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    • 65. 发明授权
    • Apparatus and method for making carbon nanotube array
    • 制造碳纳米管阵列的装置和方法
    • US07687109B2
    • 2010-03-30
    • US11371997
    • 2006-03-08
    • Kai-Li JiangKai LiuShou-Shan Fan
    • Kai-Li JiangKai LiuShou-Shan Fan
    • C23C16/00C01B31/02C01B31/00D01C5/00
    • C23C16/0281C23C16/26C23C16/448C30B25/02C30B29/02C30B29/605Y10S427/102
    • An apparatus for making an array of carbon nanotubes includes a reaction chamber with a gas inlet and a gas outlet; a quartz boat disposed in the reaction chamber; a substrate with a surface deposited with a film of first catalyst, the substrate being disposed in the quartz boat; and a second catalyst disposed in the quartz beside the substrate. A method for making an array of carbon nanotubes, comprising the steps of: (a) providing a substrate with a surface deposited with a film of first catalyst; (b) disposing a second catalyst beside the substrate to produce small amounts of hydrogen gas which flows to the first catalyst; (c) introducing a carrier gas and a carbon source gas flowing from the second catalyst to the first catalyst at a predetermined temperature; and (d) growing an array of carbon nanotubes extending from the substrate.
    • 制造碳纳米管阵列的装置包括具有气体入口和气体出口的反应室; 设置在反应室中的石英舟; 具有表面沉积有第一催化剂膜的基板,所述基板设置在所述石英舟中; 以及设置在基板旁边的石英中的第二催化剂。 一种制备碳纳米管阵列的方法,包括以下步骤:(a)向基材提供沉积有第一催化剂膜的表面; (b)在基板旁边设置第二催化剂以产生流过第一催化剂的少量氢气; (c)在预定温度下引入从第二催化剂流向第一催化剂的载气和碳源气体; 和(d)生长从衬底延伸的碳纳米管阵列。
    • 68. 发明申请
    • Semiconductor Device and Method of Shunt Test Measurement for Passive Circuits
    • 半导体器件和无源电路并联测试测量方法
    • US20100001268A1
    • 2010-01-07
    • US12167039
    • 2008-07-02
    • Robert C. FryeKai LiuYaojian Lin
    • Robert C. FryeKai LiuYaojian Lin
    • H01L23/58H01L21/02
    • H01L22/34H01L23/64H01L28/10H01L28/40H01L2224/48091H01L2224/73265H01L2924/3011H01L2924/00014
    • A semiconductor device has an inductor and capacitor formed on the substrate. The inductor and capacitor are electrically connected in series. The inductor is a coiled conductive layer. The capacitor has first and second conductive layers separated by an insulating layer. A first test pad and second test pad are formed on the substrate. A terminal of the inductor is coupled to the first and second test pads. A third test pad and fourth test pad are formed on the substrate. A terminal of the capacitor is coupled to the third and fourth test pads such that the inductor and capacitor are connected in shunt between the first and second test pads and the third and fourth test pads. An electrical characteristic of the inductor and capacitor such that resonant frequency and quality factor are tested using a two-port shunt measurement which negates series resistance of test probes.
    • 半导体器件具有形成在衬底上的电感器和电容器。 电感器和电容器串联电连接。 电感器是线圈导电层。 该电容器具有被绝缘层隔开的第一和第二导电层。 在基板上形成第一测试焊盘和第二测试焊盘。 电感器的端子耦合到第一和第二测试焊盘。 在基板上形成第三测试焊盘和第四测试焊盘。 电容器的端子耦合到第三和第四测试焊盘,使得电感器和电容器在第一和第二测试焊盘与第三和第四测试焊盘之间分流连接。 电感器和电容器的电气特性使得谐振频率和品质因数使用双端口分流测量进行测试,这样可以消除测试探针的串联电阻。