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    • 61. 发明授权
    • Dual-pixel full color CMOS imager
    • 双像素全彩CMOS成像仪
    • US07759756B2
    • 2010-07-20
    • US12025618
    • 2008-02-04
    • Jong-Jan LeeSakae WadaSheng Teng Hsu
    • Jong-Jan LeeSakae WadaSheng Teng Hsu
    • H01L31/00H01L31/062H01L31/113
    • H01L27/14647H01L27/14689
    • A dual-pixel full color complementary metal oxide semiconductor (CMOS) imager is provided, along with an associated fabrication process. Two stand-alone pixels are used for three-color detection. The first pixel is a single photodiode, and the second pixel has two photodiodes built in a stacked structure. The two photodiode stack includes an n doped substrate, a bottom photodiode, and a top photodiode. The bottom photodiode has a bottom p doped layer overlying the substrate and a bottom n doped layer cathode overlying the bottom p doped layer. The top photodiode has a top p doped layer overlying the bottom n doped layer and a top n doped layer cathode overlying the top p doped layer. The single photodiode includes the n doped substrate, a p doped layer overlying the substrate, and an n doped layer cathode overlying the p doped layer.
    • 提供了双像素全色互补金属氧化物半导体(CMOS)成像器,以及相关的制造工艺。 两个独立像素用于三色检测。 第一像素是单个光电二极管,第二像素具有以堆叠结构内置的两个光电二极管。 两个光电二极管堆叠包括n掺杂衬底,底部光电二极管和顶部光电二极管。 底部光电二极管具有覆盖衬底的底部p掺杂层和覆盖底部p掺杂层的底部n掺杂层阴极。 顶部光电二极管具有覆盖底部n掺杂层的顶部p掺杂层和覆盖顶部p掺杂层的顶部n掺杂层阴极。 单个光电二极管包括n掺杂衬底,覆盖衬底的p掺杂层和覆盖p掺杂层的n掺杂层阴极。
    • 62. 发明授权
    • Compound semiconductor-on-silicon wafer with a silicon nanowire buffer layer
    • 具有硅纳米线缓冲层的复合半导体硅片
    • US07723729B2
    • 2010-05-25
    • US12036396
    • 2008-02-25
    • Tingkai LiSheng Teng Hsu
    • Tingkai LiSheng Teng Hsu
    • H01L31/0312H01L29/20H01L29/06
    • H01L29/0665B82Y10/00H01L21/02381H01L21/02433H01L21/02447H01L21/0245H01L21/02502H01L21/0254H01L21/02546H01L21/02639H01L21/0265H01L29/045H01L29/0673
    • A compound semiconductor-on-silicon (Si) wafer with a Si nanowire buffer layer is provided, along with a corresponding fabrication method. The method forms a Si substrate. An insulator layer is formed overlying the Si substrate, with Si nanowires having exposed tips. Compound semiconductor is selectively deposited on the Si nanowire tips. A lateral epitaxial overgrowth (LEO) process grows compound semiconductor from the compound semiconductor-coated Si nanowire tips, to form a compound semiconductor layer overlying the insulator. Typically, the insulator layer overlying the Si substrate is a thermally soft insulator (TSI), silicon dioxide, or SiXNY, where x≦3 and Y≦4. The compound semiconductor can be GaN, GaAs, GaAlN, or SiC. In one aspect, the Si nanowire tips are carbonized, and SiC is selectively deposited overlying the carbonized Si nanowire tips, prior to the selective deposition of compound semiconductor on the Si nanowire tips.
    • 提供了具有Si纳米线缓冲层的化合物半导体硅(Si)晶片以及相应的制造方法。 该方法形成Si衬底。 在Si衬底上形成绝缘体层,Si纳米线具有暴露的尖端。 化合物半导体选择性沉积在Si纳米线尖端上。 横向外延生长(LEO)工艺从化合物半导体涂覆的Si纳米线尖端生长化合物半导体,以形成覆盖绝缘体的化合物半导体层。 通常,覆盖Si衬底的绝缘体层是热软绝缘体(TSI),二氧化硅或SiXNY,其中x和nlE; 3和Y和nlE; 4。 化合物半导体可以是GaN,GaAs,GaAlN或SiC。 在一个方面,将Si纳米线尖端碳化,并且在Si纳米线尖端上选择性沉积化合物半导体之前,选择性地将SiC沉积在碳化Si纳米线尖端上。
    • 63. 发明授权
    • High energy implant photodiode stack
    • 高能注入光电二极管叠层
    • US07651883B2
    • 2010-01-26
    • US11801320
    • 2007-05-09
    • Jong-Jan LeeDouglas J. TweetSheng Teng Hsu
    • Jong-Jan LeeDouglas J. TweetSheng Teng Hsu
    • H01L21/00
    • H01L27/14647H01L27/1463H01L27/14689
    • An array of fully isolated multi-junction complimentary metal-oxide-semiconductor (CMOS) filterless color imager cells is provided, with a corresponding fabrication process. The color imager cell array is formed from a bulk silicon (Si) substrate without an overlying epitaxial Si layer. A plurality of color imager cells are formed in the bulk Si substrate, where each color imager cell includes a photodiode set and a U-shaped well liner. The photodiode set includes first, second, and third photodiode formed as a stacked multi-junction structure, while the U-shaped well liner fully isolates the photodiode set from adjacent photodiode sets in the array. The U-shaped well liner includes a physically interfacing doped well liner bottom and first wall. The well liner bottom is interposed between the substrate and the photodiode set, and the first wall physically interfaces each doped layer of each photodiode in the photodiode set.
    • 提供了完全隔离的多结互补金属氧化物半导体(CMOS)无滤膜彩色成像器单元的阵列,具有相应的制造工艺。 彩色成像器单元阵列由体硅(Si)衬底形成,而不具有上覆的外延Si层。 在本体Si衬底中形成多个彩色成像器单元,其中每个彩色成像器单元包括光电二极管组和U形衬管。 光电二极管组包括形成为堆叠多结结构的第一,第二和第三光电二极管,而U形阱衬套将光电二极管组与阵列中的相邻光电二极管组完全隔离。 U形井衬管包括物理接口掺杂的井筒底部和第一壁。 阱衬底位于衬底和光电二极管组之间,并且第一壁物理地连接光电二极管组中每个光电二极管的每个掺杂层。
    • 66. 发明申请
    • IrOx Nanostructure Electrode Neural Interface Optical Device
    • IrOx纳米结构电极神经界面光学器件
    • US20090024182A1
    • 2009-01-22
    • US12240501
    • 2008-09-29
    • Fengyan ZhangSheng Teng Hsu
    • Fengyan ZhangSheng Teng Hsu
    • A61N1/36
    • C30B25/00A61N1/0543B82Y5/00B82Y10/00B82Y30/00C30B29/16C30B29/605Y10S977/811Y10S977/904Y10S977/932
    • An optical device with an iridium oxide (IrOx) electrode neural interface, and a corresponding fabrication method are provided. The method provides a substrate and forms a first conductive electrode overlying the substrate. A photovoltaic device having a first electrical interface is connected to the first electrode. A second electrical interface of the photovoltaic device is connected to a second conductive electrode formed overlying the photovoltaic device. An array of neural interface single-crystal IrOx nanostructures are formed overlying the second electrode, where x≦4. The IrOx nanostructures can be partially coated with an electrical insulator, such as SiO2, SiN, TiO2, or spin on glass (SOG), leaving the IrOx distal ends exposed. In one aspect, a buffer layer is formed overlying the second electrode surface, made from a material such as LiNbO3, LiTaO3, or SA, for the purpose of orienting the growth direction of the IrOx nanostructures.
    • 提供了具有氧化铱(IrOx)电极神经接口的光学器件及相应的制造方法。 该方法提供了一个衬底并且形成了覆盖衬底的第一导电电极。 具有第一电接口的光电器件连接到第一电极。 光电器件的第二电接口连接到形成在光伏器件上的第二导电电极。 形成了覆盖第二电极的神经界面单晶IrOx纳米结构阵列,其中x <= 4。 IrOx纳米结构可以部分地涂覆有电绝缘体,例如SiO 2,SiN,TiO 2或旋转玻璃(SOG),留下IrOx远端暴露。 在一个方面,为了定向IrOx纳米结构的生长方向,形成了由诸如LiNbO 3,LiTaO 3或SA的材料制成的第二电极表面上的缓冲层。