: a substrate; an active layer formed on the substrate using polycrystalline or amorphous titanium oxides; and an insulating layer formed on the active layer. Further, the method of manufacturing the thin film transistor includes: forming a substrate; forming an active layer on the substrate using polycrystalline or amorphous titanium oxides; and forming an insulating layer on the active layer. The present invention is advantageous in that the performance of the thin film transistor can be improved, the thin film transistor can be manufactured at low cost, harmful environmental problems can be solved, and the thin film transistor can be widely applied to various electronic apparatuses including, but not limited to, integrated drivers in active-matrix displays and transparent electronic devices.
    • 本发明公开了一种制造薄膜晶体管的方法,该薄膜晶体管包括钛氧化物作为有源层,以及使用该方法制造的薄膜晶体管膜的结构。 薄膜晶体管包括:基板; 使用多晶或无定形钛氧化物在所述衬底上形成的有源层; 以及形成在有源层上的绝缘层。 此外,制造薄膜晶体管的方法包括:形成衬底; 使用多晶或无定形钛氧化物在衬底上形成有源层; 以及在所述有源层上形成绝缘层。 本发明的优点在于,可以提高薄膜晶体管的性能,可以以低成本制造薄膜晶体管,可以解决有害的环境问题,并且薄膜晶体管可以广泛地应用于各种电子设备,包括 但不限于有源矩阵显示器和透明电子设备中的集成驱动器。
    • 79. 发明申请
    • A HALF TONE MASK HAVING MULTI-HALF PERMEATION PART AND A METHOD OF MANUFACTURING THE SAME
    • 具有多个半透明部分的半高音调面具及其制造方法
    • US20100159367A1
    • 2010-06-24
    • US12296563
    • 2007-05-11
    • Kap-Seok KANGJae-Woo PARKSang-Uk PARKYu-Kyung SIMKeun-Sik LEE
    • Kap-Seok KANGJae-Woo PARKSang-Uk PARKYu-Kyung SIMKeun-Sik LEE
    • G03F1/00
    • G03F1/50
    • Disclosed are a half tone mask having a multi semi-transmission part and a manufacturing method thereof that can pattern a plurality of layers using one mask, by having at least two or more semi-transmission parts with light transmission that are different from each other. The half tone mask having a multi semi-transmission part comprises a transparent substrate, a light transmission part formed the transparent substrate to transmit irradiation light of a predetermined wavelength band, a light shielding part formed the transparent substrate to shield the irradiation light of the predetermined wavelength band, and at least two or more semi-transmission parts formed by depositing semi-transmission material on the transparent substrate to pass through the irradiation light of the predetermined wavelength band with each different light transmission.
    • 公开了具有多重半透射部分的半色调掩模及其制造方法,其可以通过具有彼此不同的至少两个或更多个具有光透射的半透射部分,使用一个掩模来图案化多个层。 具有多重半透射部分的半色调掩模包括透明基板,形成透明基板以透射预定波长带的照射光的透光部分,形成透明基板的遮光部分,以屏蔽预定波长带的照射光 以及通过在透明基板上沉积半透射材料而形成的至少两个或更多个半透射部分,以通过每种不同光透射的预定波长带的照射光。