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61. 发明授权

US08283642B2 Ion beam sample preparation apparatus and methods 有权
标题翻译：离子束样品制备装置及方法
公开(公告)号：US08283642B2
公开(公告)日：2012-10-09
申请号：US13082373
申请日：2011-04-07
申请人： Steven Thomas Coyle , John Andrew Hunt
发明人： Steven Thomas Coyle , John Andrew Hunt
IPC分类号： G21K5/10 , H01J37/08 , H01J37/30 , H01J37/31
CPC分类号： G01N1/44 , G01N1/32 , H01J37/023 , H01J37/31 , H01J2237/0245 , H01J2237/2007 , H01J2237/3118
摘要： Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises a tilting ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing. The tilting ion beam irradiating means may direct ions at the sample from more than one tilt angle. A rotating shield retention stage is also disclosed which works in concert with the tilting ion beam irradiating means to improve the flexibility and efficiency of the apparatus in preparing samples for microscopic observation.
摘要翻译：公开了用于使用实施例的离子束样品制备装置和方法的实施方案。该装置包括在真空室中的倾斜离子束照射装置，其可将离子引向样品，屏蔽阻挡朝向样品的一部分离子的屏蔽保护台，以及具有屏蔽保持装置的屏蔽保持装置，其可替换地和可移除地保持屏蔽在一个位置当屏蔽保持在屏蔽保持阶段时，屏蔽具有与屏蔽保持平台上的辅助基准特征相交的基准特征。屏蔽件具有能够将样品耐久地粘附到屏蔽件的特征，以用离子束处理样品。屏蔽和屏蔽保持阶段的补充基准特征使得样品能够准确和可重复地定位在用于样品处理和再处理的设备中。倾斜离子束照射装置可以从多于一个倾斜角度引导样品处的离子。还公开了旋转屏蔽保持阶段，其与倾斜离子束照射装置协调工作，以在制备用于显微镜观察的样品中提高装置的灵活性和效率。

62. 发明申请

US20120085939A1 Ion Beam Sample Preparation Apparatus and Methods 有权
标题翻译：离子束样品制备装置及方法
公开(公告)号：US20120085939A1
公开(公告)日：2012-04-12
申请号：US13082373
申请日：2011-04-07
申请人： Steven Thomas Coyle , John Andrew Hunt
发明人： Steven Thomas Coyle , John Andrew Hunt
IPC分类号： G21K5/10
CPC分类号： G01N1/44 , G01N1/32 , H01J37/023 , H01J37/31 , H01J2237/0245 , H01J2237/2007 , H01J2237/3118
摘要： Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises a tilting ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing. The tilting ion beam irradiating means may direct ions at the sample from more than one tilt angle. A rotating shield retention stage is also disclosed which works in concert with the tilting ion beam irradiating means to improve the flexibility and efficiency of the apparatus in preparing samples for microscopic observation.
摘要翻译：公开了用于使用实施例的离子束样品制备装置和方法的实施方案。该装置包括在真空室中的倾斜离子束照射装置，其可将离子引向样品，屏蔽阻挡朝向样品的一部分离子的屏蔽保护台，以及具有屏蔽保持装置的屏蔽保持装置，其可替换地和可移除地保持屏蔽在一个位置当屏蔽保持在屏蔽保持阶段时，屏蔽具有与屏蔽保持平台上的辅助基准特征相交的基准特征。屏蔽件具有能够将样品耐久地粘附到屏蔽件的特征，以用离子束处理样品。屏蔽和屏蔽保持阶段的补充基准特征使得样品能够准确和可重复地定位在用于样品处理和再处理的设备中。倾斜离子束照射装置可以从多于一个倾斜角度引导样品处的离子。还公开了旋转屏蔽保持阶段，其与倾斜离子束照射装置协调工作，以在制备用于显微镜观察的样品中提高装置的灵活性和效率。

63. 发明申请

US20100123082A1 METHOD FOR ELECTRON BACK-ILLUMINATION OF A SEMICONDUCTOR IMAGE SENSOR 审中-公开
标题翻译：用于电子反照射半导体图像传感器的方法
公开(公告)号：US20100123082A1
公开(公告)日：2010-05-20
申请号：US12621224
申请日：2009-11-18
申请人： Paul Mooney
发明人： Paul Mooney
IPC分类号： G01T1/20 , G01T1/24 , H01L27/148
CPC分类号： H01J37/244 , H01J2237/2441
摘要： A method is disclosed for acquiring an image in a sensor having a substrate side and a front side comprising illuminating the semiconductor image sensor with electrons that approach the sensor from the substrate side.
摘要翻译：公开了一种用于在具有基板侧和前侧的传感器中获取图像的方法，包括用从基板侧接近传感器的电子照射半导体图像传感器。

64. 发明授权

US07700917B1 Specimen holder with integral ion beam screen and in situ adjustment 有权
标题翻译：具有整体离子束屏幕的样品支架并进行原位调整
公开(公告)号：US07700917B1
公开(公告)日：2010-04-20
申请号：US11867275
申请日：2007-10-04
申请人： Simon Galloway , Richard Vince
发明人： Simon Galloway , Richard Vince
IPC分类号： H01J37/30
CPC分类号： H01J37/20 , H01J37/3053 , H01J2237/045 , H01J2237/206 , H01J2237/28 , H01J2237/3151 , H01J2237/31745
摘要： An apparatus for holding a specimen to be viewed in a focused beam microscope, which can be an electron microscope or a focused ion beam microscope. The apparatus has a base and a specimen carriage with specimen mounting surface in a first plane and an ion beam screen or knife blade. The relative position between the ion beam screen and the specimen carriage are remotely adjustable while the apparatus is mounted in the focused beam microscope. In a further embodiment, the apparatus is transferable between an ion beam milling device and the focused beam microscope while the milling device and the microscope share a common vacuum.
摘要翻译：在聚焦光束显微镜中保持待观察的样品的装置，其可以是电子显微镜或聚焦离子束显微镜。该装置具有基座和具有第一平面中的试样安装表面和离子束筛子或刀片的试样托架。离子束屏幕和样品托架之间的相对位置可远程调节，同时将设备安装在聚焦光束显微镜中。在另一个实施例中，该装置可在离子束研磨装置和聚焦光束显微镜之间转移，同时铣削装置和显微镜共享共同的真空。

65. 发明授权

US5818035A Optically coupled large-format solid state imaging apparatus having edges of an imaging device 失效
标题翻译：具有固定在支撑框架上或相对于支撑框架的成像装置的边缘的光耦合大幅面固态成像装置及其制造方法
公开(公告)号：US5818035A
公开(公告)日：1998-10-06
申请号：US714763
申请日：1996-09-16
申请人： Ondrej L. Krivanek , Paul Edward Mooney , Nils Timothy Swann
发明人： Ondrej L. Krivanek , Paul Edward Mooney , Nils Timothy Swann
IPC分类号： H01L31/0203 , H01L31/0232 , H04N5/225
CPC分类号： H01L31/0203 , H01L31/0232 , H04N5/2253 , H01L2224/48091
摘要： A large-format solid state imaging device which can detect optical images without loss of sharpness or resolution is provided and includes a solid state imaging device supported by and secured to a frame. To ensure that the imaging device does not deviate from its desired surface configuration, the device is pressed between an optical coupling plate and a support plate each having at least one matching surface whose curvature matches the other with a precision which permits the solid state imaging device to detect optical images without loss of sharpness or resolution and which conforms the imaging device into a desired configuration. Preferably, the frame is annular and the edges of the imaging device are secured to the frame by at least two spaced bonds.
摘要翻译：提供了可以检测光学图像而不损失清晰度或分辨率的大幅面固态成像装置，并且包括由框架支撑并固定到框架的固态成像装置。为了确保成像装置不偏离其期望的表面构造，该装置被按压在光学联接板和支撑板之间，每个光学联接板和支撑板具有至少一个匹配表面，该曲面的曲率与另一个具有匹配的精度，其允许固态成像装置以检测光学图像而不损失清晰度或分辨率，并且使成像装置符合所需的配置。优选地，框架是环形的，并且成像装置的边缘通过至少两个间隔开的结合固定到框架。

66. 发明授权

US5635720A Resolution-enhancement device for an optically-coupled image sensor for an electron microscope 失效
标题翻译：用于电子显微镜的光耦合图像传感器的分辨率增强装置
公开(公告)号：US5635720A
公开(公告)日：1997-06-03
申请号：US539017
申请日：1995-10-03
申请人： Paul E. Mooney , Ondrej L. Krivanek
发明人： Paul E. Mooney , Ondrej L. Krivanek
IPC分类号： H01J29/89 , H01J37/22 , H01J37/244
CPC分类号： H01J37/224 , H01J29/892 , H01J2237/2443 , H01J2237/2445
摘要： An apparatus designed to be positioned in the projection chamber of an electron microscope to detect electron images and/or diffraction patterns from a sample and convert those electron images into light images is provided. The apparatus transfers light images to an imaging sensor for recording while enhancing resolution of the light images by absorbing substantially all laterally scattered light before it reaches the imaging sensor.
摘要翻译：一种被设计为位于电子显微镜的投影室中以检测来自样品的电子图像和/或衍射图案并将这些电子图像转换成光图像的装置。该装置将光图像传送到用于记录的成像传感器，同时通过在到达成像传感器之前基本上吸收所有横向散射的光，同时增强光图像的分辨率。

67. 发明授权

US5536941A Rotatable wide angle camera and prism assembly for electron microscopes 失效
标题翻译：可旋转广角相机和电子显微镜的棱镜组件
公开(公告)号：US5536941A
公开(公告)日：1996-07-16
申请号：US392242
申请日：1995-02-22
申请人： Peter R. Swann
发明人： Peter R. Swann
IPC分类号： H01J37/22 , H01J37/244
CPC分类号： H01J37/224 , H01J2237/244 , H01J2237/26
摘要： An apparatus for recording electron images and diffraction patterns which can be automatically controlled via a computer, has improved precision, and has greater flexibility in acquiring and displaying specimen images is provided. The apparatus includes an electron microscope having a projection chamber, an electron scintillator in the projection chamber for converting a projected electron image into a light image, and a camera positioned adjacent to the projection chamber for acquiring the light image. The camera is rotatable about its optical (horizontal) axis so that desired features of the acquired image may be brought into alignment with the display device used to view them, such as for example, a CRT screen. By positioning the camera outside of the vacuum of the electron microscope projection chamber, problems associated with prior internally-mounted devices are avoided and the camera may be readily manually or automatically adjusted.
摘要翻译：用于记录可以通过计算机自动控制的电子图像和衍射图案的设备具有提高的精度，并且在获取和显示样本图像方面具有更大的灵活性。该装置包括具有投影室的电子显微镜，投影室中的电子闪烁体，用于将投射的电子图像转换成光图像;以及位于投影室附近的照相机，用于获取光图像。照相机可绕其光学（水平）轴线旋转，使得所获取的图像的期望特征可以与用于观看它们的显示装置（例如CRT屏幕）对齐。通过将相机定位在电子显微镜投影室的真空之外，避免了与现有内置装置相关的问题，并且可以容易地手动或自动调节照相机。

68. 发明授权

US4272682A Specimen elevator for an ion milling machine 失效
公开(公告)号：US4272682A
公开(公告)日：1981-06-09
申请号：US65579
申请日：1979-08-10
申请人： Peter R. Swann
发明人： Peter R. Swann
IPC分类号： G01N1/32 , H01J37/305 , H01L21/687
CPC分类号： H01L21/68742 , H01J37/3053 , H01L21/68792 , G01N1/32
摘要： An ion milling machine specimen elevator comprising a vertically oriented piston which supports a specimen holder at its top and is movable between a lowered operating position and a raised viewing position. When the piston is in the lowered operating position, it is slowly rotated about its vertical axis by a suitable drive. The elongated piston passes through an O-ring seal into an evacuated ion milling or work chamber. At the bottom of the work chamber is disposed a pneumatic control cylinder into which the piston extends. The piston can be moved up or down by altering the pressure in the pneumatic cylinder. During ion milling the piston is at its lowest position in the evacuated work chamber and is held there by pressurized gas in the pneumatic control cylinder. A second small chamber is provided above the work chamber for specimen viewing and specimen exchange. The disclosed specimen elevator can move the specimen into the second chamber and at the same time provide a seal so the work chamber does not lose vacuum during specimen viewing or exchange. If it is desired to remove the specimen from the work chamber without disturbing its vacuum, the pressure in the pneumatic control cylinder is released and the elongated piston is automatically forced to its highest position by the exerted atmospheric pressure. As the elongated piston rises to its upper position the top of the piston passes through a second O-ring seal, at the top of the work chamber, then into the small second chamber. As the piston moves into the small second chamber, it seals the work chamber from the small second chamber so air admitted to the second chamber does not enter the work chamber. The small chamber can be lifted from the larger work chamber after the internal pressure of the small chamber is raised to atmospheric. Removing the small chamber exposes the specimen holder, allowing the specimen to be removed or closely examined to study the progress of the ion milling operation. The specimen is reinserted into the work chamber by replacing and then evacuating the small chamber and then by repressurizing the pneumatic control cylinder. This forces the piston to move through the seal between the work chamber and the small chamber to its lowest position. The piston has a beveled gear attached thereto which engages a driven bevel gear when the piston is in the lowered operating position to slowly rotate the specimen in the work chamber.

69. 发明申请

US20210313141A1 APPARATUS FOR TRANSMISSION ELECTRON MICROSCOPY CATHODOLUMINESCENCE 有权
公开(公告)号：US20210313141A1
公开(公告)日：2021-10-07
申请号：US17223146
申请日：2021-04-06
申请人： Gatan, Inc.
发明人： John Andrew Hunt , Michael Bertilson
IPC分类号： H01J37/244 , H01J37/22 , G01J3/02 , G01J3/44 , G01N21/66 , H01J37/285
摘要： Apparatuses for collection of upstream and downstream transmission electron microscopy (TEM) cathodoluminescence (CL) emitted from a sample exposed to an electron beam are described. A first fiber optic cable carries first CL light emitted from a first TEM sample surface, into a spectrograph. A second fiber optic cable carries second CL light emitted from a second TEM sample surface into the spectrograph. The first and second fiber optic cables are positioned such that the spectrograph produces a first light spectrum for the first fiber optic cable and a separate light spectrum for the second fiber optic cable. The described embodiments allow collection of TEM CL data in a manner that allows analyzing upstream and downstream TEM CL signals separately and simultaneously with an imaging spectrograph.

70. 发明授权

US11024484B2 Method for high speed EELS spectrum acquisition 有权
公开(公告)号：US11024484B2
公开(公告)日：2021-06-01
申请号：US16635725
申请日：2018-08-01
申请人： Gatan, Inc.
发明人： Edward Michael James , Ray Dudley Twesten
IPC分类号： H01J37/26 , H01J37/22 , H01J37/24 , H01J37/05 , H01J37/244
摘要： A system and method are disclosed for acquiring Electron Energy Loss Spectrometry (EELS) spectra in a transmission electron microscope. The inventive system and method maximize spectrum acquisition rate and duty cycle by exposing a first portion of an image sensor to a first spectrum while a previously exposed potion of the sensor is read out of the sensor during some or all of the exposure time.

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