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61. 发明申请

US20110214814A1 PLASMA PROCESSING APPARATUS AND SHOWER HEAD 有权
标题翻译：等离子体加工设备和淋浴头
公开(公告)号：US20110214814A1
公开(公告)日：2011-09-08
申请号：US13036369
申请日：2011-02-28
申请人： Hachishiro Iizuka , Jun Abe , Akihiro Yokota , Takeshi Ohse
发明人： Hachishiro Iizuka , Jun Abe , Akihiro Yokota , Takeshi Ohse
IPC分类号： C23F1/08 , H05H1/24
CPC分类号： C23F1/08 , C23C16/455 , H01L21/3065 , H05H1/24
摘要： There is provided a plasma processing apparatus including: a shower head installed within a processing chamber for processing a substrate and facing a mounting table for mounting the substrate; a multiple number of gas exhaust holes formed through the shower head to be extended from a facing surface of the shower head to an opposite surface to the facing surface; a multiple number of openable and closable trigger holes formed through the shower head to be extended from the facing surface of the shower head to the opposite surface, and configured to allow plasma leakage from the facing surface to the opposite surface; and a partition wall installed in a gas exhaust space provided on the side of the opposite surface of the shower head to divide the gas exhaust space into a multiple number of regions, each region communicating with one or more trigger holes.
摘要翻译：提供了一种等离子体处理装置，包括：淋浴喷头，安装在处理室内，用于处理基板并面对用于安装基板的安装台; 多个排气孔形成在淋浴喷头上，从喷淋头的相对表面延伸到相对表面; 多个可打开和可闭合的触发孔，其通过淋浴喷头形成，从喷淋头的相对表面延伸到相对表面，并且构造成允许等离子体从面对表面泄漏到相对表面; 以及安装在设置在所述淋浴喷头的相对表面侧的排气空间中的分隔壁，以将所述排气空间分成多个区域，每个区域与一个或多个触发孔连通。

62. 发明申请

US20100072172A1 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD 审中-公开
标题翻译：基板处理装置和基板处理方法
公开(公告)号：US20100072172A1
公开(公告)日：2010-03-25
申请号：US12562137
申请日：2009-09-18
申请人： Akio Ui , Hisataka Hayashi , Takeshi Kaminatsui , Shinji Himori , Norikazu Yamada , Takeshi Ohse , Jun Abe
发明人： Akio Ui , Hisataka Hayashi , Takeshi Kaminatsui , Shinji Himori , Norikazu Yamada , Takeshi Ohse , Jun Abe
IPC分类号： H01L21/3065 , C23F1/02
CPC分类号： H01L21/67069 , H01J37/32009 , H01J37/32027 , H01J37/32045 , H01J37/32091 , H01J37/321 , H01J37/32137 , H01J37/32532 , H01J2237/3341 , H01L21/3065 , H01L21/31116 , H01L21/31138 , H01L21/32136 , H01L21/67253 , H01L22/14 , H01L22/26
摘要： There are provided a substrate processing apparatus and a substrate processing method realizing an effective reduction of a voltage change of a substrate on an electrode to reduce the variation of incident energy of ions entering the substrate. The substrate processing apparatus includes: a first electrode holding a substrate on a main surface of the first electrode; a second electrode facing the first electrode; a RF power source applying to the first electrode a RF voltage whose frequency is equal to or higher than 40 MHz; and a pulse voltage applying unit applying to the first electrode a pulse voltage decreasing in accordance with a lapse of time, by superimposing the pulse voltage on the RF voltage.
摘要翻译：提供了一种基板处理装置和基板处理方法，其实现有效地降低电极上的基板的电压变化，以减少进入基板的离子的入射能量的变化。基板处理装置包括：第一电极，其在第一电极的主表面上保持基板; 面对所述第一电极的第二电极; RF电源，其向所述第一电极施加频率等于或高于40MHz的RF电压; 以及脉冲电压施加单元，通过将所述脉冲电压叠加在所述RF电压上，向所述第一电极施加按照经过的时间降低的脉冲电压。

63. 发明申请

US20080098559A1 Wiper Blade 有权
标题翻译：雨刮片
公开(公告)号：US20080098559A1
公开(公告)日：2008-05-01
申请号：US11718767
申请日：2005-10-31
申请人： Ken Machida , Masaru Fujiwara , Jun Abe
发明人： Ken Machida , Masaru Fujiwara , Jun Abe
IPC分类号： B60S1/38
CPC分类号： B60S1/3887 , B60S1/3801 , B60S1/381 , B60S1/3896 , B60S2001/3815 , B60S2001/3822
摘要： A wiper blade 13 comprises a rubber holder 17 attached to a tip of a wiper arm 14 and a blade rubber 16 supported by the rubber holder 17. The rubber holder 17 is formed into a U-shaped cross section, and an intermediate portion of the blade rubber 16 is covered with the rubber holder 17. Also, both sides of the rubber holder 17 are provided with covers 18 in a longitudinal direction in series. Each of the cover 18 becomes rotatable to the rubber holder 17 in a direction perpendicular to a front windshield glass 12, and exposed portions from the rubber holder 17 of the blade rubber 16 are covered with these covers 18 in an elastically deformable state.
摘要翻译：刮水片13包括安装在刮水器臂14的前端的橡胶保持件17和由橡胶保持件17支撑的刮片橡胶16.橡胶保持件17形成为U形横截面，刀片橡胶16被橡胶保持件17覆盖。另外，橡胶保持件17的两侧沿纵向方向串联地设有盖18。盖18中的每一个可以在与前挡风玻璃12垂直的方向上旋转到橡胶保持件17，并且来自刮板橡胶16的橡胶保持件17的暴露部分以可弹性变形的状态被这些盖18覆盖。

64. 发明授权

US5706124A Rare earth element-doped optical fiber amplifier 失效
标题翻译：稀土元素掺杂光纤放大器
公开(公告)号：US5706124A
公开(公告)日：1998-01-06
申请号：US629593
申请日：1996-04-09
申请人： Katsuyuki Imoto , Kazuo Koya , Jun Abe
发明人： Katsuyuki Imoto , Kazuo Koya , Jun Abe
IPC分类号： G02F1/35 , H01S3/06 , H01S3/067 , H01S3/07 , H01S3/094 , H01S3/10 , H01S3/16 , H01S3/17 , H01S3/30 , G02B6/26
CPC分类号： H04B10/2912 , H01S3/06754 , H04B10/291 , H04B10/294 , H01S2301/02 , H01S2301/04 , H01S3/094096 , H01S3/1608
摘要： An Er-doped multiple-core optical fiber amplifier has an Er-doped multiple-core optical fiber. A signal light of 1.5 .mu.m wavelength band is input through an optical isolator at front stage, and excitation lights of 0.98 .mu.m or 1.48 .mu.m wavelength emitted from excitation light sources are injected through a WDM coupler at front stage and a WDM coupler at rear stage, respectively. An amplified signal light is output through optical isolator at rear stage. A length L.sub.M of the Er-doped multiple-core optical fiber is set to obtain a substantially maximum saturated output power of the amplified signal light.
摘要翻译：掺铒多芯光纤放大器具有掺铒多芯光纤。通过前级光隔离器输入波长1.5μm的信号光，激发光源发射的0.98μm或1.48μm波长的激发光通过前级的WDM耦合器和WDM耦合器注入后期。放大后的信号光通过光隔离器输出。 Er掺杂多芯光纤的长度LM被设定为获得放大的信号光的基本上最大的饱和输出功率。

65. 发明授权

US5671309A Wide-band optical fiber coupler and method for preparing the same 失效
标题翻译：宽带光纤耦合器及其制备方法
公开(公告)号：US5671309A
公开(公告)日：1997-09-23
申请号：US495932
申请日：1995-06-28
申请人： Jun Abe , Masaaki Shirota , Kazuo Koya
发明人： Jun Abe , Masaaki Shirota , Kazuo Koya
IPC分类号： G02B6/28 , G02B6/26 , G02B6/42
CPC分类号： G02B6/2835 , G02B6/03633 , G02B6/29377
摘要： The object of the present invention is to provide a wide-band optical fiber coupler whose light-branching ratio is independent of the wavelength of light rays to be transmitted therethrough as well as a method for preparing the wide-band optical fiber coupler. When an optical fiber 1 having zero-dispersion at 1.55 .mu.m band and an optical fiber 2 having zero-dispersion at 1.3 .mu.m band are fused and drawn to form a coupled portion 3, a light beam 15 is incident upon the optical fiber 2 and the intensity of the light beam outgoing through either of these optical fibers 2 or 1 is measured to detect the light-branching ratio observed at the coupled portion 3. The drawing operation is interrupted at an instance when the detected light-branching ratio falls within the range of 50.+-.5%.
摘要翻译：本发明的目的是提供一种宽带光纤耦合器，其光分支比率与要透射的光线的波长无关，以及宽带光纤耦合器的制备方法。当在1.55μm带上具有零色散的光纤1和在1.3μm带上具有零色散的光纤2被熔化和拉制以形成耦合部分3时，光束15入射到光纤2上并且测量通过这些光纤2或1中的任一个射出的光束的强度，以检测在耦合部分3处观察到的光分支比。在检测到的光分支比落入内部的情况下，绘制操作被中断范围为50 +/- 5％。

66. 发明授权

US5179760A Apparatus for changing wiping range of wiper 失效
标题翻译：更换刮水器刮水范围的装置
公开(公告)号：US5179760A
公开(公告)日：1993-01-19
申请号：US631423
申请日：1990-12-21
申请人： Jun Abe
发明人： Jun Abe
IPC分类号： B60S1/18 , B60S1/24
CPC分类号： B60S1/245 , Y10T74/18184 , Y10T74/18416 , Y10T74/2179
摘要： An apparatus for changing the wiping range of a wiper enables the wiping range to be changed easily but without involving the risk of unwanted changes. The motor caused movement of the drive link is converted into a movement of the drive link for causing a reciprocating oscillation of wiper arms by first and second links which are each swingably supported, the second link being swingable realtive to the first link in such a manner that the stop position of the wiper arms can be varied. An auxiliary link provided on the first link is swingable while following the relative swinging of the second link and being integrated therewith, with the swinging radius of the auxiliary link being smaller than the relative swinging radius of the second link. A spring is supported by two relatively displaceable points of support that are on a link arm of the auxiliary link and on the second link whereby the spring exerts resilient force under which the second link swings to the appropriate one of a plurality of second link positions.
摘要翻译：用于改变刮水器的擦拭范围的装置使得能够容易地改变擦拭范围，而不会引起不希望的变化的风险。电动机引起的驱动连杆的运动被转换为驱动连杆的运动，从而通过第一和第二连杆可摆动地支撑来引起刮水器臂的往复振动，第二连杆可以以这种方式以第一连杆的方式可转动可以改变刮水器臂的停止位置。设置在第一连杆上的辅助连杆可以在跟随第二连杆的相对摆动并与其一体化的同时摆动，辅助连杆的摆动半径小于第二连杆的相对摆动半径。弹簧由两个可相对移动的支撑点支撑，该支撑点位于辅助连杆的连杆臂上并在第二连杆上，由此弹簧施加弹性力，在该弹性力下第二连杆摆动到多个第二连杆位置中适当的一个。

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