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    • 63. 发明授权
    • Polishing slurries and a process for the production thereof
    • 抛光浆料及其生产工艺
    • US5904159A
    • 1999-05-18
    • US751769
    • 1996-11-08
    • Hiroshi KatoKazuhiko HayashiHiroyuki Kohno
    • Hiroshi KatoKazuhiko HayashiHiroyuki Kohno
    • C09G1/02B08B7/00
    • C09G1/02
    • A polishing slurry is formed of a silica-dispersed solution obtained by dispersing, in an aqueous solvent, a fumed silica having an average primary particle size of from 5 to 30 nm, the silica-dispersed solution exhibiting a light scattering index (n) of from 3 to 6 at a silica concentration of 1.5% by weight, and the fumed silica dispersed therein having an average secondary particle size of from 30 to 100 nm on the weight basis. The polishing slurry is produced by pulverizing, using a high-pressure homogenizer, a silica-dispersed solution obtained by dispersing a fumed silica in an aqueous solvent, so that the fumed silica possesses an average secondary particle size of from 30 to 100 nm on the weight basis. The polishing slurry is used for polishing semiconductor wafers and inter-layer dielectric in an IC process.
    • 抛光浆料由二氧化硅分散溶液形成,其通过在水性溶剂中分散平均一次粒径为5〜30nm的热解法二氧化硅,显示出光散射指数(n)的二氧化硅分散溶液 3〜6,二氧化硅浓度为1.5重量%,分散在其中的热解法二氧化硅的重均分子量为30〜100nm。 抛光浆料通过使用高压均化器将通过将热解法二氧化硅分散在水性溶剂中获得的二氧化硅分散溶液进行粉碎来制备,使得煅制二氧化硅的平均二次粒径为30〜100nm, 重量基础。 抛光浆料用于在IC工艺中研磨半导体晶片和层间电介质。
    • 64. 发明授权
    • Electroconductive composite plastic resin sheet
    • 导电复合塑料树脂片
    • US5783294A
    • 1998-07-21
    • US772921
    • 1996-12-24
    • Shigenobu HiraiwaKiyofumi TanakaHiroshi Kato
    • Shigenobu HiraiwaKiyofumi TanakaHiroshi Kato
    • B32B7/02B32B27/00B32B27/18B32B27/30C08J7/04H01B1/20H01B1/24H01B5/14H01B1/00
    • C08J7/047H01B1/24C08J2325/00C08J2433/00C08J2475/00Y10T428/24967Y10T428/25Y10T428/263Y10T428/264Y10T428/266Y10T428/31573Y10T428/31576Y10T428/31583Y10T428/31587
    • Proposed is a novel electroconductive composite plastic resin sheet consisting of an insulating base sheet of a plastic resin and an electroconductive coating layer formed on at least one of the surfaces of the base sheet, which is suitable as a material of a carrier tape used in transportation, storage and mounting works of chip-formed electronic devices such as ICs. The electroconductive composite plastic resin sheet of the invention characteristically consists of: (A) a base sheet having a thickness in the range from 100 to 1000 .mu.m formed from an electrically insulating polystyrene-based plastic resin; and (B) a coating layer having a thickness in the range from 0.1 to 30 .mu.m formed on at least one surface of the base sheet from an electroconductive coating composition comprising: (a) 100 parts by weight of an acrylic urethane-based resin as the vehicle of the coating composition to form the matrix phase of the coating layer; and (b) from 15 to 35 parts by weight of electroconductive particles having an average particle diameter in the range from 0.05 to 1.0 .mu.m uniformly dispersed in the vehicle resin, the surface of the coating layer having a surface resistivity in the range from 10.sup.4 to 10.sup.8 ohm at 23.degree. C.
    • 提出了一种新颖的导电复合塑料树脂片,其由塑料树脂的绝缘基片和形成在基片的至少一个表面上的导电涂层组成,其适合作为用于运输的载带的材料 ,诸如IC的芯片形成的电子设备的存储和安装工作。 本发明的导电复合塑料树脂片的特征在于:(A)由电绝缘性聚苯乙烯类塑料树脂形成的厚度在100〜1000μm的基片; 和(B)由导电涂料组合物形成在基片的至少一个表面上的厚度在0.1-30μm范围内的涂层,该导电涂料组合物包含:(a)100重量份的丙烯酸类氨基甲酸酯类树脂 作为涂层组合物的载体,以形成涂层的基质相; 和(b)15至35重量份的均匀分散在车辆树脂中的平均粒径为0.05-1.0μm的导电颗粒,涂层表面电阻率范围为104 在23℃至108欧姆
    • 66. 发明授权
    • Focus control device having improved sensitivity characteristics
    • 具有改善的灵敏度特性的聚焦控制装置
    • US5633680A
    • 1997-05-27
    • US376686
    • 1995-01-23
    • Keiji KanekoShinya YajimaHiroyuki KawamuraHiroshi Kato
    • Keiji KanekoShinya YajimaHiroyuki KawamuraHiroshi Kato
    • G02B7/08H04N5/232H04N5/225
    • H04N5/23212G02B7/08
    • A focus control device of the type including a first sensor circuit arranged to detect the degree of manipulation of a focus operating circuit to produce a lens displacement command signal, a second sensor circuit arranged to detect the current position of a focusing lens to produce a signal indicative of a current lens position, and a comparator arranged to compare the output signals of the first and second sensor circuit to produce a servo control signal according to a difference between the two sensor signals thereby to control the operation of the focusing lens, characterized in that the focus control device comprises an output signal characteristics converting circuit adapted to convert the characteristics of the servo control signal into compliance with a characteristics curve varying with high- and low-pitch inclinations toward the nearest subject distance and infinite ends of the focusing range, respectively.
    • 一种聚焦控制装置,包括:第一传感器电路,被布置成检测聚焦操作电路的操作程度以产生透镜位移指令信号;第二传感器电路,被布置成检测聚焦透镜的当前位置以产生信号 指示当前透镜位置的比较器,以及比较器,被配置为比较第一和第二传感器电路的输出信号,以根据两个传感器信号之间的差异产生伺服控制信号,从而控制聚焦透镜的操作,其特征在于 焦点控制装置包括输出信号特性转换电路,其适于将伺服控制信号的特性转换为与高和低俯仰倾斜朝着最近的被摄体距离和聚焦范围的无限结束变化的特性曲线, 分别。