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    • 63. 发明申请
    • Method of Preparing P-Type Doped ZnO or ZnMgO
    • 制备P型掺杂ZnO或ZnMgO的方法
    • US20090246948A1
    • 2009-10-01
    • US12409957
    • 2009-03-24
    • Celine Chevalier
    • Celine Chevalier
    • H01L21/425
    • H01L21/425H01L33/0087
    • Method of preparing p-type doped ZnO or p-type doped ZnMgO, in which the following successive steps are carried out: a) implantation of O+ oxygen ions in an n-type doped ZnO or an n-type doped ZnMgO; b) first annealing at a temperature less than or equal to 1200° C. under oxygen for a time greater than or equal to 5 minutes; c) implantation of at least one ion of an element chosen among the elements of group I or the elements of group V of the periodic table; d) second annealing. The p-type doped ZnO or ZnMgO obtained by this method may be used in an optoelectronic device such as a light emitting diode.
    • 制备p型掺杂ZnO或p型掺杂ZnMgO的方法,其中进行以下连续步骤:a)在n型掺杂的ZnO或n型掺杂ZnMgO中注入O +氧离子; b)在氧气下在低于或等于1200℃的温度下首先退火大于或等于5分钟的时间; c)植入选自元素周期表第I族元素或第Ⅴ族元素中元素的至少一种离子; d)第二退火。 通过该方法获得的p型掺杂的ZnO或ZnMgO可以用于诸如发光二极管的光电子器件中。
    • 64. 发明授权
    • Chalcogenide random access memory
    • 硫族元素随机存取存储器
    • US07326951B2
    • 2008-02-05
    • US11163062
    • 2005-10-04
    • Ming-Hsiang Hsueh
    • Ming-Hsiang Hsueh
    • H01L29/06
    • H01L45/165H01L21/425H01L29/04H01L45/06H01L45/1233H01L45/1246H01L45/1273
    • A chalcogenide random access memory (CRAM) is provided. The CRAM includes a substrate, a first dielectric layer, a bottom electrode, a top electrode, a second dielectric layer, a modified chalcogenide spacer and an un-modified chalcogenide thin film. The first dielectric layer is disposed on the substrate and the bottom electrode is located inside the first dielectric layer. The second dielectric layer is disposed on the first dielectric layer and it has at least one opening exposing the bottom electrode. The modified chalcogenide spacer is disposed on the sidewall of the opening exposing portion of the bottom electrode. The top electrode is disposed on the bottom electrode. The un-modified chalcogenide thin film is disposed between the modified chalcogenide spacer and the top electrode and also disposed between the bottom electrode and the top electrode. The modified chalcogenide spacer has a better etching resistivity than the un-modified chalcogenide thin film.
    • 提供硫属元素随机存取存储器(CRAM)。 CRAM包括基板,第一介电层,底部电极,顶部电极,第二电介质层,修饰的硫族化物间隔物和未改性的硫族化物薄膜。 第一电介质层设置在基板上,底电极位于第一电介质层的内部。 第二电介质层设置在第一电介质层上,并且具有暴露底部电极的至少一个开口。 修饰的硫族化物间隔物设置在底部电极的开口暴露部分的侧壁上。 顶部电极设置在底部电极上。 未改性的硫族化物薄膜设置在改性硫族化物间隔物和顶部电极之间,并且还设置在底部电极和顶部电极之间。 改性硫属元素间隔物具有比未改性的硫族化物薄膜更好的蚀刻电阻率。
    • 66. 发明申请
    • CHALCOGENIDE RANDOM ACCESS MEMORY AND METHOD OF FABRICATING THE SAME
    • CHALCOGENIDE RANDOM ACCESS MEMORY AND METHOD OF FABRISTING THE SAME
    • US20060131618A1
    • 2006-06-22
    • US11163062
    • 2005-10-04
    • Ming-Hsiang Hsueh
    • Ming-Hsiang Hsueh
    • H01L29/768
    • H01L45/165H01L21/425H01L29/04H01L45/06H01L45/1233H01L45/1246H01L45/1273
    • A chalcogenide random access memory (CRAM) is provided. The CRAM includes a substrate, a first dielectric layer, a bottom electrode, a top electrode, a second dielectric layer, a modified chalcogenide spacer and an un-modified chalcogenide thin film. The first dielectric layer is disposed on the substrate and the bottom electrode is located inside the first dielectric layer. The second dielectric layer is disposed on the first dielectric layer and it has at least one opening exposing the bottom electrode. The modified chalcogenide spacer is disposed on the sidewall of the opening exposing portion of the bottom electrode. The top electrode is disposed on the bottom electrode. The un-modified chalcogenide thin film is disposed between the modified chalcogenide spacer and the top electrode and also disposed between the bottom electrode and the top electrode. The modified chalcogenide spacer has a better etching resistivity than the un-modified chalcogenide thin film.
    • 提供硫属元素随机存取存储器(CRAM)。 CRAM包括基板,第一介电层,底部电极,顶部电极,第二电介质层,修饰的硫族化物间隔物和未改性的硫族化物薄膜。 第一电介质层设置在基板上,底电极位于第一电介质层的内部。 第二电介质层设置在第一电介质层上,并且具有暴露底部电极的至少一个开口。 修饰的硫族化物间隔物设置在底部电极的开口暴露部分的侧壁上。 顶部电极设置在底部电极上。 未改性的硫族化物薄膜设置在改性硫族化物间隔物和顶部电极之间,并且还设置在底部电极和顶部电极之间。 改性硫属元素间隔物具有比未改性的硫族化物薄膜更好的蚀刻电阻率。