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    • 63. 发明授权
    • Spacers for packaged microelectronic imagers and methods of making and using spacers for wafer-level packaging of imagers
    • 用于封装的微电子成像器的间隔器以及制造和使用间隔件用于成像器的晶片级封装的方法
    • US07223626B2
    • 2007-05-29
    • US10922192
    • 2004-08-19
    • Warren M. FarnworthAlan G. WoodJames M. WarkDavid R. HembreeRickie C. Lake
    • Warren M. FarnworthAlan G. WoodJames M. WarkDavid R. HembreeRickie C. Lake
    • H01L21/00
    • H01L31/0203H01L27/14618H01L27/14625H01L27/14634H01L27/14683H01L2224/48227H01L2224/48091H01L2924/00014
    • Methods of packaging microelectronic imagers and packaged microelectronic imagers. An embodiment of such a method can include providing an imager workpiece having a plurality of imager dies arranged in a die pattern and providing a cover substrate through which a desired radiation can propagate. The imager dies include image sensors and integrated circuitry coupled to the image sensors. The method further includes providing a spacer having a web that includes an adhesive and has openings arranged to be aligned with the image sensors. For example, the web can be a film having an adhesive coating, or the web itself can be a layer of adhesive. The method continues by assembling the imager workpiece with the cover substrate such that (a) the spacer is between the imager workpiece and the cover substrate, and (b) the openings are aligned with the image sensors. The attached web is not cured after the imager workpiece and the cover substrate have both been adhered to the web. As such, the web does not outgas contaminants into the compartments in which the image sensors are housed.
    • 包装微电子成像仪和封装的微电子成像仪的方法。 这种方法的实施例可以包括提供具有以模片图案布置的多个成像模具的成像工件,并提供覆盖基板,期望的辐射可以通过该基板传播。 成像器裸片包括耦合到图像传感器的图像传感器和集成电路。 该方法还包括提供具有包括粘合剂并具有布置成与图像传感器对准的开口的腹板的间隔件。 例如,网可以是具有粘合剂涂层的膜,或者网本身可以是一层粘合剂。 该方法通过将成像器工件与盖基板组装成使得(a)间隔件位于成像器工件和盖基板之间,并且(b)开口与图像传感器对准,该方法继续。 在成像器工件和盖基板都已经粘附在卷材上之后,连接的卷材不固化。 因此,纸幅不会将污染物排出到其中容纳图像传感器的隔室中。
    • 66. 发明授权
    • Method for testing semiconductor components
    • 半导体元件测试方法
    • US06396291B1
    • 2002-05-28
    • US09723101
    • 2000-11-28
    • Salman AkramDavid R. HembreeWarren M. FarnworthDerek GochnourAlan G. WoodJohn O. Jacobson
    • Salman AkramDavid R. HembreeWarren M. FarnworthDerek GochnourAlan G. WoodJohn O. Jacobson
    • G01R3102
    • G01R1/0466G01R1/0483
    • A system and method for testing semiconductor components are provided. The system includes: a test board, sockets mounted to the test board in electrical communication with test circuitry, and carriers mounted to the sockets for housing the components. The carriers include bases, and interconnects mounted thereon, having contact members configured to make temporary electrical connections with contacts on the components. In addition, the contact members on the interconnects can be shaped to perform an alignment function, and to prevent excessive deformation of the contacts on the components. The sockets include camming members and electrical connectors configured to electrically contact the carriers with a zero insertion force. During a test procedure, the bases and interconnects can remain mounted to the sockets on the test board, as the components are aligned and placed in electrical contact with the interconnects. However, different bases and interconnects can be mounted to the sockets for testing different types of components.
    • 提供了一种用于测试半导体部件的系统和方法。 该系统包括:测试板,安装在与测试电路电气通信的测试板上的插座,以及安装到插座以用于容纳部件的载体。 载体包括底座和安装在其上的互连件,其具有被配置为与部件上的触点进行临时电连接的接触构件。 此外,互连上的接触构件可以成形为执行对准功能,并且防止部件上的触点的过度变形。 插座包括凸轮构件和被配置为以零插入力电接触托架的电连接器。 在测试过程中,基板和互连件可以保持安装到测试板上的插座上,因为组件对齐并放置成与互连件电接触。 然而,可以将不同的基座和互连件安装到插座以测试不同类型的部件。
    • 68. 发明授权
    • Probe card and testing method for semiconductor wafers
    • 半导体晶圆的探针卡和测试方法
    • US06275052B1
    • 2001-08-14
    • US09303367
    • 1999-04-30
    • David R. HembreeWarren M. FarnworthSalman AkramAlan G. WoodC. Patrick DohertyAndrew J. Krivy
    • David R. HembreeWarren M. FarnworthSalman AkramAlan G. WoodC. Patrick DohertyAndrew J. Krivy
    • G01R1073
    • G01R1/073G01R31/2886
    • A probe card for testing semiconductor wafers, and a method and system for testing wafers using the probe card are provided. The probe card is configured for use with a conventional testing apparatus, such as a wafer probe handler, in electrical communication with test circuitry. The probe card includes an interconnect substrate having contact members for establishing electrical communication with contact locations on the wafer. The probe card also includes a membrane for physically and electrically connecting the interconnect substrate to the testing apparatus, and a compressible member for cushioning the pressure exerted on the interconnect substrate by the testing apparatus. The interconnect substrate can be formed of silicon with raised contact members having penetrating projections. Alternately the contact members can be formed as indentations for testing bumped wafers. The membrane can be similar to multi layered TAB tape including metal foil conductors attached to a flexible, electrically-insulating, elastomeric tape. The probe card can be configured to contact all of the dice on the wafer at the same time, so that test signals can be electronically applied to selected dice as required.
    • 提供了用于测试半导体晶片的探针卡,以及使用探针卡测试晶片的方法和系统。 探针卡被配置用于与测试电路电连通的常规测试装置,例如晶片探测器处理器。 探针卡包括具有用于与晶片上的接触位置建立电连通的接触构件的互连基板。 探针卡还包括用于将互连基板物理和电连接到测试装置的膜,以及用于缓冲由测试装置施加在互连基板上的压力的可压缩构件。 互连衬底可以由具有穿透突起的凸起接触构件的硅形成。 或者,接触构件可以形成为用于测试凸起的晶片的凹陷。 膜可以类似于多层TAB带,其包括附接到柔性,电绝缘的弹性体带的金属箔导体。 探针卡可以配置为同时接触晶片上的所有骰子,以便测试信号可以根据需要以电子方式应用于选定的骰子。