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    • 63. 发明申请
    • Semiconductor Device with Composite Drift Region
    • 具有复合漂移区域的半导体器件
    • US20130234246A1
    • 2013-09-12
    • US13413440
    • 2012-03-06
    • Hongning YangJiang-Kai Zuo
    • Hongning YangJiang-Kai Zuo
    • H01L29/78H01L21/76
    • H01L21/76224H01L29/0653H01L29/0847H01L29/66659H01L29/7835
    • A device includes a semiconductor substrate, a channel region in the semiconductor substrate having a first conductivity type, and a composite drift region in the semiconductor substrate, having a second conductivity type. The composite drift region includes a first drift region and a second drift region spaced from the channel region by the first drift region. The device further includes a drain region in the semiconductor substrate, spaced from the channel region by the composite drain region, and having the second conductivity type. The first drift region has a dopant concentration profile with a first concentration level where adjacent the channel region and a second concentration level where adjacent the second drift region, the first concentration level being higher than the second concentration level. In some embodiments, the first and second drift regions are stacked vertically, with the first drift region being shallower than the second drift region.
    • 一种器件包括半导体衬底,具有第一导电类型的半导体衬底中的沟道区域和具有第二导电类型的半导体衬底中的复合漂移区域。 复合漂移区域包括第一漂移区域和第一漂移区域与沟道区域间隔开的第二漂移区域。 该器件还包括在半导体衬底中的漏极区域,通过复合漏极区域与沟道区域间隔开并具有第二导电类型。 第一漂移区域具有第一浓度水平的掺杂剂浓度分布,其中邻近通道区域的第一浓度水平和与第二漂移区域相邻的第二浓度水平,第一浓度水平高于第二浓度水平。 在一些实施例中,第一漂移区域和第二漂移区域垂直堆叠,其中第一漂移区域比第二漂移区域浅。
    • 64. 发明授权
    • Switch mode converter employing dual gate MOS transistor
    • 采用双栅极MOS晶体管的开关模式转换器
    • US08513734B2
    • 2013-08-20
    • US13069158
    • 2011-03-22
    • Hongning YangJiang-Kai Zuo
    • Hongning YangJiang-Kai Zuo
    • H01L29/76
    • H01L27/0705H01L29/1045H01L29/1083H01L29/402H01L29/41775H01L29/66659H01L29/7831H01L29/7835
    • A disclosed power transistor, suitable for use in a switch mode converter that is operable with a switching frequency exceeding, for example, 5 MHz or more, includes a gate dielectric layer overlying an upper surface of a semiconductor substrate and first and second gate electrodes overlying the gate dielectric layer. The first gate electrode is laterally positioned overlying a first region of the substrate. The first substrate region has a first type of doping, which may be either n-type or p-type. A second gate electrode of the power transistor overlies the gate dielectric and is laterally positioned over a second region of the substrate. The second substrate region has a second doping type that is different than the first type. The transistor further includes a drift region located within the substrate in close proximity to an upper surface of the substrate and laterally positioned between the first and second substrate regions.
    • 适用于可以以超过例如5MHz或更大的开关频率工作的开关模式转换器的公开的功率晶体管包括覆盖在半导体衬底的上表面上的栅极电介质层和覆盖的半导体衬底的第一和第二栅电极 栅介质层。 第一栅电极横向定位成覆盖在衬底的第一区域上。 第一衬底区域具有第一类型的掺杂,其可以是n型或p型。 功率晶体管的第二栅电极覆盖栅极电介质,并且横向地位于衬底的第二区域上方。 第二衬底区域具有与第一类型不同的第二掺杂类型。 晶体管还包括位于衬底内的漂移区域,该漂移区域紧邻衬底的上表面并横向地位于第一和第二衬底区域之间。
    • 69. 发明申请
    • HIGH BREAKDOWN VOLTAGE LDMOS DEVICE
    • 高电压LDMOS器件
    • US20160099341A1
    • 2016-04-07
    • US14968343
    • 2015-12-14
    • Hongning YangDaniel J. BlombergJiang-Kai Zuo
    • Hongning YangDaniel J. BlombergJiang-Kai Zuo
    • H01L29/66
    • H01L29/66689H01L21/76229H01L21/76264H01L29/0653H01L29/1083H01L29/66484H01L29/66772H01L29/7824
    • A multi-region (81, 83) lateral-diffused-metal-oxide-semiconductor (LDMOS) device (40) has a semiconductor-on-insulator (SOI) support structure (21) on or over which are formed a substantially symmetrical, laterally internal, first LDMOS region (81) and a substantially asymmetric, laterally edge-proximate, second LDMOS region (83). A deep trench isolation (DTI) wall (60) substantially laterally terminates the laterally edge-proximate second LDMOS region (83). Electric field enhancement and lower source-drain breakdown voltages (BVDSS) exhibited by the laterally edge-proximate second LDMOS region (83) associated with the DTI wall (60) are avoided by providing a doped SC buried layer region (86) in the SOI support structure (21) proximate the DTI wall (60), underlying a portion of the laterally edge-proximate second LDMOS region (83) and of opposite conductivity type than a drain region (31) of the laterally edge-proximate second LDMOS region (83).
    • 多区域(81,83)横向扩散金属氧化物半导体(LDMOS)器件(40)具有绝缘体上半导体(SOI)支撑结构(21),其上形成有基本上对称的 横向内部的第一LDMOS区域(81)和基本不对称的横向边缘邻近的第二LDMOS区域(83)。 深沟槽隔离(DTI)壁(60)基本上横向地终止横向边缘邻近的第二LDMOS区域(83)。 通过在SOI中提供掺杂的SC掩埋层区域(86)来避免由与DTI壁(60)相关联的横向边缘邻近的第二LDMOS区域(83)表现出的电场增强和较低的源极 - 漏极击穿电压(BVDSS) 靠近DTI壁(60)的支撑结构(21),位于横向边缘邻近的第二LDMOS区域(83)的一部分下方并且具有与横向边缘邻近的第二LDMOS区域的漏极区域(31)相反的导电类型 83)。