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61. 发明授权

US07940826B2 Surface emitting laser 有权
标题翻译：表面发射激光
公开(公告)号：US07940826B2
公开(公告)日：2011-05-10
申请号：US12377934
申请日：2008-10-08
申请人： Mitsuhiro Ikuta
发明人： Mitsuhiro Ikuta
IPC分类号： H01S5/00
CPC分类号： H01S5/18 , H01S5/105 , H01S5/187 , H01S5/2004 , H01S5/2027
摘要： When configuring a surface emitting laser by a semiconductor material not capable of largely extracting a refractive-index difference, the surface emitting laser using a photonic crystal capable of forming a waveguide is provided.
摘要翻译：当通过不能很大程度地提取折射率差的半导体材料配置表面发射激光器时，提供了使用能够形成波导的光子晶体的表面发射激光器。

62. 发明申请

US20110076058A1 SURFACE EMITTING LASER MANUFACTURING METHOD, SURFACE EMITTING LASER ARRAY MANUFACTURING METHOD, SURFACE EMITTING LASER, SURFACE EMITTING LASER ARRAY, AND OPTICAL APPARATUS INCLUDING SURFACE EMITTING LASER ARRAY 有权
标题翻译：表面发射激光制造方法，表面发射激光阵列制造方法，表面发射激光，表面发射激光阵列和包括表面发射激光阵列的光学装置
公开(公告)号：US20110076058A1
公开(公告)日：2011-03-31
申请号：US12958987
申请日：2010-12-02
申请人： Mitsuhiro Ikuta , Yasuhisa Inao , Takako Yamaguchi
发明人： Mitsuhiro Ikuta , Yasuhisa Inao , Takako Yamaguchi
IPC分类号： G03G15/04 , H01S5/18 , H01S5/323
CPC分类号： H01S5/18391 , H01S5/18311 , H01S5/18347 , H01S2301/166 , H01S2301/176
摘要： Provided is a surface emitting laser manufacturing method, etc., which reduces process damage occurring to a surface relief structure, enabling stable provision of a single transverse mode characteristic. Provided is a method including a surface relief structure for controlling a reflectance in a light emitting portion of an upper mirror, the surface relief structure including a stepped structure, includes: forming a resist pattern including a pattern for forming a mesa structure and a pattern for forming a stepped structure, on or above the upper mirror, and performing first-phase etching for etching the surface layer of the upper mirror to determine the horizontal position of the stepped structure; forming a current confining structure after the performing first-phase etching; and performing second-phase etching for further etching the area that the first-phase etching has been performed, to determine the depth position of the stepped structure, after the forming a current confining structure.
摘要翻译：本发明提供了一种表面发射激光制造方法等，其减少了对表面起伏结构发生的工艺损伤，能够稳定地提供单一横模特性。提供了一种包括用于控制上反射镜的发光部分中的反射率的表面浮雕结构的方法，所述表面浮雕结构包括阶梯结构，包括：形成包括用于形成台面结构的图案的抗蚀剂图案和用于形成台阶结构的图案在上反射镜上或上方形成台阶结构，并执行用于蚀刻上镜的表面层的第一相蚀刻以确定阶梯结构的水平位置; 在执行第一相蚀刻之后形成电流限制结构; 并且在形成电流限制结构之后，执行第二相蚀刻以进一步蚀刻已经执行第一相蚀刻的区域，以确定阶梯结构的深度位置。

63. 发明授权

US07869483B2 Surface emitting laser 有权
标题翻译：表面发射激光
公开(公告)号：US07869483B2
公开(公告)日：2011-01-11
申请号：US12425745
申请日：2009-04-17
申请人： Takeshi Uchida , Yasuhiro Nagatomo , Yuichiro Hori , Mitsuhiro Ikuta
发明人： Takeshi Uchida , Yasuhiro Nagatomo , Yuichiro Hori , Mitsuhiro Ikuta
IPC分类号： H01S3/08
CPC分类号： H01S5/187 , H01S5/105 , H01S5/3211 , H01S5/32341
摘要： A surface emitting laser which oscillates at a wavelength λ of a blue band, including a photonic crystal layer including a photonic crystal structure, an active layer provided on one surface of the photonic crystal layer, and an electrode provided on the other surface of the photonic crystal layer for injecting electric current into the active layer. The photonic crystal structure has a thickness of 100 nm or more. A laser beam is emitted toward a direction opposite to a side of the photonic crystal layer on which the electrode is provided.
摘要翻译：一种表面发射激光器，其以包括光子晶体结构的光子晶体层，设置在光子晶体层的一个表面上的有源层和设置在光子晶体的另一个表面上的电极在蓝色波段的波长λ处振荡用于将电流注入有源层的晶体层。光子晶体结构的厚度为100nm以上。激光束朝向与设置有电极的光子晶体层的一侧相反的方向发射。

64. 发明申请

US20100029030A1 PROCESS FOR PRODUCING SURFACE EMITTING LASER, PROCESS FOR PRODUCING SURFACE EMITTING LASER ARRAY, AND OPTICAL APPARATUS INCLUDING SURFACE EMITTING LASER ARRAY PRODUCED BY THE PROCESS 有权
标题翻译：用于生产表面发射激光的工艺，用于生产表面发射激光阵列的工艺，以及包括由工艺生产的表面发射激光阵列的光学装置
公开(公告)号：US20100029030A1
公开(公告)日：2010-02-04
申请号：US12509551
申请日：2009-07-27
申请人： Tatsuro Uchida , Mitsuhiro Ikuta , Tetsuya Takeuchi
发明人： Tatsuro Uchida , Mitsuhiro Ikuta , Tetsuya Takeuchi
IPC分类号： H01L21/00
CPC分类号： H01S5/423 , H01S5/18311 , H01S5/18369 , H01S5/18377 , H01S5/18391 , H01S5/209 , H01S5/34326 , H01S2301/166
摘要： Provided is a process for producing a surface emitting laser including a surface relief structure provided on laminated semiconductor layers, including the steps of transferring, to a first dielectric film, a first pattern for defining a mesa structure and a second pattern for defining the surface relief structure in the same process; and forming a second dielectric film on the first dielectric film and a surface of the laminated semiconductor layers to which the first pattern and the second pattern have been transferred. Accordingly, a center position of the surface relief structure can be aligned with a center position of a current confinement structure at high precision.
摘要翻译：提供一种制造表面发射激光器的方法，该表面发射激光器包括设置在层叠半导体层上的表面浮雕结构，包括以下步骤：向第一电介质膜转移用于限定台面结构的第一图案和用于限定表面浮雕的第二图案结构在同一过程中; 以及在所述第一电介质膜上形成第二电介质膜和在所述第一图案和所述第二图案转印到所述层叠半导体层的表面上。因此，表面浮雕结构的中心位置可以高精度地与电流限制结构的中心位置对准。

65. 发明授权

US07499481B2 Surface-emitting laser and method for producing the same 有权
标题翻译：表面发射激光器及其制造方法
公开(公告)号：US07499481B2
公开(公告)日：2009-03-03
申请号：US11937772
申请日：2007-11-09
申请人： Mitsuhiro Ikuta
发明人： Mitsuhiro Ikuta
IPC分类号： H01S5/00 , H01S3/08
CPC分类号： H01S5/18386 , H01S5/18311 , H01S5/18313 , H01S5/18333 , H01S5/18338 , H01S2301/163
摘要： A surface-emitting laser includes reflectors. One of the reflectors has multiple layers including one or more high-refractive-index layers and one or more low-refractive-index layers which are alternately stacked. At least one of the low-refractive-index layers includes a first region containing aluminum oxide and a second region surrounding the first region. A boundary between the first and second regions is positioned within a region where laser light is emitted. The reflectance of the multilayer reflector is higher in a portion including the first region than in a portion including the second region.
摘要翻译：表面发射激光器包括反射器。一个反射器具有多个层，包括一个或多个高折射率层和一个或多个交替层叠的低折射率层。低折射率层中的至少一个包括含有氧化铝的第一区域和围绕第一区域的第二区域。第一和第二区域之间的边界位于发射激光的区域内。在包括第一区域的部分中，多层反射器的反射率比包括第二区域的部分的反射率高。

66. 发明申请

US20090035884A1 METHOD FOR MANUFACTURING SURFACE-EMITTING LASER 有权
标题翻译：制造表面发射激光的方法
公开(公告)号：US20090035884A1
公开(公告)日：2009-02-05
申请号：US12166378
申请日：2008-07-02
申请人： Mitsuhiro Ikuta
发明人： Mitsuhiro Ikuta
IPC分类号： H01L21/00
CPC分类号： H01S5/18372 , B82Y20/00 , G02B2006/1213 , H01S5/105 , H01S5/18358 , H01S5/2081 , H01S5/2086 , H01S5/209 , H01S5/34326 , H01S2301/166
摘要： Provided is a method for manufacturing a surface-emitting laser capable of forming a photonic crystal structure inside a semiconductor highly accurately and easily without direct bonding. It is a method by laminating on a substrate a plurality of semiconductor layers including an active layer and a semiconductor layer having a photonic crystal structure formed therein, the method including the steps of forming a second semiconductor layer on a first semiconductor layer to form the photonic crystal structure, forming a plurality of microholes in the second semiconductor layer, forming a low refractive index portion in a part of the first semiconductor layer via the plurality of microholes thereby to provide the first semiconductor layer with the photonic crystal structure having a one-dimensional or two-dimensional refractive index distribution in a direction parallel to the substrate, and forming a third semiconductor layer by crystal regrowth from a surface of the second semiconductor layer.
摘要翻译：提供一种能够高精度，容易地形成半导体内的光子晶体结构的表面发射激光的制造方法，而无需直接接合。这是通过在衬底上层叠多个半导体层的方法，所述多个半导体层包括有源层和在其中形成的光子晶体结构的半导体层，该方法包括以下步骤：在第一半导体层上形成第二半导体层以形成光子晶体结构，在第二半导体层中形成多个微孔，经由多个微孔在第一半导体层的一部分中形成低折射率部分，从而为第一半导体层提供具有一维的光子晶体结构或平行于基板的方向上的二维折射率分布，以及从第二半导体层的表面通过晶体再生长形成第三半导体层。

67. 发明授权

US09042421B2 Surface emitting laser, surface emitting laser array, and optical apparatus having surface emitting laser array 有权
标题翻译：表面发射激光器，表面发射激光器阵列和具有表面发射激光器阵列的光学装置
公开(公告)号：US09042421B2
公开(公告)日：2015-05-26
申请号：US13273539
申请日：2011-10-14
申请人： Mitsuhiro Ikuta
发明人： Mitsuhiro Ikuta
IPC分类号： H01S5/00 , H01S5/183 , B82Y20/00 , H01S5/343
CPC分类号： H01S5/18391 , B82Y20/00 , H01S5/18311 , H01S5/34326
摘要： There is provided a surface emitting laser allowing a direction of a far-field pattern (FFP) centroid to be inclined from a normal direction of a substrate providing the surface emitting laser, comprising: a substrate; a lower reflecting mirror, an active layer, an upper reflecting mirror stacked on the substrate; and a surface relief structure located in an upper portion of a light emitting surface of the upper reflecting mirror, the surface relief structure being made of a material allowing at least some beams emitted from the surface emitting laser to be transmitted therethrough, a plurality of regions having a predetermined optical thickness in a normal direction of the substrate being formed in contact with other region in an in-plane direction of the substrate, and a distribution of the optical thickness in the in-plane direction of the substrate is asymmetric to a central axis of the light emitting regions.
摘要翻译：提供了允许远场图案（FFP）重心的方向从提供表面发射激光器的基板的法线方向倾斜的表面发射激光器，包括：基板; 下反射镜，有源层，叠层在基板上的上反射镜; 以及表面浮雕结构，其位于上反射镜的发光表面的上部，所述表面浮雕结构由允许从表面发射激光器发射的至少一些光束透射的材料制成，多个区域在基板的法线方向上具有与衬底的面内方向上的其他区域接触的预定光学厚度，并且基板的面内方向上的光学厚度的分布不对称于中心发光区域的轴线。

68. 发明授权

US08265115B2 Surface emitting laser, method for manufacturing surface emitting laser, and image forming apparatus 有权
标题翻译：表面发射激光器，表面发射激光器的制造方法和图像形成装置
公开(公告)号：US08265115B2
公开(公告)日：2012-09-11
申请号：US12837272
申请日：2010-07-15
申请人： Mitsuhiro Ikuta
发明人： Mitsuhiro Ikuta
IPC分类号： H01S5/00
CPC分类号： H01S5/18333 , H01S5/18311 , H01S5/18313 , H01S5/18347 , H01S2301/166
摘要： A surface emitting laser includes a lower multilayer mirror and an upper multilayer mirror which are provided on a substrate. A first oxidizable layer is partially oxidized to form a first current confinement layer including a first conductive region and a first insulating region. A second oxidizable layer is partially oxidized to form a second current confinement layer including a second conductive region and a second insulating region, a boundary between the first conductive region and the first insulating region being disposed inside the second current confinement layer in an in-plane direction of the substrate. The first oxidizable layer and the second oxidizable layer or layers adjacent to the respective oxidizable layers are adjusted so that when both layers are oxidized under the same oxidizing conditions, the oxidation rate of the first oxidizable layer is lower than that of the second oxidizable layer.
摘要翻译：表面发射激光器包括设置在基板上的下多层反射镜和上多层反射镜。第一可氧化层被部分氧化以形成包括第一导电区域和第一绝缘区域的第一电流限制层。第二可氧化层被部分氧化以形成包括第二导电区域和第二绝缘区域的第二电流限制层，第一导电区域和第一绝缘区域之间的边界被布置在第二电流限制层内部的平面内基板的方向。调节与各可氧化层相邻的第一可氧化层和第二可氧化层，使得当在相同的氧化条件下两层被氧化时，第一可氧化层的氧化速率低于第二可氧化层的氧化速率。

69. 发明申请

US20120171790A1 SURFACE EMITTING LASER, METHOD FOR PRODUCING SURFACE EMITTING LASER, AND IMAGE FORMING APPARATUS 有权
标题翻译：表面发射激光，生成表面发射激光的方法和图像形成装置
公开(公告)号：US20120171790A1
公开(公告)日：2012-07-05
申请号：US13413973
申请日：2012-03-07
申请人： Mitsuhiro Ikuta
发明人： Mitsuhiro Ikuta
IPC分类号： H01L33/60
CPC分类号： H01S5/18311 , H01S5/0286 , H01S5/18313 , H01S5/18316 , H01S5/18333 , H01S5/18347 , Y10S257/918
摘要： A surface emitting laser includes a lower multilayer mirror, an active layer, and an upper multilayer mirror stacked onto a substrate. A first current confinement layer having a first electrically conductive region and a first insulating region is formed above or below the active layer using a first trench structure. A second current confinement layer having a second electrically conductive region and a second insulating region is formed above or below the first current confinement layer using a second trench structure. The first and second trench structures extend from a top surface of the upper multilayer mirror towards the substrate such that the second trench structure surrounds the first trench structure. When the surface emitting laser is viewed in an in-plane direction of the substrate, a boundary between the first electrically conductive region and the first insulating region is disposed inside the second electrically conductive region.
摘要翻译：表面发射激光器包括层叠在基板上的下多层反射镜，有源层和上多层反射镜。使用第一沟槽结构在有源层的上方或下方形成具有第一导电区域和第一绝缘区域的第一电流限制层。使用第二沟槽结构在第一电流限制层的上方或下方形成具有第二导电区域和第二绝缘区域的第二电流限制层。第一和第二沟槽结构从上多层反射镜的顶表面延伸到衬底，使得第二沟槽结构围绕第一沟槽结构。当在基板的面内方向上观察表面发射激光时，第一导电区域和第一绝缘区域之间的边界设置在第二导电区域的内部。

70. 发明申请

US20120093188A1 SURFACE EMITTING LASER, SURFACE EMITTING LASER ARRAY, AND OPTICAL APPARATUS HAVING SURFACE EMITTING LASER ARRAY 有权
标题翻译：表面发射激光，表面发射激光阵列和具有表面发射激光阵列的光学装置
公开(公告)号：US20120093188A1
公开(公告)日：2012-04-19
申请号：US13273539
申请日：2011-10-14
申请人： Mitsuhiro Ikuta
发明人： Mitsuhiro Ikuta
IPC分类号： H01S5/026
CPC分类号： H01S5/18391 , B82Y20/00 , H01S5/18311 , H01S5/34326
摘要： There is provided a surface emitting laser allowing a direction of a far-field pattern (FFP) centroid to be inclined from a normal direction of a substrate providing the surface emitting laser, comprising: a substrate; a lower reflecting mirror, an active layer, an upper reflecting mirror stacked on the substrate; and a surface relief structure located in an upper portion of a light emitting surface of the upper reflecting mirror, the surface relief structure being made of a material allowing at least some beams emitted from the surface emitting laser to be transmitted therethrough, a plurality of regions having a predetermined optical thickness in a normal direction of the substrate being formed in contact with other region in an in-plane direction of the substrate, and a distribution of the optical thickness in the in-plane direction of the substrate is asymmetric to a central axis of the light emitting regions.
摘要翻译：提供了允许远场图案（FFP）重心的方向从提供表面发射激光器的基板的法线方向倾斜的表面发射激光器，包括：基板; 下反射镜，有源层，叠层在基板上的上反射镜; 以及表面浮雕结构，其位于上反射镜的发光表面的上部，所述表面浮雕结构由允许从表面发射激光器发射的至少一些光束透射的材料制成，多个区域在基板的法线方向上具有与衬底的面内方向上的其他区域接触的预定光学厚度，并且基板的面内方向上的光学厚度的分布不对称于中心发光区域的轴线。

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