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    • 62. 发明授权
    • Method for manufacturing liquid discharge head
    • 液体排放头的制造方法
    • US08133662B2
    • 2012-03-13
    • US12721415
    • 2010-03-10
    • Makoto WatanabeYoshinori TagawaSatoshi IbeKazuhiro AsaiMasaki OhsumiMasataka Nagai
    • Makoto WatanabeYoshinori TagawaSatoshi IbeKazuhiro AsaiMasaki OhsumiMasataka Nagai
    • B41J2/16
    • B41J2/1603B41J2/1626B41J2/1631B41J2/1639B41J2/1645
    • A method for manufacturing a liquid discharge head that includes a flow path wall member which forms a wall of a flow path communicating with a discharge port for discharging a liquid and a substrate which forms the flow path in contact with the flow path wall member includes providing a first layer, which is made of a photosensitive resin on the substrate, for forming a pattern having a shape of the flow path, providing a second layer which is capable of absorbing light within a photosensitive wavelength range of the photosensitive resin and has a shape corresponding to the shape of the flow path, on the first layer so as to come into contact with the first layer, performing patterning of the first layer which includes exposure of the first layer with the light using the second layer as a mask, and forming the pattern from the first layer, providing a cover layer which is made of a photosensitive resin and serves as the flow path wall member so as to cover the second layer and the pattern, forming the discharge port on the cover layer by performing patterning of the cover layer which includes exposure of the cover layer with the light, and forming the flow path by removing the second layer and the pattern.
    • 一种液体排出头的制造方法,其特征在于,包括形成与排出液体的排出口连通的流路壁的流路壁部件和形成与流路壁部件接触的流路的基板, 第一层,其由基材上的感光树脂制成,用于形成具有流路形状的图案,提供能够吸收感光性树脂感光波长范围内的光的第二层,并具有形状 对应于流路的形状,在第一层上与第一层接触,使用第二层作为掩模进行包括第一层与光的曝光的第一层的图案化,以及形成 从第一层的图案,提供由感光树脂制成并用作流路壁构件以覆盖第二层的覆盖层和轻拍 通过进行覆盖层的图案化,包括覆盖层与光的曝光,并且通过去除第二层和图案形成流路,从而在覆盖层上形成排出口。
    • 66. 发明申请
    • LIQUID EJECTION HEAD AND MANUFACTURING METHOD THEREOF
    • 液体喷射头及其制造方法
    • US20090229125A1
    • 2009-09-17
    • US12400440
    • 2009-03-09
    • Maki KATOMasaki OhsumiYoshinori TagawaKazuhiro AsaiMasahiko KubotaTamaki SatoAkihiko Okano
    • Maki KATOMasaki OhsumiYoshinori TagawaKazuhiro AsaiMasahiko KubotaTamaki SatoAkihiko Okano
    • B21D53/76
    • B41J2/1603B41J2/1628B41J2/1631B41J2/1632B41J2/1639B41J2/1645Y10T29/49401
    • A manufacturing method of a liquid ejection head including an ejection outlet forming member provided with an ejection outlet for ejecting liquid and including a flow passage communicating with the ejection outlet is provided. The manufacturing method includes preparing a substrate on which a first flow passage wall forming member for forming a part of a wall of the flow passage and a solid layer having a shape of a part of the flow passage contact each other, wherein the first flow passage wall forming member has a height, from a surface of the substrate, substantially equal to that of the solid layer; providing a first layer formed of a negative photosensitive resin material; exposing to light a portion of the first layer for constituting the ejection outlet forming member; providing a second layer, on the first layer, formed of a negative photosensitive resin material; exposing to light a portion of the second layer for constituting a second flow passage wall forming member for forming another part of the wall of the flow passage; placing the exposed first layer and the exposed second layer on the solid layer and the first flow passage wall forming member so that a non-exposed portion of the second layer contacts the solid layer; forming a part of the flow passage and the ejection outlet by removing a non-exposed portion of the first layer and the non-exposed portion of the second layer above the substrate; and forming the flow passage by removing the solid layer.
    • 提供了一种液体喷射头的制造方法,该液体喷射头包括具有用于喷射液体的喷射出口并且包括与喷射口连通的流动通道的喷射出口形成部件。 该制造方法包括:准备基板,在基板上形成有形成流路的壁的一部分的第一流路壁形成部件和流路的一部分的形状的固体层彼此接触,其中,第一流路 壁形成构件具有与基底表面大致相等的固体层的高度; 提供由负性感光性树脂材料形成的第一层; 暴露于构成喷射出口形成构件的第一层的一部分; 在第一层上形成第二层,由负的感光性树脂材料形成; 暴露于第二层的一部分,用于构成用于形成流道的壁的另一部分的第二流动通道壁形成构件; 将暴露的第一层和暴露的第二层放置在固体层和第一流路壁形成构件上,使得第二层的未暴露部分接触固体层; 通过去除衬底上方的第一层的未暴露部分和第二层的未暴露部分来形成流动通道和喷射出口的一部分; 并通过去除固体层形成流动通道。