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    • 63. 发明授权
    • Methods of manufacturing a semiconductor device
    • 制造半导体器件的方法
    • US08399327B2
    • 2013-03-19
    • US13240560
    • 2011-09-22
    • Jong-Won LeeJae-Seok KimBo-Un Yoon
    • Jong-Won LeeJae-Seok KimBo-Un Yoon
    • H01L21/336
    • H01L21/823842H01L21/823437H01L29/165H01L29/66545H01L29/66628H01L29/7835
    • A method includes forming a plurality of dummy gate structures on a substrate, each dummy gate structure including a dummy gate electrode and a dummy gate mask, forming a first insulation layer on the substrate and the dummy gate structures to fill a first space between the dummy gate structures, planarizing upper portions of the first insulation layer and the dummy gate structures, removing the remaining first insulation layer to expose a portion of the substrate, forming an etch stop layer on the remaining dummy gate structures and the exposed portion of the substrate, forming a second insulation layer on the etch stop layer to fill a second space between the dummy gate structures, planarizing upper portions of the second insulation layer and the etch stop layer to expose the dummy gate electrodes, removing the exposed dummy gate electrodes to form trenches, and forming metal gate electrodes in the trenches.
    • 一种方法包括在衬底上形成多个虚拟栅极结构,每个虚拟栅极结构包括伪栅极电极和伪栅极掩模,在衬底上形成第一绝缘层和虚拟栅极结构以填充虚拟栅极结构之间的第一空间 栅极结构,平坦化第一绝缘层和伪栅极结构的上部,去除剩余的第一绝缘层以暴露衬底的一部分,在剩余的虚设栅极结构和衬底的暴露部分上形成蚀刻停止层, 在所述蚀刻停止层上形成第二绝缘层以填充所述虚拟栅极结构之间的第二空间,平坦化所述第二绝缘层的上部和所述蚀刻停止层以暴露所述伪栅电极,去除所述暴露的伪栅电极以形成沟槽 并且在沟槽中形成金属栅电极。
    • 69. 发明授权
    • Active driver control circuit for semiconductor memory apparatus
    • 半导体存储装置的主动驱动控制电路
    • US07760581B2
    • 2010-07-20
    • US11963035
    • 2007-12-21
    • Jong-Won Lee
    • Jong-Won Lee
    • G11C8/00
    • G11C8/18G11C7/22G11C8/08
    • An active driver control circuit for a semiconductor memory apparatus includes an asynchronous decoding unit that can be activated in response to a bank selection signal, when an external command is a read or write command, can generate an enabled read/write enable signal, and when a precharge signal is enabled, disable the enabled read/write enable signal, a synchronous decoding unit that can be activated in response to the bank selection signal, can generate an enabled active enable signal when the external command is an active command, when the external command is a precharge command, can generate the precharge signal, and output the active enable signal and the precharge signal in synchronization with a clock, and an active driver control signal generating unit that can generate an active driver control signal in response to the active enable signal and the read/write enable signal.
    • 一种用于半导体存储装置的有源驱动器控制电路包括:异步解码单元,其可以响应于存储体选择信号被激活,当外部命令是读或写命令时,可以产生使能的读/写使能信号,并且当 启用预充电信号,禁用启用的读/写使能信号,当外部命令为活动命令时,可以响应于存储体选择信号激活的同步解码单元可以产生使能的有效使能信号,当外部 命令是预充电命令,可以产生预充电信号,并且与时钟同步地输出有源使能信号和预充电信号;以及主动驱动器控制信号生成单元,其可以响应于主动使能而产生主动驱动器控制信号 信号和读/写使能信号。