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    • 65. 发明授权
    • Probe structures for testing electrical interconnections to integrated circuit electronic devices
    • 用于测试集成电路电子设备的电互连的探头结构
    • US06525551B1
    • 2003-02-25
    • US09081342
    • 1998-05-19
    • Brian Samuel BeamanKeith Edward FogelPaul Alfred LauroEugene John O'SullivanDa-Yuan Shih
    • Brian Samuel BeamanKeith Edward FogelPaul Alfred LauroEugene John O'SullivanDa-Yuan Shih
    • G01R3102
    • G01R1/07307G01R1/06738H01L2924/00013H01L2224/29099
    • A probe structure for probing an electronic device. The probe has: a substrate having a substrate surface having a plurality of substrate electrical contact locations;a plurality of elongated electrical conductors having a first and second end; the first end of each of the plurality of elongated electrical conductors is electrically connected to one of the plurality of substrate electrical contact locations; a plate having a first and second side, and having a plurality of openings therein extending from the first side to the second side; the plate is disposed so that the first side thereof faces sad substrate; the second end of each of the plurality of elongated electrical conductors extends through one of the openings in the plate; a support for maintaining the plate at a distance from the substrate surface; the distance is selected so that the second ends project out from the second side of the plate a sufficient amount so that when the probe structure is pressed against a device under test the second ends of the elongated electrical conductors are maintained within a displacement from an original position by the opening so that the second ends of the elongated electrical conductors remain in contact with an electrical contact location on the device under test.
    • 用于探测电子设备的探头结构。 所述探针具有:具有基板表面的基板,所述基板表面具有多个基板电接触位置;多个细长电导体,具有第一端和第二端; 所述多个细长电导体中的每一个的第一端电连接到所述多个基板电接触位置中的一个; 具有第一和第二侧的板,并且具有从所述第一侧延伸到所述第二侧的多个开口; 该板被设置成使其第一侧面向悲伤的基板; 多个细长电导体中的每一个的第二端延伸穿过板中的一个开口; 用于将板保持在离基板表面一定距离处的支撑件; 选择距离使得第二端从板的第二侧突出足够的量,使得当探针结构被压靠在被测设备上时,细长电导体的第二端保持在与原件的位移之内 通过开口的位置,使得细长电导体的第二端保持与被测器件上的电接触位置接触。