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61. 发明授权

US08008174B2 Continuous feed chemical vapor deposition 有权
标题翻译：连续进料化学气相沉积
公开(公告)号：US08008174B2
公开(公告)日：2011-08-30
申请号：US12577641
申请日：2009-10-12
申请人： Gang He , Gregg Higashi
发明人： Gang He , Gregg Higashi
IPC分类号： H01L21/20 , H01L21/36 , C23C16/00
CPC分类号： C23C16/54 , C23C16/45519 , C23C16/458 , C30B25/025 , C30B29/40 , C30B29/42 , H01L21/02463 , H01L21/02543 , H01L21/02546 , H01L21/0262 , H01L21/67109 , H01L21/67115 , H01L21/67173 , H01L21/6776 , H01L21/67784
摘要： Embodiments of the invention generally relate to a method for forming a multi-layered material during a continuous chemical vapor deposition (CVD) process. In one embodiment, a method for forming a multi-layered material during a continuous CVD process is provided which includes continuously advancing a plurality of wafers through a deposition system having at least four deposition zones. Multiple layers of materials are deposited on each wafer, such that one layer is deposited at each deposition zone. The methods provide advancing each wafer through each deposition zone while depositing a first layer from the first deposition zone, a second layer from the second deposition zone, a third layer from the third deposition zone, and a fourth layer from the fourth deposition zone. Embodiments described herein may be utilized to form an assortment of materials on wafers or substrates, especially for forming Group III/V materials on GaAs wafers.
摘要翻译：本发明的实施方案一般涉及在连续化学气相沉积（CVD）工艺期间形成多层材料的方法。在一个实施例中，提供了在连续CVD工艺期间形成多层材料的方法，其包括通过具有至少四个沉积区的沉积系统连续前进多个晶片。在每个晶片上沉积多层材料，使得在每个沉积区域沉积一层。该方法提供每个晶片通过每个沉积区域，同时从第一沉积区沉积第一层，从第二沉积区沉积第二层，从第三沉积区沉积第三层，以及从第四沉积区沉积第四层。本文描述的实施例可以用于在晶片或衬底上形成各种材料，特别是用于在GaAs晶片上形成III / V族材料。

62. 发明申请

US20100209626A1 METHODS FOR HEATING WITH LAMPS 有权
标题翻译：用加热灯加热的方法
公开(公告)号：US20100209626A1
公开(公告)日：2010-08-19
申请号：US12725318
申请日：2010-03-16
申请人： Gang He , Gregg Higashi , Khurshed Sorabji , Roger Hamamjy , Andreas Hegedus
发明人： Gang He , Gregg Higashi , Khurshed Sorabji , Roger Hamamjy , Andreas Hegedus
IPC分类号： C23C16/46
CPC分类号： C23C16/4583 , C23C16/4412 , C23C16/45519 , C23C16/45565 , C23C16/481 , C23C16/54 , C30B25/025 , C30B25/10 , C30B29/40 , C30B29/42 , H01L21/67115 , H01L21/67784
摘要： Embodiments of the invention generally relate to methods for chemical vapor deposition (CVD) processes. In one embodiment, a method for heating a substrate or a substrate susceptor within a vapor deposition reactor system includes exposing a lower surface of a substrate susceptor, such as a wafer carrier, to energy emitted from a heating lamp assembly, and heating the substrate susceptor to a predetermined temperature. The heating lamp assembly generally contains a lamp housing disposed on an upper surface of a support base and contains at least one lamp holder, a plurality of lamps extending from the lamp holder, and a reflector disposed on the upper surface of the support base, next to the lamp holder, and below the lamps. The plurality of lamps may have split filament lamps and/or non-split filament lamps for heating inner and outer portions of the substrate susceptor.
摘要翻译：本发明的实施方案一般涉及用于化学气相沉积（CVD）方法的方法。在一个实施例中，一种用于加热气相沉积反应器系统内的衬底或衬底基座的方法包括将诸如晶片载体的衬底基座的下表面暴露于从加热灯组件发射的能量，以及加热衬底基座达到预定温度。加热灯组件通常包括设置在支撑基座的上表面上的灯壳，并且包含至少一个灯座，从灯座延伸的多个灯和设置在支撑座的上表面上的反射器到灯座和灯下方。多个灯可以具有用于加热衬底基座的内部和外部的分离的灯丝灯和/或非分裂灯丝灯。

63. 发明申请

US20100209620A1 METHOD FOR VAPOR DEPOSITION 有权
标题翻译：蒸气沉积方法
公开(公告)号：US20100209620A1
公开(公告)日：2010-08-19
申请号：US12725296
申请日：2010-03-16
申请人： Gang He , Gregg Higashi , Khurshed Sorabji , Roger Hamamjy , Andreas Hegedus
发明人： Gang He , Gregg Higashi , Khurshed Sorabji , Roger Hamamjy , Andreas Hegedus
IPC分类号： C23C16/46
CPC分类号： C23C16/4583 , C23C16/4412 , C23C16/45519 , C23C16/45565 , C23C16/481 , C23C16/54 , C30B25/025 , C30B25/12 , C30B29/40 , C30B29/42 , H01L21/67115 , H01L21/67784
摘要： Embodiments of the invention generally relate to methods for chemical vapor deposition (CVD) processes. In one embodiment, a method for processing a wafer within a vapor deposition reactor is provided which includes heating at least one wafer disposed on a wafer carrier by exposing a lower surface of the wafer carrier to radiation emitted from a lamp assembly and flowing a liquid through a passageway extending throughout the reactor to maintain the reactor lid assembly at a predetermined temperature, such as within a range from about 275° C. to about 325° C. The method further includes traversing the wafer carrier along a wafer carrier track through at least a chamber containing a showerhead assembly and an isolator assembly and another chamber containing a showerhead assembly and an exhaust assembly, and removing gases from the reactor through the exhaust assembly.
摘要翻译：本发明的实施方案一般涉及用于化学气相沉积（CVD）方法的方法。在一个实施例中，提供了一种用于在气相沉积反应器内处理晶片的方法，其包括通过将晶片载体的下表面暴露于从灯组件发射的辐射并使液体流过而使加热至少一个设置在晶片载体上的晶片通过整个反应器延伸的通道，以将反应器盖组件保持在预定的温度，例如在约275℃至约325℃的范围内。该方法还包括至少通过晶片载体轨道横穿晶片载体包含喷头组件和隔离器组件的腔室以及包含喷头组件和排气组件的另一腔室，以及通过排气组件从反应器中除去气体。

64. 发明申请

US20100126570A1 THIN ABSORBER LAYER OF A PHOTOVOLTAIC DEVICE 有权
标题翻译：一个光伏器件的薄膜层
公开(公告)号：US20100126570A1
公开(公告)日：2010-05-27
申请号：US12605129
申请日：2009-10-23
申请人： Isik C. Kizilyalli , Melissa Archer , Harry Atwater , Thomas J. Gmitter , Gang He , Andreas Hegedus , Gregg Higashi
发明人： Isik C. Kizilyalli , Melissa Archer , Harry Atwater , Thomas J. Gmitter , Gang He , Andreas Hegedus , Gregg Higashi
IPC分类号： H01L31/0304 , H01L31/18
CPC分类号： H01L31/0735 , Y02E10/544
摘要： Methods and apparatus are provided for converting electromagnetic radiation, such as solar energy, into electric energy with increased efficiency when compared to conventional solar cells. In one embodiment of a photovoltaic (PV) device, the PV device generally includes an n-doped layer and a p+-doped layer adjacent to the n-doped layer to form a p-n layer such that electric energy is created when electromagnetic radiation is absorbed by the p-n layer. The n-doped layer and the p+-doped layer may compose an absorber layer having a thickness less than 500 nm. Such a thin absorber layer may allow for greater efficiency and flexibility in PV devices when compared to conventional solar cells.
摘要翻译：提供了与常规太阳能电池相比，用于将诸如太阳能的电磁辐射转换成电能的方法和装置，其效率提高。在光伏（PV）器件的一个实施例中，PV器件通常包括与n掺杂层相邻的n掺杂层和p +掺杂层以形成pn层，使得当电磁辐射被吸收时产生电能由pn层。 n掺杂层和p +掺杂层可以组成厚度小于500nm的吸收层。与常规太阳能电池相比，这种薄的吸收层可以在PV器件中实现更高的效率和灵活性。

65. 发明申请

US20100001316A1 EPITAXIAL LIFT OFF STACK HAVING A NON-UNIFORM HANDLE AND METHODS THEREOF 有权
标题翻译：具有非均匀手柄的外延提升堆栈及其方法
公开(公告)号：US20100001316A1
公开(公告)日：2010-01-07
申请号：US12475418
申请日：2009-05-29
申请人： Thomas Gmitter , Gang He , Andreas Hegedus
发明人： Thomas Gmitter , Gang He , Andreas Hegedus
IPC分类号： H01L29/20 , H01L21/20
CPC分类号： H01L21/7813 , H01L21/02543 , H01L21/02546 , H01L21/30612 , H01L21/6835 , H01L21/6836 , H01L21/7806 , H01L2221/6835 , H01L2221/68381
摘要： Embodiments of the invention generally relate to epitaxial lift off (ELO) thin films and devices and methods used to form such films and devices. In one embodiment, a method for forming a thin film material during an epitaxial lift off process is provided which includes forming an epitaxial material over a sacrificial layer on a substrate, adhering a non-uniform support handle onto the epitaxial material, and removing the sacrificial layer during an etching process. The etching process further includes peeling the epitaxial material from the substrate while forming an etch crevice therebetween and bending the support handle to form compression in the epitaxial material during the etching process. In one example, the non-uniform support handle contains a wax film having a varying thickness.
摘要翻译：本发明的实施例一般涉及外延剥离（ELO）薄膜，以及用于形成这种膜和装置的装置和方法。在一个实施例中，提供了在外延剥离工艺期间形成薄膜材料的方法，其包括在衬底上的牺牲层上形成外延材料，将不均匀的支撑手柄附着在外延材料上，以及去除牺牲在蚀刻过程中。蚀刻工艺还包括从衬底剥离外延材料，同时在其间形成蚀刻缝隙，并在蚀刻工艺期间弯曲支撑柄以在外延材料中形成压缩。在一个实例中，不均匀的支撑手柄包含具有变化厚度的蜡膜。

66. 发明申请

US20080169941A1 Aircraft glide slope display system and method 有权
标题翻译：飞机滑坡显示系统及方法
公开(公告)号：US20080169941A1
公开(公告)日：2008-07-17
申请号：US11652185
申请日：2007-01-11
申请人： Gang He
发明人： Gang He
IPC分类号： G01C21/00
CPC分类号： G01C23/00
摘要： A system and method for displaying aircraft glide slope includes determining a glide slope deviation that is representative of a difference between a desired aircraft glide slope and an actual aircraft glide slope. A glide slope icon that is representative of the desired aircraft glide slope and a glide slope deviation icon that is representative of the determined glide slope deviation are simultaneously rendered on a display.
摘要翻译：用于显示飞行器滑翔坡的系统和方法包括确定代表期望的飞行器滑翔坡与实际的飞机滑翔坡之间的差的滑翔坡偏差。代表所希望的飞行器滑翔坡的滑翔坡图标和表示确定的滑翔坡偏差的滑翔坡偏差图标同时呈现在显示器上。

67. 发明申请

US20070188350A1 Dynamic lateral deviation display 有权
标题翻译：动态横向偏差显示
公开(公告)号：US20070188350A1
公开(公告)日：2007-08-16
申请号：US11353555
申请日：2006-02-14
申请人： Gang He , Aaron Gannon
发明人： Gang He , Aaron Gannon
IPC分类号： G01C21/00 , G06F15/00 , G06F17/00
CPC分类号： G01C23/005
摘要： A method of dynamically displaying lateral deviation in formats on a display is provided. The method comprises assigning one or more positional boundaries for displaying the lateral deviation information, wherein the one or more positional boundaries define areas on a display. The method also comprises calculating display positions of a lateral deviation symbology and determining if each calculated display position is allowed based on where the lateral deviation display would be located, if displayed at each calculated position, in relation to the one or more positional boundaries. The method further comprises, displaying the lateral deviation symbology at the calculated positions when the calculated positions are allowed, and displaying a lateral deviation indicator when the calculated positions are not allowed.
摘要翻译：提供了一种在显示器上动态显示格式的横向偏差的方法。该方法包括分配用于显示横向偏差信息的一个或多个位置边界，其中所述一个或多个位置边界限定显示器上的区域。该方法还包括计算横向偏差符号系统的显示位置，并且相对于一个或多个位置边界，如果在每个计算位置显示，则基于横向偏差显示将位于哪里来确定是否允许每个计算的显示位置。该方法还包括：当允许计算的位置时，在所计算的位置处显示横向偏差符号，并且当不允许计算的位置时显示横向偏差指示符。

68. 发明申请

US20070174358A1 SYSTEMS AND METHODS FOR VERSIONING BASED TRIGGERS 有权
标题翻译：用于基于变换的触发器的系统和方法
公开(公告)号：US20070174358A1
公开(公告)日：2007-07-26
申请号：US11696166
申请日：2007-04-03
申请人： Gang He , Michael Zwilling
发明人： Gang He , Michael Zwilling
IPC分类号： G06F17/30
CPC分类号： G06F17/3051 , G06F17/30309 , Y10S707/99953 , Y10S707/99954 , Y10S707/99955
摘要： A system and/or methodology to track and organize database application data in response to a delete, insert or update procedure. More specifically, a system and/or methodology that employs a version-based retention and linkage approach with respect to triggering implementations is provided.
摘要翻译：响应于删除，插入或更新过程来跟踪和组织数据库应用程序数据的系统和/或方法。更具体地，提供了一种采用基于版本的保持和链接方法相对于触发实现的系统和/或方法。

69. 发明申请

US20070165682A1 Widely-tunable laser apparatus 失效
标题翻译：广泛可调的激光设备
公开(公告)号：US20070165682A1
公开(公告)日：2007-07-19
申请号：US11652634
申请日：2007-01-12
申请人： Gang He , Daniel Gariepy , Hongxin Chen , Francois Babin
发明人： Gang He , Daniel Gariepy , Hongxin Chen , Francois Babin
IPC分类号： H01S3/10 , H01S3/083 , H01S3/08
CPC分类号： H01S3/083 , H01S5/141 , H01S5/4087
摘要： A widely-tunable laser apparatus comprises a plurality of tunable lasers having different ranges that overlap to encompass a desired operating range of wavelengths (for example from 1250 nm to 1650 nm) of the widely-tunable laser apparatus. The tunable lasers are tunable synchronously and selectively with their respective outputs connected in common to sweep the output of the widely-tunable laser apparatus substantially continuously over said operating range. The tunable lasers share the same tuning means which has a plurality of independent channels, each for light from a respective one of the tunable lasers.
摘要翻译：广泛可调谐的激光装置包括具有不同范围的多个可调激光器，其重叠以包含广泛可调激光装置的期望的波长（例如1250nm至1650nm）的工作范围。可调谐激光器可以同步和选择性地可调谐，其各自的输出共同连接，以在所述操作范围内基本连续地扫描广泛可调激光设备的输出。可调激光器共享相同的调谐装置，该调谐装置具有多个独立通道，每个独立通道用于来自可调激光器的相应一个的光。

70. 发明授权

US07116848B2 Optical spectrum analyzer using a diffraction grating and multi-pass optics 有权
$Optical spectrum analyzer using a diffraction grating and multi-pass optics$
标题翻译：光谱分析仪采用衍射光栅和多通道光学
公开(公告)号：US07116848B2
公开(公告)日：2006-10-03
申请号：US10986833
申请日：2004-11-15
申请人： Gang He , Daniel Gariépy , Gregory Walter Schinn
发明人： Gang He , Daniel Gariépy , Gregory Walter Schinn
IPC分类号： G02B6/00 , G02B6/34 , G02B5/30 , G02B27/28 , G01J3/28
CPC分类号： G02B5/3025
摘要： A polarization independent optical spectrum analyzer comprises a diffraction grating, input and output slit means and polarization-maintaining multi-pass optics for directing a light beam to and fro across the diffraction grating while maintaining its linear state of polarization. The optical spectrum analyzer further comprises a polarization control unit for decomposing a light beam for analysis into first and second beams having mutually orthogonal states of polarization (SOPs) and then adjusting one or both SOPs so that they are parallel to each other and to one of the dispersion plane of the diffraction grating which is rotated to select different wavelengths of the first and second light beams. The first and second light beams are passed across the diffraction grating repeatedly by multi-pass polarization-maintaining optics and are outputted and detected separately.
摘要翻译：偏振无关光谱分析仪包括衍射光栅，输入和输出狭缝装置和偏振保持多通道光学器件，用于引导光束穿过衍射光栅，同时保持其线性极化状态。光谱分析仪还包括：偏振控制单元，用于将用于分析的光束分解成具有相互正交偏振态（SOP）的第一和第二光束，然后调整一个或两个SOP，使得它们彼此平行并且与衍射光栅的色散平面被旋转以选择第一和第二光束的不同波长。第一和第二光束通过多通道偏振保持光学器件反复穿过衍射光栅，并分别输出和检测。

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