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61. 发明授权

US06513898B1 Integrated inkjet print head and manufacturing process thereof 失效
标题翻译：集成喷墨打印头及其制造工艺
公开(公告)号：US06513898B1
公开(公告)日：2003-02-04
申请号：US09103016
申请日：1998-06-23
申请人： Benedetto Vigna , Riccardo Maggi
发明人： Benedetto Vigna , Riccardo Maggi
IPC分类号： B41J29393
CPC分类号： B41J2/1603 , B41J2/125 , B41J2/14129 , B41J2/14153 , B41J2/164 , B41J2002/14354 , B41J2202/13
摘要： An inkjet print head includes an ink drop emission mini-gun and a drop emission sensor integrated in a chip of semiconductor material. The mini-gun is formed by an ink chamber and a nozzle in communication with the ink chamber and the drop emission sensor includes a resistive element arranged in a position adjacent to the ink chamber. The resistance of the resistive element depends on the pressure exerted thereon, so that when the mini-gun emits an ink drop, it is subjected to a recoil movement which causes a change of pressure and hence of resistance in the resistive element; this change in resistance may be detected through suitable circuitry to identify whether and when a drop of ink has been emitted.
摘要翻译：喷墨打印头包括集成在半导体材料芯片中的墨滴发射微型枪和液滴发射传感器。微型枪由墨水室和与墨水室连通的喷嘴形成，并且液滴发射传感器包括布置在与墨水腔相邻的位置的电阻元件。电阻元件的电阻取决于施加在其上的压力，使得当微型枪发射墨滴时，其受到反冲运动，其导致电阻元件中的压力变化并因此导致电阻的变化; 可以通过合适的电路来检测电阻的这种变化，以识别是否和何时已经发射一滴墨水。

62. 发明授权

US06469330B1 Process for manufacturing integrated devices comprising microstructures and associated suspended electrical interconnections 有权
标题翻译：用于制造包括微结构和相关联的悬挂电互连的集成器件的工艺
公开(公告)号：US06469330B1
公开(公告)日：2002-10-22
申请号：US09422049
申请日：1999-10-20
申请人： Benedetto Vigna , Ubaldo Mastromatteo
发明人： Benedetto Vigna , Ubaldo Mastromatteo
IPC分类号： H01L2720
CPC分类号： H01L23/4821 , H01L23/5221 , H01L2924/0002 , H01L2924/00
摘要： An integrated device comprises an epitaxial layer forming a first and a second region separated by at least one air gap. The first region forms, for example, a suspended mass of an accelerometer. A bridge element extends on the air gap and has a suspended electrical connection line electrically connecting the first and the second region and a protective structure of etch-resistant material, which surrounds the electrical connection line on all sides. The protective structure is formed by a lower portion of silicon nitride and an upper portion of silicon carbide, the silicon carbide surrounding the electrical connection line at the upper and lateral sides.
摘要翻译：集成器件包括形成由至少一个气隙隔开的第一和第二区域的外延层。第一区域形成例如加速度计的悬挂质量。桥接元件在气隙上延伸并且具有电连接第一和第二区域的悬挂电连接线以及围绕所有侧面的电连接线的耐蚀刻材料的保护结构。保护结构由氮化硅的下部和碳化硅的上部形成，碳化硅在上侧和外侧围绕电连接线。

63. 发明授权

US06446326B1 Method for manufacturing a hard disk read/write unit, with micrometric actuation 有权
标题翻译：制造硬盘读/写单元的方法，具有微动作动
公开(公告)号：US06446326B1
公开(公告)日：2002-09-10
申请号：US09305862
申请日：1999-05-05
申请人： Ubaldo Mastromatteo , Bruno Murari , Benedetto Vigna , Sarah Zerbini
发明人： Ubaldo Mastromatteo , Bruno Murari , Benedetto Vigna , Sarah Zerbini
IPC分类号： G11B5127
CPC分类号： H02N1/006 , G11B5/5552 , G11B5/58 , Y10T29/49027 , Y10T29/49032 , Y10T29/49052 , Y10T29/49053
摘要： The method comprises the steps of: forming an integrated device including a microactuator in a semiconductor material wafer; forming an immobilization structure of organic material on the wafer; simultaneously forming a securing flange integral with the microactuator and electrical connections for connecting the integrated device to a read/write head; bonding a transducer supporting the read/write head to the securing flange; connecting the electrical connections to the read/write head; cutting the wafer into dices; bonding the microactuator to a suspension; and removing the immobilization structure.
摘要翻译：该方法包括以下步骤：在半导体材料晶片中形成包括微致动器的集成器件; 在晶片上形成有机材料的固定结构; 同时形成与微致动器一体的固定凸缘和用于将集成装置连接到读/写头的电连接; 将支撑读/写头的换能器接合到固定凸缘; 将电气连接连接到读/写头; 将晶片切成骰子; 将微致动器粘合到悬浮液上; 并去除固定结构。

64. 发明授权

US06405592B1 Hermetically-sealed sensor with a movable microstructure 失效
标题翻译：密封传感器具有可移动的微结构
公开(公告)号：US06405592B1
公开(公告)日：2002-06-18
申请号：US09100838
申请日：1998-06-19
申请人： Bruno Murari , Benedetto Vigna , Paolo Ferrari
发明人： Bruno Murari , Benedetto Vigna , Paolo Ferrari
IPC分类号： G01P102
CPC分类号： B81C1/0023 , G01P1/02 , G01P15/0802
摘要： A sensor with a movable microstructure including a sensitive element, formed in a first chip of semiconductor material for producing an electrical signal dependent on a movement of at least one movable microstructure relative to a surface of the first chip. The sensitive element is enclosed in a hollow hermetic structure, and circuitry for processing the electrical signal is formed in a second chip of semiconductor material. The hollow hermetic structure includes a metal wall disposed on the surface of the first chip around the sensitive element, and the second chip is fixed to the metal wall.
摘要翻译：一种具有可移动微结构的传感器，包括敏感元件，其形成在半导体材料的第一芯片中，用于根据至少一个可移动微结构相对于第一芯片的表面的运动产生电信号。敏感元件封闭在中空密封结构中，并且用于处理电信号的电路形成在半导体材料的第二芯片中。中空密封结构包括设置在敏感元件周围的第一芯片的表面上的金属壁，第二芯片固定在金属壁上。

65. 发明授权

US06259584B1 Integrated device comprising a semiconductor material microactuator, in particular for a hard disk read/write head 有权
标题翻译：集成器件包括半导体材料微致动器，特别是用于硬盘读/写头
公开(公告)号：US06259584B1
公开(公告)日：2001-07-10
申请号：US09357443
申请日：1999-07-20
申请人： Dario Cini , Benedetto Vigna
发明人： Dario Cini , Benedetto Vigna
IPC分类号： G11B2102
CPC分类号： G11B21/02 , H02N1/006
摘要： A microactuator comprises an outer stator and an inner rotor electrostatically coupled to a stator. The rotor comprises a suspended mass with a substantially circular shape, and a plurality of mobile arms extending radially towards the exterior, starting from the suspended mass. The stator has a plurality of pairs of fixed arms extending radially to the suspended mass, a respective mobile arm being arranged between each pair of fixed arms. The fixed arms are divided into fixed drive arms connected to a drive stage for actuating the microactuator, and into fixed measure arms connected to a measure stage, and define a capacitive uncoupling structure.
摘要翻译：微型致动器包括外部定子和静电耦合到定子的内部转子。转子包括具有大致圆形形状的悬挂质量和从悬挂质量开始的径向向外延伸的多个移动臂。定子具有多个径向延伸到悬挂质量块的固定臂，相应的可动臂布置在每对固定臂之间。固定臂被分成固定的驱动臂，连接到用于致动微型致动器的驱动级，并且连接到测量台的固定的测量臂中，并且限定了电容解耦结构。

66. 发明授权

US06248609B1 Integrated semiconductor device comprising a chemoresistive gas microsensor and manufacturing process thereof 有权
标题翻译：一种集成半导体器件，包括化学耐化学气体微传感器及其制造方法
公开(公告)号：US06248609B1
公开(公告)日：2001-06-19
申请号：US09506414
申请日：2000-02-17
申请人： Benedetto Vigna , Paolo Ferrari , Ubaldo Mastromatteo
发明人： Benedetto Vigna , Paolo Ferrari , Ubaldo Mastromatteo
IPC分类号： H01L2100
CPC分类号： G01N27/12
摘要： An integrated semiconductor device comprises, reciprocally superimposed, a thermally insulating region; a thermal conduction region of a high thermal conductivity material; a passivation oxide layer; and a gas sensitive element. The thermal conduction region defines a preferential path towards the gas sensitive element for the heat generated by the heater element, thereby the heat dispersed towards the substrate is negligible during the operation of the device.
摘要翻译：集成半导体器件包括相互叠加的绝热区域; 高导热性材料的导热区域; 钝化氧化物层; 和气体敏感元件。热传导区域限定朝向气体敏感元件的优先路径，用于由加热器元件产生的热量，从而在器件的操作期间向基板分散的热量可忽略。

67. 发明授权

US06198145B1 Method for manufacturing a semiconductor material integrated microactuator, in particular for a hard disc mobile read/write head, and a microactuator obtained thereby 有权
公开(公告)号：US06198145B1
公开(公告)日：2001-03-06
申请号：US09181717
申请日：1998-10-28
申请人： Paolo Ferrari , Benedetto Vigna
发明人： Paolo Ferrari , Benedetto Vigna
IPC分类号： H01L2982
CPC分类号： H02N1/006
摘要： The integrated microactuator has a stator and a rotor having a circular extension with radial arms which support electrodes extending in a substantially circumferential direction and interleaved with one another. For the manufacture, first a sacrificial region is formed on a silicon substrate; an epitaxial layer is then grown; the circuitry electronic components and the biasing conductive regions are formed; subsequently a portion of substrate beneath the sacrificial region is removed, forming an aperture extending through the entire substrate; the epitaxial layer is excavated to define and separate from one another the rotor and the stator, and finally the sacrificial region is removed to release the mobile structures from the remainder of the chip.

68. 发明授权

US6153875A Optical two-dimensional position sensor in a control device for automotive applications 失效
标题翻译：用于汽车应用的控制装置中的光学二维位置传感器
公开(公告)号：US6153875A
公开(公告)日：2000-11-28
申请号：US85534
申请日：1998-05-27
申请人： Flavio Francesco Villa , Benedetto Vigna , Paolo Ferrari
发明人： Flavio Francesco Villa , Benedetto Vigna , Paolo Ferrari
IPC分类号： G01D5/34
CPC分类号： G01D5/34
摘要： An optical two-dimensional position sensor including a selective optical unit which faces, and is displaceable relative to, an integrated device. The selective optical unit is formed by a polarized light source and a filter with four quadrants which permits passage of light through two quadrants only. The selective optical unit is attached to a control lever such as to translate in a plane along a first direction and a second direction, and to pivot around an axis which is orthogonal to the preceding directions. In a transparent package, the integrated device comprises a first group of sensor elements which are spaced along the first direction, a second group of sensor elements which are spaced along the second direction and a third group of sensor elements which detect an angular position of the selective optical unit. Electronics which are integrated with the sensor elements generates a code which is associated with each position which is assumed by the selective optical unit and a control signal which corresponds to a function to be performed.
摘要翻译：一种光学二维位置传感器，包括面向并可相对于集成装置移位的选择性光学单元。选择性光学单元由偏振光源和具有四个象限的滤光片形成，其允许光仅通过两个象限。选择性光学单元附接到控制杆，例如沿着第一方向和第二方向在平面中平移，并且围绕与前述方向正交的轴线枢转。在透明封装中，集成器件包括沿着第一方向间隔开的第一组传感器元件，沿着第二方向间隔开的第二组传感器元件，以及第三组传感器元件，其检测选择光学单元。与传感器元件集成的电子产生与由选择性光学单元所假设的每个位置相关联的代码和对应于要执行的功能的控制信号。

69. 发明授权

US6109106A Process for manufacturing high-sensitivity accelerometric and gyroscopic integrated sensors, and sensor thus produced 失效
标题翻译：用于制造高灵敏度加速度和陀螺仪集成传感器的过程以及由此产生的传感器
公开(公告)号：US6109106A
公开(公告)日：2000-08-29
申请号：US126625
申请日：1998-07-30
申请人： Paolo Ferrari , Benedetto Vigna , Pietro Montanini , Marco Ferrera
发明人： Paolo Ferrari , Benedetto Vigna , Pietro Montanini , Marco Ferrera
IPC分类号： G01P9/04 , B81B3/00 , G01C19/56 , G01P15/08 , G01P15/125 , H01L21/762 , H01L21/764 , H01L41/08
CPC分类号： H01L21/764 , B81C1/00246 , G01P15/0802 , G01P15/125 , H01L21/76202 , B81B2201/0235 , B81B2201/0242 , B81C2201/0109 , B81C2201/0177 , B81C2203/0735 , B81C2203/0778 , G01P2015/0814
摘要： A movable mass forming a seismic mass is formed starting from an epitaxial layer and is covered by a weighting region of tungsten which has high density. To manufacture the mass, buried conductive regions are formed in the substrate. Then, at the same time, a sacrificial region is formed in the zone where the movable mass is to be formed and oxide insulating regions are formed on the buried conductive regions so as to partially cover them. An epitaxial layer is then grown, using a nucleus region. A tungsten layer is deposited and defined and, using a silicon carbide layer as mask, the suspended structure is defined. Finally, the sacrificial region is removed, forming an air gap.
摘要翻译：从外延层开始形成形成地震质量块的移动体，并且由具有高密度的钨的加权区域覆盖。为了制造质量，在衬底中形成掩埋的导电区域。然后，同时，在要形成可移动物体的区域中形成牺牲区域，并且在掩埋的导电区域上形成氧化物绝缘区域，以便部分地覆盖它们。然后使用核区域生长外延层。沉积和限定钨层，并且使用碳化硅层作为掩模，限定悬浮结构。最后，去除牺牲区域，形成气隙。

70. 发明授权

US6003374A Acceleration sensor and a method for its manufacture 失效
标题翻译：加速度传感器及其制造方法
公开(公告)号：US6003374A
公开(公告)日：1999-12-21
申请号：US925599
申请日：1997-09-08
申请人： Benedetto Vigna , Paolo Ferrari , Ubaldo Mastromatteo
发明人： Benedetto Vigna , Paolo Ferrari , Ubaldo Mastromatteo
IPC分类号： G01P15/125 , B81B3/00 , B81C1/00 , G01P15/11 , H01L29/84
CPC分类号： G01P15/11
摘要： An acceleration sensor is described which is formed by planar technology on a substrate. It includes a core of ferromagnetic material and, coupled conductively together by the core, a first winding adapted to be connected to a power supply and a second winding adapted to be connected to circuit means for measuring an electrical magnitude induced therein. The core has two suspended portions which are free to bend as a result of an inertial force due to an accelerative movement of the sensor itself. The bending causes lengthening of the core and hence a variation in the reluctance of the magnetic circuit. If a constant current is supplied to the first winding, a voltage is induced in the second winding as a result of the variation in the magnetic flux caused by the variation in reluctance.
摘要翻译：描述了通过在基板上的平面技术形成的加速度传感器。它包括一个铁磁材料的核心，并且通过芯体导电地耦合在一起，适于连接到电源的第一绕组和适于连接到电路装置的第二绕组，该电路装置用于测量在其中感应的电气量。芯具有由于传感器本身的加速运动而由于惯性力而自由弯曲的两个悬挂部分。弯曲导致芯的延长，从而导致磁路的磁阻变化。如果向第一绕组提供恒定电流，则由于磁阻变化引起的磁通量的变化，在第二绕组中产生电压。

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