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    • 63. 发明授权
    • Device and method for detecting foreign material on the surface of plasma processing apparatus
    • 用于检测等离子体处理装置表面的异物的装置和方法
    • US07526948B2
    • 2009-05-05
    • US11214963
    • 2005-08-31
    • Hideyuki YamamotoHiromichi EnamiMuneo Furuse
    • Hideyuki YamamotoHiromichi EnamiMuneo Furuse
    • G01N1/08G01M19/00H01L21/66
    • G01N1/24G01N2015/1062H01L21/02057
    • A detection technique for detecting foreign material on the surface of a plasma processing apparatus, capable of accurately sucking/extracting and measuring foreign material contained in the measurement object surface is provided. The detection device comprises a gauge head or probe having a gas blow out opening for intermittently blowing a gas of a predetermined pressure to a measurement object surface and a gas suction opening for sucking foreign material discharged by the gas blown out from the gas blow out opening a particle counter having a suction pump for continuously sucking in a predetermined amount of gas from the gas suction opening for counting the number of foreign material particles contained in the gas sucked by the suction pump and a pressure adjustment unit for intermittently supplying gas of a predetermined pressure to the gas blowing out opening.
    • 提供一种用于检测等离子体处理装置表面上异物的检测技术,其能够精确地吸取/提取和测量包含在测量对象表面中的异物。 检测装置包括具有用于间歇地向测量对象表面吹送预定压力的气体的气体吹出口的测量头或探针,以及用于吸入从气体吹出口吹出的气体排出的异物的吸气口 具有吸入泵的颗粒计数器,用于连续吸入来自吸入口的预定量的气体,用于计数由吸入泵抽吸的气体中包含的异物颗粒的数量;以及压力调节单元,用于间歇地供给预定的 对气体吹出口的压力。
    • 64. 发明申请
    • Device and method for detecting foreign material on the surface of plasma processing apparatus
    • 用于检测等离子体处理装置表面的异物的装置和方法
    • US20070032088A1
    • 2007-02-08
    • US11214963
    • 2005-08-31
    • Hideyuki YamamotoHiromichi EnamiMuneo Furuse
    • Hideyuki YamamotoHiromichi EnamiMuneo Furuse
    • H01L21/302H01L21/461
    • G01N1/24G01N2015/1062H01L21/02057
    • A detection technique for detecting foreign material on the surface of a plasma processing apparatus, capable of accurately sucking/extracting and measuring foreign material contained in the measurement object surface is provided. The detection device comprises a gauge head or probe having a gas blow out opening for intermittently blowing a gas of a predetermined pressure to a measurement object surface and a gas suction opening for sucking foreign material discharged by the gas blown out from the gas blow out opening a particle counter having a suction pump for continuously sucking in a predetermined amount of gas from the gas suction opening for counting the number of foreign material particles contained in the gas sucked by the suction pump and a pressure adjustment unit for intermittently supplying gas of a predetermined pressure to the gas blowing out opening.
    • 提供一种用于检测等离子体处理装置表面上异物的检测技术,其能够精确地吸取/提取和测量包含在测量对象表面中的异物。 检测装置包括具有用于间歇地向测量对象表面吹送预定压力的气体的气体吹出口的测量头或探针,以及用于吸入从气体吹出口吹出的气体排出的异物的吸气口 具有吸入泵的颗粒计数器,用于连续吸入来自吸入口的预定量的气体,用于计数由吸入泵抽吸的气体中包含的异物颗粒的数量;以及压力调节单元,用于间歇地供给预定的 对气体吹出口的压力。
    • 69. 发明授权
    • Arc welding method
    • 电弧焊法
    • US06297473B2
    • 2001-10-02
    • US09389619
    • 1999-09-03
    • Kazuo HiraokaTerumi NakamuraHideyuki Yamamoto
    • Kazuo HiraokaTerumi NakamuraHideyuki Yamamoto
    • B23K912
    • B23K9/173
    • In order to provide a welding system capable of freely controlling dispersion and concentration of arc heat input at a groove face of base material, and ensure melting of the base material while restraining excessive weld heat input, in arc welding using a wire consumable electrode system, at a groove between members to be welded a position of a weld torch or feed speed of a wire is periodically varied, and welding is carried out by controlling a difference between the phase of the variation and a phase of an arc current waveform in accordance with a change in the arc current waveform.
    • 为了提供能够自由地控制在基材的槽面上的电弧热输入的分散和浓度的焊接系统,并且在抑制过多的焊接热输入的同时确保熔融基材,在使用电线消耗电极系统的电弧焊接中, 在要焊接的部件之间的沟槽处,焊枪的位置或焊丝的进给速度周期性地变化,并且通过根据下述方式控制变化的相位与电弧电流波形的相位之间的差来进行焊接 电弧电流波形发生变化。
    • 70. 发明授权
    • Sports posts
    • 体育帖子
    • US6030301A
    • 2000-02-29
    • US981414
    • 1998-02-17
    • Yasuhiro AsadaHideyuki Yamamoto
    • Yasuhiro AsadaHideyuki Yamamoto
    • A63B61/02A63B61/00
    • A63B61/02
    • The present invention relates to sports post for athletics, which are light, tough, easily to set up or taken down. The sports post have two or more fiber reinforced plastic hollow tubes that are fitted and connected together. A screw-type extension and retraction mechanism is built within the posts. The sports posts have a rod shaped member fixed to one hollow tube that passes through the through-hole of an element fixed to another hollow tube. Another embodiment of the present invention includes sports posts in which the reinforcing fiber layer from which the hollow tubes are composed include, a laminate structure of sheet-shaped material. The sports posts include a laminate structure of a sheet shaped material in which the fiber is carbon fiber and filaments thereof are unidirectionally arranged, and of a filament bundle structure layer which can be seen from outside.
    • PCT No.PCT / JP96 / 02899 Sec。 371日期1998年2月17日 102(e)1998年2月17日PCT 1996年4月10日PCT PCT。 WO97 / 38761 PCT出版物 日期:1997年10月23日本发明涉及体育运动员,体力轻,坚韧,易于设置或取下。 运动柱具有两个或更多个被安装并连接在一起的纤维增强塑料中空管。 柱内部装有螺旋式的伸缩机构。 运动柱具有固定到一个中空管的棒状构件,该中空管穿过固定到另一中空管的元件的通孔。 本发明的另一实施例包括其中构成中空管的增强纤维层的运动柱,包括片状材料的层叠结构。 运动柱包括其中纤维是碳纤维并且其单丝单向布置的片状材料的层压结构,以及从外部可以看到的丝束结构层。