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61. 外观设计

USD921159S1 Faucet 有权
公开(公告)号：USD921159S1
公开(公告)日：2021-06-01
申请号：US29705096
申请日：2019-09-10
申请人： Xiao Yang
设计人： Xiao Yang

62. 发明申请

US20120171623A1 FABRICATION OF A HIGH FILL RATIO SILICON SPATIAL LIGHT MODULATOR 有权
标题翻译：高比例硅太阳能光调制器的制造
公开(公告)号：US20120171623A1
公开(公告)日：2012-07-05
申请号：US13418186
申请日：2012-03-12
申请人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , Howard Woo
发明人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , Howard Woo
IPC分类号： B05D5/06 , G03F7/20 , B05D5/12
CPC分类号： G02B26/0841
摘要： A method for forming an optical deflection device includes providing a semiconductor substrate comprising an upper surface region and a plurality of drive devices within one or more portions of the semiconductor substrate. The upper surface region includes one or more patterned structure regions and at least one open region to expose a portion of the upper surface region to form a resulting surface region. The method also includes forming a planarizing material overlying the resulting surface region to fill the at least one open region and cause formation of an upper planarized layer using the fill material. The method further includes forming a thickness of silicon material at a temperature of less than 300° C. to maintain a state of the planarizing material.
摘要翻译：一种形成光偏转装置的方法包括提供半导体衬底的一个或多个部分内包括上表面区域和多个驱动装置的半导体衬底。上表面区域包括一个或多个图案化结构区域和至少一个开放区域，以暴露上表面区域的一部分以形成所得表面区域。该方法还包括形成覆盖所得表面区域的平坦化材料以填充至少一个开放区域，并且使用填充材料形成上部平坦化层。该方法还包括在小于300℃的温度下形成硅材料的厚度以保持平坦化材料的状态。

63. 发明授权

US08159740B2 Fabrication of a high fill ratio silicon spatial light modulator 有权
标题翻译：高填充率硅空间光调制器的制造
公开(公告)号：US08159740B2
公开(公告)日：2012-04-17
申请号：US12690878
申请日：2010-01-20
申请人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , Howard Woo
发明人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , Howard Woo
IPC分类号： G02B26/08 , G02B26/00 , G02F1/29
CPC分类号： G02B26/0841
摘要： A method for forming an optical deflection device includes providing a semiconductor substrate comprising an upper surface region and a plurality of drive devices within one or more portions of the semiconductor substrate. The upper surface region includes one or more patterned structure regions and at least one open region to expose a portion of the upper surface region to form a resulting surface region. The method also includes forming a planarizing material overlying the resulting surface region to fill the at least one open region and cause formation of an upper planarized layer using the fill material. The method further includes forming a thickness of silicon material at a temperature of less than 300° C. to maintain a state of the planarizing material.
摘要翻译：一种形成光偏转装置的方法包括提供半导体衬底的一个或多个部分内包括上表面区域和多个驱动装置的半导体衬底。上表面区域包括一个或多个图案化结构区域和至少一个开放区域，以暴露上表面区域的一部分以形成所得表面区域。该方法还包括形成覆盖所得表面区域的平坦化材料以填充至少一个开放区域，并且使用填充材料形成上部平坦化层。该方法还包括在小于300℃的温度下形成硅材料的厚度以保持平坦化材料的状态。

64. 发明申请

US20110111544A1 MEMS MIRROR SYSTEM FOR LASER PRINTING APPLICATIONS 有权
标题翻译：用于激光打印应用的MEMS镜面系统
公开(公告)号：US20110111544A1
公开(公告)日：2011-05-12
申请号：US13009964
申请日：2011-01-20
申请人： Xiao Yang , William Spencer Worley, III , Dongmin Chen , Ye Wang
发明人： Xiao Yang , William Spencer Worley, III , Dongmin Chen , Ye Wang
IPC分类号： H01L21/02
CPC分类号： G02B26/0841 , B41J2/471 , G02B26/105
摘要： A MEMS mirror for a laser printing application includes providing a CMOS substrate including a pair of electrodes, and providing a reflecting mirror moveable over the substrate and the electrodes. Voltages applied to the electrodes create an electrostatic force causing an end of the mirror to be attracted to the substrate. A precise position of the mirror can be detected and controlled by sensing a change in capacitance between the mirror ends and the underlying electrodes.
摘要翻译：用于激光打印应用的MEMS镜包括提供包括一对电极的CMOS衬底，以及提供可移动到衬底和电极上的反射镜。施加到电极的电压产生静电力，导致反射镜的一端被吸引到基板。可以通过感测镜端和底层电极之间的电容变化来检测和控制反射镜的精确位置。

65. 发明申请

US20100231595A1 LARGE SCALE DATA VISUALIZATION WITH INTERACTIVE CHART 有权
标题翻译：大规模数据可视化与交互式图
公开(公告)号：US20100231595A1
公开(公告)日：2010-09-16
申请号：US12404102
申请日：2009-03-13
申请人： Yingnong Dang , Min Wang , Xiao Yang , Dongmei Zhang , Jian Wang
发明人： Yingnong Dang , Min Wang , Xiao Yang , Dongmei Zhang , Jian Wang
IPC分类号： G06T11/20 , G06F3/048
CPC分类号： G06F17/30554 , G06F17/30592 , G06F17/30994
摘要： This disclosure describes a user interface and techniques for an interactive graphical representation of large scale data on a display. The disclosure describes how large scale data may be viewed using multiple linked charts. In one implementation, a user interface comprises an overview chart. The user may use chart controller(s) to designate one or more portions of the overview chart viewable in subsequent charts. The user may navigate between the overview chart and the subsequent charts using the chart controller(s).
摘要翻译：本公开描述了用于在显示器上用于大规模数据的交互式图形表示的用户界面和技术。本公开描述了如何使用多个链接图来查看大规模数据。在一个实现中，用户界面包括概览图。用户可以使用图表控制器指定后续图表中可见的概览图表的一个或多个部分。用户可以使用图表控制器在概览图表和后续图表之间导航。

66. 发明授权

US07671461B2 Method and system for hermetically sealing packages for optics 有权
标题翻译：用于光学封装封装的方法和系统
公开(公告)号：US07671461B2
公开(公告)日：2010-03-02
申请号：US11560784
申请日：2006-11-16
申请人： Xiao Yang , Dongmin Chen
发明人： Xiao Yang , Dongmin Chen
IPC分类号： H01L23/22
CPC分类号： H01L21/50 , G02B26/0833 , H01L27/14618 , H01L27/14621 , H01L31/0203 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2924/01021 , H01L2924/01079 , H01L2924/01322 , H01L2924/10253 , H01L2924/1461 , H01L2924/15311 , H01L2924/16195 , H01L2924/181 , H01L2924/3025 , Y10T156/1092 , Y10T156/1093 , H01L2924/00014 , H01L2924/00 , H01L2924/00012
摘要： A system for hermetically sealing devices. The system includes a substrate, which includes a plurality of individual chips. Each of the chips includes a plurality of devices and each of the chips are arranged in a spatial manner as a first array. The system also includes a transparent member of a predetermined thickness, which includes a plurality of recessed regions arranged in a spatial manner as a second array and each of the recessed regions are bordered by a standoff region. The substrate and the transparent member are aligned in a manner to couple each of the plurality of recessed regions to a respective one of said plurality of chips. Each of the chips within one of the respective recessed regions is hermetically sealed by contacting the standoff region of the transparent member to the plurality of first street regions and second street regions using at least a bonding process to isolate each of the chips within one of the recessed regions.
摘要翻译：一种密封装置的系统。该系统包括基板，其包括多个独立的芯片。每个芯片包括多个器件，并且每个芯片以空间方式布置为第一阵列。该系统还包括预定厚度的透明构件，其包括以空间方式布置为第二阵列的多个凹陷区域，并且每个凹陷区域由分隔区域界定。衬底和透明构件以将多个凹陷区域中的每一个耦合到所述多个芯片中的相应一个芯片的方式排列。通过使用至少粘合工艺将透明构件的支架区域与多个第一街道区域和第二街道区域接触来隔离各个凹陷区域之一内的每个芯片，凹陷区域。

67. 发明授权

US07453624B2 Projection display system including a high fill ratio silicon spatial light modulator 有权
标题翻译：投影显示系统包括高填充率硅空间光调制器
公开(公告)号：US07453624B2
公开(公告)日：2008-11-18
申请号：US11448537
申请日：2006-06-05
申请人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , William Spencer Worley, III , Dongmin Chen , Howard Woo
发明人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , William Spencer Worley, III , Dongmin Chen , Howard Woo
IPC分类号： G02B26/00
CPC分类号： G02B26/0841
摘要： A display system includes a light source and a first optical system coupled to the light source and adapted to provide an illumination beam along an illumination path. The display system also includes a spatial light modulator positioned in the illumination path. The spatial light modulator includes a semiconductor substrate including a plurality of electrode devices and a hinge structure coupled to the semiconductor substrate. The hinge structure includes silicon material. The spatial light modulator also includes a mirror post coupled to the hinge structure and extending to a predetermined distance from the semiconductor substrate and a mirror plate coupled to the mirror post and overlying the plurality of electrode devices. The display system further includes a second optical system coupled to the spatial light modulator and adapted to project an image onto a projection surface.
摘要翻译：显示系统包括光源和耦合到光源并适于沿照明路径提供照明光束的第一光学系统。显示系统还包括位于照明路径中的空间光调制器。空间光调制器包括包括多个电极器件和耦合到半导体衬底的铰链结构的半导体衬底。铰链结构包括硅材料。空间光调制器还包括耦合到铰链结构并且延伸到半导体衬底预定距离的镜柱和耦合到镜柱并且覆盖多个电极器件的镜板。显示系统还包括耦合到空间光调制器并适于将图像投影到投影表面上的第二光学系统。

68. 发明申请

US20070128818A1 METHOD AND SYSTEM FOR HERMETICALLY SEALING PACKAGES FOR OPTICS 有权
标题翻译：用于光学封装封装的方法和系统
公开(公告)号：US20070128818A1
公开(公告)日：2007-06-07
申请号：US11672114
申请日：2007-02-07
申请人： Xiao Yang , Dongmin Chen
发明人： Xiao Yang , Dongmin Chen
IPC分类号： H01L21/00 , B32B37/00 , H01L21/331
CPC分类号： H01L21/50 , G02B26/0833 , H01L27/14618 , H01L27/14621 , H01L31/0203 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2924/01021 , H01L2924/01079 , H01L2924/01322 , H01L2924/10253 , H01L2924/1461 , H01L2924/15311 , H01L2924/16195 , H01L2924/181 , H01L2924/3025 , Y10T156/1092 , Y10T156/1093 , H01L2924/00014 , H01L2924/00 , H01L2924/00012
摘要： A system for hermetically sealing devices includes a substrate, which includes a plurality of individual chips. Each of the chips includes a plurality of devices and each of the chips are arranged in a spatial manner as a first array. The system also includes a transparent member of a predetermined thickness, which includes a plurality of recessed regions arranged in a spatial manner as a second array and each of the recessed regions are bordered by a standoff region. The substrate and the transparent member are aligned in a manner to couple each of the plurality of recessed regions to a respective one of said plurality of chips. Each of the chips within one of the respective recessed regions is hermetically sealed by contacting the standoff region of the transparent member to the plurality of first street regions and second street regions using at least a bonding process to isolate each of the chips within one of the recessed regions.
摘要翻译：用于密封装置的系统包括：基板，其包括多个独立的芯片。每个芯片包括多个器件，并且每个芯片以空间方式布置为第一阵列。该系统还包括预定厚度的透明构件，其包括以空间方式布置为第二阵列的多个凹陷区域，并且每个凹陷区域由分隔区域界定。衬底和透明构件以将多个凹陷区域中的每一个耦合到所述多个芯片中的相应一个芯片的方式排列。通过使用至少粘合工艺将透明构件的支架区域与多个第一街道区域和第二街道区域接触来将每个凹进区域内的每个芯片密封，凹陷区域。

69. 发明申请

US20070128771A1 METHOD AND STRUCTURE FOR FORMING AN INTEGRATED SPATIAL LIGHT MODULATOR 有权
标题翻译：形成一体化空调光调制器的方法和结构
公开(公告)号：US20070128771A1
公开(公告)日：2007-06-07
申请号：US11670362
申请日：2007-02-01
申请人： Xiao Yang , Dongmin Chen , Kegang Huang
发明人： Xiao Yang , Dongmin Chen , Kegang Huang
IPC分类号： H01L21/00
CPC分类号： G02B26/0841
摘要： A method of fabricating an integrated spatial light modulator. The method includes providing a first substrate including a bonding surface and processing a device substrate to form at least an electrode layer. The method also includes depositing a first portion of a multi-layer standoff layer on the electrode layer, depositing a second portion of the multi-layer standoff layer on the first portion of the multi-layer standoff layer, and forming electrically insulating standoff structures from the multi-layer standoff layer. The method further includes joining the bonding surface of the first substrate to the standoff structures on the device substrate, thinning the first substrate, patterning the first substrate to form a mask, and forming a plurality of moveable structures from the first substrate. The moveable structures are aligned with at least one of the plurality of electrodes and adapted to rotate with respect to the standoff structures.
摘要翻译：一种制造集成空间光调制器的方法。该方法包括提供包括接合表面的第一基底和处理器件基底以形成至少一个电极层。该方法还包括在电极层上沉积多层间隔层的第一部分，在多层间隔层的第一部分上沉积多层间隔层的第二部分，并且形成电绝缘的支架结构多层间隔层。该方法还包括将第一衬底的接合表面连接到器件衬底上的间隔结构，使第一衬底变薄，图案化第一衬底以形成掩模，以及从第一衬底形成多个可移动结构。可移动结构与多个电极中的至少一个对准，并适于相对于间隔结构旋转。

70. 发明申请

US20070103264A1 Method and Structure for an Out-of-Plane Compliant Micro Actuator 有权
标题翻译：超平面微型执行器的方法和结构
公开(公告)号：US20070103264A1
公开(公告)日：2007-05-10
申请号：US11555063
申请日：2006-10-31
申请人： Xiao Yang
发明人： Xiao Yang
IPC分类号： H01F7/08
CPC分类号： H02N1/004
摘要： This present invention relates generally to manufacturing objects. More particularly, the invention relates to a method and structure for fabricating an out-of-plane compliant micro actuator. The compliant actuator has large actuation range in both vertical and horizontal planes without physical contact to the substrate. Due to fringe field actuation, the compliant actuator has no pull-in phenomenon and requires low voltage by a ‘zipping’ movement compared to conventional parallel plate electrostatic actuators. The method and device can be applied to micro actuators as well as other devices, for example, micro-electromechanical sensors, detectors, fluidic, and optical systems.
摘要翻译：本发明一般涉及制造物体。更具体地说，本发明涉及一种用于制造面外兼容微型致动器的方法和结构。柔性致动器在垂直和水平平面中具有大的致动范围，而不与基板物理接触。由于边缘场致动，顺应性致动器没有拉入现象，与传统的平行板静电致动器相比，通过“拉伸”运动需要低电压。该方法和装置可以应用于微致动器以及其他装置，例如微机电传感器，检测器，流体和光学系统。

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