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    • 63. 发明授权
    • Method of manufacturing transfer mask and method of manufacturing semiconductor device
    • 传输掩模的制造方法和制造半导体器件的方法
    • US08197993B2
    • 2012-06-12
    • US13122680
    • 2010-10-08
    • Masahiro HashimotoKazuya SakaiToshiyuki SuzukiKazunori Ono
    • Masahiro HashimotoKazuya SakaiToshiyuki SuzukiKazunori Ono
    • G03F1/00B08B3/00
    • G03F1/46G03F1/54G03F1/80G03F1/82
    • The present invention is a method of manufacturing a transfer mask with use of a mask blank in which a thin film for pattern formation and a chromium-based thin film made of a material containing chromium are stacked on a transparent substrate in this order. The thin film for pattern formation is made of material containing silicon and a transition metal other than chromium. The chromium-based thin film is made of a material containing chromium. Exposure light having a wavelength of 200 nm or less is applied to the transfer mask. In the manufacturing method, the transfer mask is produced by performing, in the following order, a process of forming a resist film having a transfer pattern on the chromium-based thin film, a process of forming a transfer pattern in the chromium-based thin film with use of a mask of the resist film having the transfer pattern, a process of forming a transfer pattern in the thin film for pattern formation with use of a mask of the chromium-based thin film having the transfer pattern, and a process of removing the chromium-based thin film by etching. The manufacturing method further includes a cleaning process of at least one of alkali solution cleaning, hot water cleaning, and ozone-containing water cleaning on the produced transfer mask until a width of the transfer pattern of the thin film for pattern formation is reduced by 4 nm or a space width of the thin film for pattern formation is increased by 4 nm.
    • 本发明是一种使用掩模坯料制造转印掩模的方法,其中用于图案形成的薄膜和由含铬材料制成的铬基薄膜依次层叠在透明基板上。 用于图案形成的薄膜由含有硅和除铬以外的过渡金属的材料制成。 铬基薄膜由含铬的材料制成。 将具有200nm以下波长的曝光光施加到转印掩模。 在制造方法中,通过以下顺序,通过在铬系薄膜上形成具有转印图案的抗蚀剂膜的工序来制造转印掩模,在铬系薄膜中形成转印图案的工序 使用具有转印图案的抗蚀剂膜的掩模的膜,使用具有转印图案的铬基薄膜的掩模在图案形成用薄膜中形成转印图案的工序,以及 通过蚀刻去除铬基薄膜。 该制造方法还包括在制造的转印掩模上进行碱溶液清洗,热水清洗和含臭氧水清洗中的至少一种的清洗处理,直到图案形成用薄膜的转印图案的宽度减少4 nm或用于图案形成的薄膜的空间宽度增加4nm。
    • 65. 发明申请
    • PHOTOMASK BLANK, PHOTOMASK, AND METHODS OF MANUFACTURING THE SAME
    • PHOTOMASK BLANK,PHOTOMASK及其制造方法
    • US20100075236A1
    • 2010-03-25
    • US12562617
    • 2009-09-18
    • Masahiro HashimotoHideaki Mitsui
    • Masahiro HashimotoHideaki Mitsui
    • G03F1/00
    • G03F1/34G03F1/32G03F1/80
    • A photomask blank is for fabricating a phase shift mask having a light-transmissive substrate provided with a phase shift part adapted to give a predetermined phase difference to transmitted exposure light. The phase shift part is a dug-down part formed by digging down the light-transmissive substrate from a surface thereof to a digging depth adapted to produce the predetermined phase difference with respect to exposure light transmitted through the light-transmissive substrate at a portion where the phase shift part is not provided. The photomask blank includes a light-shielding part formed in a peripheral area around a transfer pattern area of the surface of the light-transmissive substrate and adapted to shield exposure light and further includes an etching mask film formed in the transfer pattern area of the surface of the light-transmissive substrate and made of a material being substantially dry-etchable with a chlorine-based gas, but not substantially dry-etchable with a fluorine-based gas, the etching mask film serving as an etching mask at least until the digging depth is reached when forming the dug-down part.
    • 光掩模坯件用于制造具有透光基板的相移掩模,该透光基板设置有适于给予透射曝光的预定相位差的相移部分。 相移部分是通过从其表面向下挖掘透光性基板而形成的挖掘部分,其适用于相对于透过透光基板的曝光光产生预定相位差, 不设置相移部。 光掩模坯料包括形成在透光基板的表面的转印图案区域周围的周边区域中的遮光部,其适于屏蔽曝光光,并且还包括形成在表面的转印图案区域中的蚀刻掩模膜 由基于氯的气体基本可干蚀刻的材料制成,但基本上不能用氟基气体干法蚀刻的材料制成,所述蚀刻掩模膜至少直到挖掘为止 在形成挖掘部分时达到深度。
    • 66. 发明授权
    • Electronic watermark detection device and electronic watermark detection method
    • 电子水印检测装置及电子水印检测方法
    • US07356699B2
    • 2008-04-08
    • US09982579
    • 2001-10-18
    • Masahiro Hashimoto
    • Masahiro Hashimoto
    • H04L9/00
    • H04N1/32149H04N1/32165
    • In the electronic watermark detection device, an electronic watermark detection unit receives input of a DCT coefficient and a picture start from a preprocessing unit to detect an electronic watermark inserted into image data and indicative of copyright information or the like, a detection result adjustment unit receives input of a picture start from the preprocessing unit and input of a detector result and a detector interruption from the electronic watermark detection unit to count the number of pictures, as well as generating and outputting a detection interruption according to the detection result, and an interruption processing unit receives input of a detection result and a detection interruption from the detection result adjustment unit to generate an interruption signal according to a system, as well as outputting the detection result.
    • 在电子水印检测装置中,电子水印检测单元从预处理单元接收DCT系数的输入和图像开始,以检测插入图像数据中的电子水印和指示版权信息等,检测结果调整单元接收 图像的输入从预处理单元开始,从电子水印检测单元输入检测器结果和检测器中断,对图像数进行计数,并根据检测结果生成并输出检测中断,中断 处理单元从检测结果调整单元接收检测结果和检测中断的输入,以根据系统产生中断信号,以及输出检测结果。
    • 68. 发明申请
    • Changer type disc apparatus
    • 换盘式盘装置
    • US20050259534A1
    • 2005-11-24
    • US11132329
    • 2005-05-19
    • Masahiro Hashimoto
    • Masahiro Hashimoto
    • H04N5/76G11B5/09G11B27/00G11B27/034G11B27/10G11B27/32H04N5/782H04N5/85H04N9/804
    • G11B27/329G11B27/002G11B27/034G11B27/105G11B2220/216G11B2220/2562H04N5/782H04N5/85H04N9/8042
    • A changer type disc apparatus having a disc changer portion, on which plural discs are mountable, a recording/playing portion for recording a video signal on a disc mounted on the disc changer portion and for playing the video signal recorded thereon, a tuner portion for outputting a video signal obtained by receiving a commercial broadcasting signal, and control means for recording the video signal outputted by the tuner portion, on a disc by using the recording/playing portion, further comprising classification information recording means for recording classification information, according to which programs received by the tuner portion are classified, on a disc by using the recording/playing portion. When a program is reservation-recorded, the control means records a video signal, which is outputted by the tuner portion, on a disc, on which classification information corresponding to the program to be reservation-recorded is recorded, among discs mounted on the disc changer portion.
    • 一种更换器型盘装置,具有可安装多个盘的盘片更换器部分,用于在安装在盘片更换器部分上的盘上记录视频信号并用于播放记录在其上的视频信号的记录/播放部分,用于 输出通过接收商业广播信号获得的视频信号,以及控制装置,用于通过使用记录/播放部分将调谐器部分输出的视频信号记录在盘上,还包括用于记录分类信息的分类信息记录装置,根据 通过使用记录/播放部分将由调谐器部分接收的节目分类到盘上。 当节目被预约记录时,控制装置将由调谐器部分输出的视频信号记录在盘上,其上记录有与要预约记录的节目相对应的分类信息的盘中安装在盘上的盘 更换部分。