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    • 62. 发明授权
    • Electrostatic/electrostrictive actuation of elastomer structures using compliant electrodes
    • 使用柔性电极的弹性体结构的静电/电致伸缩致动
    • US07075162B2
    • 2006-07-11
    • US10232997
    • 2002-08-29
    • Marc Unger
    • Marc Unger
    • H01L29/84
    • H01L21/00B01L3/0241B01L3/5025B01L3/502707B01L3/502738B01L2300/0816B01L2300/0887B01L2400/0481B01L2400/0655F04B43/043F16K99/0001F16K99/0015F16K99/0051F16K99/0053F16K99/0059F16K2099/0074F16K2099/0078F16K2099/008
    • A valve structure includes an elastomeric block formed with first and second microfabricated recesses separated by a membrane portion of the elastomeric block. The valve is actuated by positioning a compliant electrode on a first side of the first recess proximate to and in physical communication with the membrane. Where the valve is to be electrostatically actuated, a second electrode is positioned on a second side of the first recess opposite the first side. Application of a potential difference across the electrodes causes the compliant electrode and the membrane to be attracted into the flow channel. Where the valve is to be electrostrictively actuated, a second electrode is positioned on the same side of the recess as the compliant electrode. Application of a potential difference across the electrodes causes the electrodes to be attracted such that elastomer membrane portion material between them is compressed and bows into the flow channel. Either of the electrostrictively or the electrostatically-actuated valve structures may include an electrically-conducting fluid in the second recess to serve as the compliant electrode.
    • 阀结构包括由弹性块的膜部分隔开的第一和第二微细加工凹部形成的弹性体块。 通过将顺应性电极定位在第一凹部的靠近膜并且与膜物理连通的第一侧上来致动阀。 在阀被静电致动的地方,第二电极位于与第一侧相对的第一凹槽的第二侧上。 在电极之间施加电位差使得柔性电极和膜被吸引到流动通道中。 在阀被电致伸缩的情况下,第二电极位于与顺应性电极相同的凹槽侧。 在电极之间施加电位差导致电极被吸引,使得它们之间的弹性体膜部分材料被压缩并弯曲到流动通道中。 电致伸缩阀或静电致动阀结构中的任何一个可以包括在第二凹槽中用作柔性电极的导电流体。
    • 70. 发明授权
    • Electrostatic/electrostrictive actuation of elastomer structures using compliant electrodes
    • 使用柔性电极的弹性体结构的静电/电致伸缩致动
    • US07291512B2
    • 2007-11-06
    • US11316282
    • 2005-12-21
    • Marc Unger
    • Marc Unger
    • H01L21/00
    • H01L21/00B01L3/0241B01L3/5025B01L3/502707B01L3/502738B01L2300/0816B01L2300/0887B01L2400/0481B01L2400/0655F04B43/043F16K99/0001F16K99/0015F16K99/0051F16K99/0053F16K99/0059F16K2099/0074F16K2099/0078F16K2099/008
    • A valve structure comprises an elastomeric block formed with first and second microfabricated recesses separated by a membrane portion of the elastomeric block. The valve is actuated by positioning a compliant electrode on a first side of the first recess proximate to and in physical communication with the membrane. Where the valve is to be electrostatically actuated, a second electrode is positioned on a second side of the first recess opposite the first side. Application of a potential difference across the electrodes causes the compliant electrode and the membrane to be attracted into the flow channel. Where the valve is to be electrostrictively actuated, a second electrode is positioned on the same side of the recess as the compliant electrode. Application of a potential difference across the electrodes causes the electrodes to be attracted such that elastomer membrane portion material between them is compressed and bows into the flow channel. Either of the electrostrictively or the electrostatically-actuated valve structures may include an electrically-conducting fluid in the second recess to serve as the compliant electrode.
    • 阀结构包括由弹性体块的膜部分分开的第一和第二微细加工凹部形成的弹性体块。 通过将顺应性电极定位在第一凹部的靠近膜并且与膜物理连通的第一侧上来致动阀。 在阀被静电致动的地方,第二电极位于与第一侧相对的第一凹槽的第二侧上。 在电极之间施加电位差使得柔性电极和膜被吸引到流动通道中。 在阀被电致伸缩的情况下,第二电极位于与顺应性电极相同的凹槽侧。 在电极之间施加电位差导致电极被吸引,使得它们之间的弹性体膜部分材料被压缩并弯曲到流动通道中。 电致伸缩阀或静电致动阀结构中的任何一个可以包括在第二凹槽中用作柔性电极的导电流体。