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61. 发明授权

US07304717B2 Imaging device in a projection exposure facility 失效
标题翻译：投影曝光设备中的成像装置
公开(公告)号：US07304717B2
公开(公告)日：2007-12-04
申请号：US10250495
申请日：2002-12-17
申请人： Wolfgang Hummel , Juergen Fischer , Karl-Eugen Aubele , Erich Merz , Raoul Reiner , Klaus Rief , Stefan Schoengart , Markus Neumaier , Baerbel Trossbach , Ulrich Weber , Michael Muehlbeyer , Hubert Holderer , Alexander Kohl , Jochen Weber , Johannes Lippert , Thorsten Rassel
发明人： Wolfgang Hummel , Juergen Fischer , Karl-Eugen Aubele , Erich Merz , Raoul Reiner , Klaus Rief , Stefan Schoengart , Markus Neumaier , Baerbel Trossbach , Ulrich Weber , Michael Muehlbeyer , Hubert Holderer , Alexander Kohl , Jochen Weber , Johannes Lippert , Thorsten Rassel
IPC分类号： G03B27/42 , G03B27/52 , G02B7/02 , G03B27/54
CPC分类号： G03F7/70258 , G03F7/70825
摘要： An imaging device in a projection exposure machine for microlithography has at least one optical element and at least one manipulator, having a linear drive, for manipulating the position of the optical element. The linear drive has a driven subregion and a nondriven subregion, which are movable relative to one another in the direction of a movement axis. The subregions are interconnected at least temporarily via functional elements with an active axis and via functional elements with an active direction at least approximately parallel to the movement axis.
摘要翻译：用于微光刻的投影曝光机中的成像装置具有至少一个光学元件和至少一个具有线性驱动的操纵器，用于操纵光学元件的位置。线性驱动器具有驱动区域和非驱动子区域，它们可以在运动轴线的方向上相对于彼此移动。至少临时地通过具有主动轴的功能元件和通过至少大致平行于运动轴的有源方向的功能元件临时地互相连接。

62. 发明申请

US20070183063A1 Device for preventing the displacement of an optical element 有权
标题翻译：用于防止光学元件的位移的装置
公开(公告)号：US20070183063A1
公开(公告)日：2007-08-09
申请号：US10570021
申请日：2004-08-20
申请人： Christian Zengerling , Armin Schoeppach , Ulrich Weber
发明人： Christian Zengerling , Armin Schoeppach , Ulrich Weber
IPC分类号： G02B7/02
CPC分类号： G03F7/70825 , G02B7/003
摘要： In a device (1) for preventing the creeping of an optical element (2), in particular a lens or a mirror, the optical element (2) is connected to a mount (3) via connecting members (4) arranged on the circumference of the optical element (2). The position of the optical element (2) in an objective (PL) deviates from the vertical axial position. In order to compensate the dead weight at least of the optical element (2) at least one holding element (7) via which the optical element (2) is held on a housing part of the objective (PL) is provided in addition to the connecting members (4).
摘要翻译：在用于防止光学元件（2），特别是透镜或反射镜的蠕变的装置（1）中，光学元件（2）经由布置在圆周上的连接构件（4）连接到安装件（3）的光学元件（2）。光学元件（2）在物镜（PL）中的位置偏离垂直轴向位置。为了补偿至少一个光学元件（2）的自重，除了将光学元件（2）保持在物镜（PL）的壳体部分上以外还提供至少一个保持元件（7）连接构件（4）。

63. 发明授权

US07239462B2 Objective with at least one optical element 有权
标题翻译：目标至少有一个光学元件
公开(公告)号：US07239462B2
公开(公告)日：2007-07-03
申请号：US11063113
申请日：2005-02-22
申请人： Johannes Rau , Armin Schoeppach , Ulrich Weber
发明人： Johannes Rau , Armin Schoeppach , Ulrich Weber
IPC分类号： G02B7/02
CPC分类号： G02B7/023
摘要： An objective (2) with at least one optical element (4), which is mounted in an inner ring (3). The inner ring (3) is connected to an outer mount (1). A manipulator (10) is provided for displacing the optical element (4) in at least a direction perpendicular to an optical axis. The inner ring (3) is connected to the outer mount (1) by means of at least two adjusting joints (5) with manipulators (10) and at least one swivel joint (6). The at least two adjusting joints (5) and the at least one swivel joint (6) are provided with joint arms (8) extending at least approximately in a tangential direction with respect to the inner ring (3), by means of which arms the inner ring (3) is elastically connected to the outer mount (1). The ends of the joint arms (8) are articulated on the inner ring (3) in such a way that temperature-induced changes in length of the joint arms (8) are converted into a uniform turning direction of the inner ring (3) with respect to the outer mount (1) about the center of the optical element.
摘要翻译：具有安装在内圈（3）中的至少一个光学元件（4）的物镜（2）。内圈（3）连接到外座（1）。提供了一种操纵器（10），用于沿至少垂直于光轴的方向移动光学元件（4）。内圈（3）通过具有操纵器（10）的至少两个调节接头（5）和至少一个旋转接头（6）连接到外部安装件（1）。所述至少两个调节接头（5）和所述至少一个旋转接头（6）设置有至少大致沿相对于所述内环（3）的切线方向延伸的接合臂（8），借助于该臂内环（3）弹性地连接到外部安装件（1）。接合臂（8）的端部以内部环（3）上的温度引起的连接臂（8）的长度变化转换成内圈（3）的均匀转动方式的方式铰接在内圈（3）上，相对于外部安装件（1）围绕光学元件的中心。

64. 发明申请

US20060072217A1 Apparatus for positioning an optical element in a structure 失效
公开(公告)号：US20060072217A1
公开(公告)日：2006-04-06
申请号：US11262360
申请日：2005-10-28
申请人： Ulrich Weber , Hubert Holderer , Dirk Rexhaeuser
发明人： Ulrich Weber , Hubert Holderer , Dirk Rexhaeuser
IPC分类号： G02B7/02
CPC分类号： G03F7/70258 , G02B7/003 , G03F7/70825
摘要： In an apparatus for positioning an optical element in a structure, particularly in an objective housing of a projection objective for microlithography, the optical element is connected to the structure via fastening elements. The position of the optical element is set by means of adjusting fasteners. The fastening elements are arranged in such a way and the adjusting fasteners can be actuated in such a way that the optical element can be tilted about three mutually independent axes and can additionally be displaced in a translatory fashion in one axial direction

65. 发明申请

US20050190462A1 Objective with at least one optical element 有权
标题翻译：目标至少有一个光学元件
公开(公告)号：US20050190462A1
公开(公告)日：2005-09-01
申请号：US11063113
申请日：2005-02-22
申请人： Johannes Rau , Armin Schoeppach , Ulrich Weber
发明人： Johannes Rau , Armin Schoeppach , Ulrich Weber
IPC分类号： G02B7/02
CPC分类号： G02B7/023
摘要： An objective (2) with at least one optical element (4), which is mounted in an inner ring (3). The inner ring (3) is connected to an outer mount (1). A manipulator (10) is provided for displacing the optical element (4) in at least a direction perpendicular to an optical axis. The inner ring (3) is connected to the outer mount (1) by means of at least two adjusting joints (5) with manipulators (10) and at least one swivel joint (6). The at least two adjusting joints (5) and the at least one swivel joint (6) are provided with joint arms (8) extending at least approximately in a tangential direction with respect to the inner ring (3), by means of which arms the inner ring (3) is elastically connected to the outer mount (1). The ends of the joint arms (8) are articulated on the inner ring (3) in such a way that temperature-induced changes in length of the joint arms (8) are converted into a uniform turning direction of the inner ring (3) with respect to the outer mount (1) about the center of the optical element.
摘要翻译：具有安装在内圈（3）中的至少一个光学元件（4）的物镜（2）。内圈（3）连接到外座（1）。提供了一种操纵器（10），用于沿至少垂直于光轴的方向移动光学元件（4）。内圈（3）通过具有操纵器（10）的至少两个调节接头（5）和至少一个旋转接头（6）连接到外部安装件（1）。所述至少两个调节接头（5）和所述至少一个旋转接头（6）设置有至少大致沿相对于所述内环（3）的切线方向延伸的接合臂（8），借助于该臂内圈（3）弹性地连接到外座（1）。接合臂（8）的端部以内部环（3）上的温度引起的连接臂（8）的长度变化转换成内圈（3）的均匀转动方式的方式铰接在内圈（3）上，相对于外部安装件（1）围绕光学元件的中心。

66. 发明申请

US20050029471A1 Energy filter device 有权
标题翻译：能量过滤装置
公开(公告)号：US20050029471A1
公开(公告)日：2005-02-10
申请号：US10853850
申请日：2004-05-25
申请人： Gerhard Kraft , Ulrich Weber , Sebastian Kraft , Stephan Kraft
发明人： Gerhard Kraft , Ulrich Weber , Sebastian Kraft , Stephan Kraft
IPC分类号： A61N5/10 , G21K1/04 , G21K1/10 , H01J3/00 , G21G5/00
CPC分类号： G21K1/046 , A61N5/1042 , A61N2005/1087 , A61N2005/1095 , G21K1/04 , G21K1/10
摘要： An energy filter device for beams which are used in the course of ion beam therapy, wherein at least one passive modulator is provided. The modulator comprises a scattering film for the beams and a collimator with an opening for controlling the beams.
摘要翻译：一种用于在离子束治疗过程中使用的光束的能量过滤装置，其中提供至少一个无源调制器。调制器包括用于光束的散射膜和具有用于控制光束的开口的准直器。

67. 发明授权

US06710362B2 Device for irradiating a tumor tissue 有权
标题翻译：用于照射肿瘤组织的装置
公开(公告)号：US06710362B2
公开(公告)日：2004-03-23
申请号：US10239685
申请日：2003-01-08
申请人： Gerhard Kraft , Ulrich Weber
发明人： Gerhard Kraft , Ulrich Weber
IPC分类号： A61N500
CPC分类号： A61N5/1049 , A61N5/1043 , A61N5/1067 , A61N2005/1061 , A61N2005/1087 , A61N2005/1095
摘要： The invention relates to an apparatus and a method for irradiating tumor tissue (3) of a patient (10) by means of an ion beam (2). For that purpose, the apparatus has a deflecting device (1) for the ion beam (2) for slice-wise and area-wise scanning of the tumor tissue (3) and an ion beam energy control device for slice-wise and depth-wise scanning of the ion beam (2). An electromechanically driven ion-braking device (11, 12) is provided as a depth-wise scanning adaptation apparatus (5) for adapting the range of the ion beam (2) and has faster depth-wise adaptation than the energy control device of an accelerator. The movement of a patient is monitored by means of a movement detection device (7) for detecting a temporal and positional change in the location of the tumor tissue (3) in a treatment space (8). A control device controls the deflecting device (1) and the depth-wise adaptation apparatus (5) for adjusting the ion beam direction and ion beam range, respectively, when scanning the tumor tissue (3) in the course of temporal and positional change in the location of the tumor tissue (3) in the treatment space (8).
摘要翻译：本发明涉及一种通过离子束（2）照射患者（10）的肿瘤组织（3）的装置和方法。为此，该装置具有用于离子束（2）的偏转装置（1），用于对肿瘤组织（3）进行切片和区域扫描，以及用于切片和深度扫描的离子束能量控制装置，扫描离子束（2）。提供一种机电驱动的离子制动装置（11,12）作为深度扫描适应装置（5），用于使离子束（2）的范围适应，并具有比其能量控制装置更深的深度适应性加速器。通过移动检测装置（7）来监视患者的运动，用于检测治疗空间（8）中肿瘤组织（3）的位置的时间和位置变化。当在时间和位置变化的过程中扫描肿瘤组织（3）时，控制装置控制偏转装置（1）和深度适应装置（5），用于分别调节离子束方向和离子束范围肿瘤组织（3）在治疗空间（8）中的位置。

68. 发明授权

US06271976B1 Apparatus for tilting an object about at least one axis, in particular an optical element 有权
标题翻译：用于围绕至少一个轴倾斜物体的装置，特别是光学元件
公开(公告)号：US06271976B1
公开(公告)日：2001-08-07
申请号：US09490890
申请日：2000-01-27
申请人： Ulrich Weber
发明人： Ulrich Weber
IPC分类号： G02B702
CPC分类号： G03F7/70825 , G02B7/003 , G02B7/023
摘要： In the case of an apparatus for tilting an object about at least one axis, in particular an optical element, such as a lens (9), the object in the case of an optical element is supported by an inner ring (7) and connected via at least three bearing points to a mount or an outer ring (8). Tilting of the object (9) is adjustable by means of adjusting elements. A plurality of links (1-6) are provided as adjusting elements, some of which, as supporting links (1-4), bear the inner ring (7) with respect to the outer ring (8) in such a way that the inner ring (7) can rotate only about two mutually perpendicular tilting axes (x, y axis). Two further links, as adjusting links (5, 6), support torsional moments about the mutually perpendicular tilting axes. The tilting angles are adjustable by adjusting the adjusting links (5, 6).
摘要翻译：在用于使物体围绕至少一个轴倾斜的装置的情况下，特别是诸如透镜（9）的光学元件的情况下，在光学元件的情况下的物体由内圈（7）支撑并连接通过至少三个轴承点到安装件或外圈（8）。物体（9）的倾斜可通过调节元件调节。多个连杆（1-6）被设置为调节元件，其中一些作为支撑连杆（1-4），相对于外圈（8）以相对于外圈（8）的方式支承内圈（7）内环（7）只能旋转约两个相互垂直的倾斜轴（x，y轴）。作为调整链接（5,6）的另外两个链接支持相互垂直的倾斜轴的扭转力矩。通过调整调节连杆（5,6）可以调节倾斜角度。

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