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61. 发明授权

US08735298B2 Method for spatial and temporal control of temperature on a substrate 有权
标题翻译：空间和时间控制衬底温度的方法
公开(公告)号：US08735298B2
公开(公告)日：2014-05-27
申请号：US13657031
申请日：2012-10-22
申请人： Lam Research Corporation
发明人： Anthony J. Ricci , Keith Comendant , James Tappan
IPC分类号： H01L21/3065
CPC分类号： H01L21/6833 , H01J37/32724 , H01J2237/20 , H01L21/67103 , H01L21/6831 , H01L2221/683 , H05B3/26 , Y10T29/49146 , Y10T29/53252 , Y10T279/23
摘要： An apparatus for control of a temperature of a substrate has a temperature-controlled base, a heater, a metal plate, a layer of dielectric material. The heater is thermally coupled to an underside of the metal plate while being electrically insulated from the metal plate. A first layer of adhesive material bonds the metal plate and the heater to the top surface of the temperature controlled base. This adhesive layer is mechanically flexible, and possesses physical properties designed to balance the thermal energy of the heaters and an external process to provide a desired temperature pattern on the surface of the apparatus. A second layer of adhesive material bonds the layer of dielectric material to a top surface of the metal plate. This second adhesive layer possesses physical properties designed to transfer the desired temperature pattern to the surface of the apparatus. The layer of dielectric material forms an electrostatic clamping mechanism and supports the substrate.
摘要翻译：用于控制基板的温度的装置具有温度控制的基座，加热器，金属板，电介质材料层。加热器在与金属板电绝缘的同时热耦合到金属板的下侧。第一层粘合剂材料将金属板和加热器粘合到温度受控底座的顶部表面。该粘合剂层具有机械柔性，并具有设计用于平衡加热器的热能和外部工艺的物理性能，以在设备的表面上提供期望的温度图案。第二层粘合剂材料将介电材料层粘合到金属板的顶表面上。该第二粘合剂层具有设计成将期望的温度图案转移到设备的表面的物理性质。介电材料层形成静电夹持机构并支撑基板。

62. 发明授权

US08698046B2 Heater and image heating apparatus including same 有权
标题翻译：加热器和包括其的图像加热装置
公开(公告)号：US08698046B2
公开(公告)日：2014-04-15
申请号：US13501402
申请日：2010-12-20
申请人： Yasuhiro Shimura , Koji Nihonyanagi
发明人： Yasuhiro Shimura , Koji Nihonyanagi
IPC分类号： G03G15/20 , H05B3/03 , H05B3/16
CPC分类号： G03G15/2053 , G03G15/2042 , G03G2215/2035 , H05B3/0095 , H05B3/26
摘要： The image heating apparatus includes a heater that achieves even heat-generation distribution and suppression of a non-sheet feeding portion temperature increase when an image is printed on a sheet whose size is smaller than a maximum size for the apparatus, and an endless belt, wherein plural heat-generation resistive members having positive temperature coefficients are connected in parallel are provided between first and second conductive members provided along a longitudinal direction of a substrate; plural heat-generation blocks including the plural heat-generation resistive members connected in parallel, are arranged in series along the longitudinal direction; and in the plural heat-generation resistive members included in one of the heat-generation blocks, a heat-generation resistive member arranged at an end portion in the longitudinal direction has a resistivity value higher than that of a heat generation resistive member arranged at a center in the longitudinal direction, or an interval between heat generation resistive members is larger in the end portion.
摘要翻译：图像加热装置包括加热器，其在图像被打印在尺寸小于装置的最大尺寸的片材上时，实现均匀的发热分布和抑制非片材进给部温度升高，以及环形带，其中具有正温度系数的多个发热电阻构件并联连接，设置在沿着基板的纵向方向设置的第一和第二导电构件之间; 包括并联连接的多个发热电阻部件的多个发热块沿着长度方向串联设置; 并且在包括在一个发热块中的多个发热电阻构件中，布置在纵向方向上的端部处的发热电阻构件的电阻率值高于布置在发热块的发热电阻构件的电阻率值在长度方向中心，或发热电阻部件之间的间隔在端部较大。

63. 发明授权

US08692168B2 Infrared heating panels, systems and methods 有权
标题翻译：红外加热板，系统和方法
公开(公告)号：US08692168B2
公开(公告)日：2014-04-08
申请号：US12966221
申请日：2010-12-13
申请人： Steven J. Benda , Tracy Felder
发明人： Steven J. Benda , Tracy Felder
IPC分类号： F24D13/02 , F24D19/00 , H05B3/03 , H05B3/06 , H05B3/26 , F28F9/26
CPC分类号： F24D13/022 , A61H33/063 , A61N2005/0659 , F24D19/1084 , H05B3/26 , H05B3/565 , H05B2203/032 , Y02B30/26
摘要： Infrared heating panels are provided with an electrically insulative substrate that carries one or more infrared heating elements. Each heating element includes an elongated first segment attached to a first surface of the substrate and an elongated second segment electrically connected in series with the first segment. At least the first segment is a strip of an electrically resistive material adapted to emit infrared radiation in response to a current. The second segment is attached to the second surface of the substrate opposite from and in a parallel arrangement with the first segment such that a first current flowing through the heating element flows through the first segment in a first direction relative to the substrate and flows through the second segment in a second direction opposite the first direction. Saunas, heating systems, and methods for reducing electromagnetic emissions in an infrared sauna are also provided.
摘要翻译：红外线加热板设置有承载一个或多个红外线加热元件的电绝缘基板。每个加热元件包括附接到基板的第一表面的细长的第一段和与第一段串联电连接的细长的第二段。至少第一段是适于响应于电流发射红外辐射的电阻材料条。第二段附接到基板的与第一段相反并且与第一段平行布置的第二表面，使得流过加热元件的第一电流相对于衬底在第一方向上流过第一段，并流过第二段在与第一方向相反的第二方向上。还提供了桑拿浴，加热系统以及用于减少红外桑拿浴室中的电磁辐射的方法。

64. 发明申请

US20140070054A1 ANTI-ICING, DE-ICING, AND HEATING CONFIGURATION, INTEGRATION, AND POWER METHODS FOR AIRCRAFT, AERODYNAMIC, AND COMPLEX SURFACES 审中-公开
标题翻译：飞机，航空和复杂表面的反制，去死和加热配置，集成和功率方法
公开(公告)号：US20140070054A1
公开(公告)日：2014-03-13
申请号：US13977016
申请日：2012-01-03
申请人： Brett R. Burton , Ioan I. Feier , Timothy J. Lastrapes
发明人： Brett R. Burton , Ioan I. Feier , Timothy J. Lastrapes
IPC分类号： B64D15/12
CPC分类号： B64D15/12 , H05B1/0236 , H05B3/26 , H05B6/10 , H05B2203/007 , H05B2203/013 , H05B2214/02 , H05B2214/04
摘要： Anti-icing methods and aerodynamic structures having laminated resistive heaters for de-icing are described. Several of the inventive aspects utilize laminated resistive heaters comprising a carbon nanotube layer and/or capacitors to store and supply electricity. The invention also includes methods of making aerodynamic structures having de-icing or anti-icing functionality.
摘要翻译：描述了具有用于除冰的层压电阻加热器的防冰方法和空气动力学结构。本发明的几个方面使用包括碳纳米管层和/或电容器的层叠电阻加热器来存储和供电。本发明还包括制备具有除冰或防冰功能的空气动力学结构的方法。

65. 发明申请

US20140047705A1 HEATING PLATE WITH PLANAR HEATER ZONES FOR SEMICONDUCTOR PROCESSING 审中-公开
标题翻译：加热板用于半导体加工的平面加热区
公开(公告)号：US20140047705A1
公开(公告)日：2014-02-20
申请号：US14062216
申请日：2013-10-24
申请人： Lam Research Corporation
发明人： Harmeet Singh , Keith Gaff , Neil Benjamin , Keith Comendant
IPC分类号： H05B3/00
CPC分类号： H01L21/67103 , C23C14/50 , C23C14/541 , C23C16/4586 , C23C16/46 , C23C16/509 , H01J37/32091 , H01J37/32724 , H01J2237/327 , H01J2237/332 , H01J2237/3321 , H01J2237/3323 , H01J2237/334 , H01J2237/3342 , H01J2237/3343 , H01L21/02274 , H01L21/0262 , H01L21/28556 , H01L21/3065 , H01L21/31116 , H01L21/31138 , H01L21/32136 , H01L21/67109 , H01L21/67248 , H01L21/6831 , H05B1/0233 , H05B3/00 , H05B3/26 , Y10T29/49083 , Y10T29/49099
摘要： An exemplary method for manufacturing a heating plate for a substrate support assembly includes forming holes in at least one sheet, printing a slurry of conductor powder, or pressing a precut metal foil, or spraying a slurry of conductor powder, on the at least one sheet to form the planar heater zones, the power supply lines, and power return lines. The holes in the at least one sheet are filled with a slurry of conductor powder to form power supply and power return vias. The sheets are then aligned, pressed, and bonded to form the heating plate.
摘要翻译：用于制造用于基板支撑组件的加热板的示例性方法包括在至少一个片材中形成孔，在导体粉末的浆料上印刷，或者将预切割金属箔压制，或者将导体粉末的浆料喷涂在至少一个片材上以形成平面加热器区域，电源线和电力返回线。至少一个片材中的孔填充有导体粉末的浆料，以形成电源和电源返回通孔。然后将片材对准，压制和结合以形成加热板。

66. 发明申请

US20140034633A1 CARBON NANOTUBE THIN FILM LAMINATE RESISTIVE HEATER 审中-公开
标题翻译：碳纳米薄膜薄膜电阻加热器
公开(公告)号：US20140034633A1
公开(公告)日：2014-02-06
申请号：US13988037
申请日：2011-11-17
申请人： Amy M. Heintz , Katherine P. Mitchell , Brett R. Burton , Ioan I. Feier , Timothy J. Lastrapes , Beth Muszynski
发明人： Amy M. Heintz , Katherine P. Mitchell , Brett R. Burton , Ioan I. Feier , Timothy J. Lastrapes , Beth Muszynski
IPC分类号： H05B3/14 , H01C17/06 , H05B3/26
CPC分类号： H01C17/065 , H01C17/06 , H01C17/281 , H05B3/145 , H05B3/26 , H05B3/267 , H05B3/565 , H05B2203/013 , H05B2203/017 , H05B2214/04 , Y10T29/49083 , Y10T29/49099
摘要： Laminated resistive heaters comprising a carbon nanotube layer are described. The invention also includes methods of making laminated resistive heaters and applications using the resistive heaters.
摘要翻译：描述了包括碳纳米管层的层压电阻加热器。本发明还包括使用电阻加热器制造层压电阻加热器和应用的方法。

67. 发明申请

US20140027435A1 HEATING APPARATUS FOR HEATING ELECTRONIC COMPONENTS ON A PRINTED CIRCUIT BOARD IN LOW TEMPERATURE ENVIRONMENT 有权
标题翻译：在低温环境下加热印刷电路板上的电子元件加热装置
公开(公告)号：US20140027435A1
公开(公告)日：2014-01-30
申请号：US13556265
申请日：2012-07-24
申请人： Chih-Sheng CHOU
发明人： Chih-Sheng CHOU
IPC分类号： H01L23/34 , H05B3/22 , H05B1/02
CPC分类号： H05K1/0212 , H01L23/345 , H01L2924/0002 , H05B1/02 , H05B3/22 , H05B3/26 , H01L2924/00
摘要： A heating apparatus for heating electronic components on a printed circuit board in low temperature environment includes a printed circuit board, a heating unit, a switch unit, a temperature-sensing unit, an electric power unit, and a control unit. The heating unit, the switch unit, the temperature-sensing unit, and the control unit are fixed connected to the printed circuit board and are electrically connected with the metal lines on the printed circuit board. The heat source is sent to the heat-conducting layer on the printed circuit board through the heat-conducting terminal after the switch unit is conducted by the control unit and the power is sent from the electric power unit to the heating unit. Then, the electronic components are heated with the heat source through the heat-conducting layer, so that the electronic components are in the working temperatures for starting up.
摘要翻译：一种用于在低温环境下加热印刷电路板上的电子部件的加热装置包括印刷电路板，加热单元，开关单元，温度感测单元，电力单元和控制单元。加热单元，开关单元，温度检测单元和控制单元固定连接到印刷电路板，并与印刷电路板上的金属线电连接。在通过控制单元传导开关单元并且电力从电力单元发送到加热单元之后，热源通过导热端子被传送到印刷电路板上的导热层。然后，电子部件通过导热层与热源一起被加热，使得电子部件处于启动的工作温度。

68. 发明申请

US20140011153A1 PEDESTAL CONSTRUCTION WITH LOW COEFFICIENT OF THERMAL EXPANSION TOP 有权
标题翻译：具有低膨胀系数的PEDESTAL结构
公开(公告)号：US20140011153A1
公开(公告)日：2014-01-09
申请号：US13836373
申请日：2013-03-15
申请人： Watlow Electric Manufacturing Company
发明人： Jacob R. Lindley
IPC分类号： H01L21/683
CPC分类号： H01L21/683 , C23C16/4581 , C23C16/4586 , H01L21/67103 , H01L21/6831 , H01L21/68742 , H01L21/68785 , H01L21/68792 , H05B3/143 , H05B3/26 , H05B3/265 , H05B2203/002 , H05B2203/013 , H05B2203/017 , Y10T29/49002 , Y10T29/53178
摘要： A support assembly for use in semiconductor processing includes an application substrate, a heater layer disposed directly onto the application substrate, an insulation layer disposed onto the heater layer, and a second substrate disposed onto the insulation layer. The heater layer is directly disposed onto the application substrate by a layered process such that the heater layer is in direct contact with the application substrate. The application substrate defines a material having a relatively low coefficient of thermal expansion that is matched to a coefficient of thermal expansion of the heater layer.
摘要翻译：用于半导体处理的支撑组件包括施加衬底，直接设置在应用衬底上的加热器层，设置在加热器层上的绝缘层和设置在绝缘层上的第二衬底。加热器层通过分层工艺直接设置在施加衬底上，使得加热器层与施加衬底直接接触。应用衬底限定了具有与加热器层的热膨胀系数匹配的相对低的热膨胀系数的材料。

69. 发明申请

US20130344370A1 HEATER MODULE 有权
标题翻译：加热器模块
公开(公告)号：US20130344370A1
公开(公告)日：2013-12-26
申请号：US14003952
申请日：2012-03-07
申请人： Yukiko Kinoshita , Naoto Todoroki
发明人： Yukiko Kinoshita , Naoto Todoroki
IPC分类号： H01M10/50 , H05B3/06
CPC分类号： H01M10/615 , H01M10/625 , H01M10/647 , H01M10/6562 , H01M10/6571 , H05B3/06 , H05B3/26
摘要： A heater module (22L, 22R) of the present invention is provided along a heated surface (13CLa) of an object to be heated (13CL, 13CR). The heater module includes: a plate-like heater body (34) that faces the heated surface of the object to be heated; an L-shaped member (31) including a module main surface (31m) to which the plate-like heater body is provided, and a bent arm portion (31c) bent with respect to the module main surface; and a power source connection terminal (35) provided in the bent arm portion and connected to the plate-like heater body.
摘要翻译：沿着待加热物体（13CL，13CR）的加热表面（13CLa）设置本发明的加热器模块（22L，22R）。加热器模块包括：面对被加热物体的被加热表面的板状加热器主体（34）; 包括设置有板状加热器主体的模块主表面（31m）和相对于模块主表面弯曲的弯曲臂部分（31c）的L形构件（31）以及设置在弯曲臂部中并连接到板状加热体的电源连接端子（35）。

70. 发明申请

US20130343791A1 HEATER AND IMAGE HEATING DEVICE INCLUDING THE SAME 有权
标题翻译：加热器和图像加热装置，包括它们
公开(公告)号：US20130343791A1
公开(公告)日：2013-12-26
申请号：US14004106
申请日：2012-03-05
申请人： Yasuhiro Shimura
发明人： Yasuhiro Shimura
IPC分类号： G03G15/20
CPC分类号： G03G15/2053 , G03G15/2042 , H05B1/0241 , H05B3/03 , H05B3/06 , H05B3/26 , H05B2203/007 , H05B2203/011 , H05B2203/016
摘要： In order to suppress excessive temperature rise at a non-sheet-passing region while suppressing the deterioration of fixability in case of heating small size sheets, a heater includes a first heat-generation line and a second heat-generation line, which are independently controllable, wherein the first heat-generation line is configured so that a plurality of heat-generation resistors having positive resistance-temperature characteristics is electrically connected in parallel to each other between a first electro-conductive element and a second electro-conductive element, and the heat-generation resistors are adjusted so that a heat-generation amount per unit length of the first heat-generation line in a lengthwise direction of the heater decreases from a recording material conveyance reference towards a end portion in the lengthwise direction, and an image heating device having the heater.
摘要翻译：为了抑制非片材通过区域的过度升温，同时抑制加热小尺寸片材时的定影性的劣化，加热器包括可独立控制的第一发热管线和第二发热管线其特征在于，所述第一发热管线被配置为使得具有正电阻温度特性的多个发热电阻器在第一导电元件和第二导电元件之间彼此并联地电连接，并且调节发热电阻器，使得加热器的长度方向上的第一发热线的单位长度的发热量从记录材料输送基准向长度方向的端部减少，并且图像加热装置具有加热器。

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