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    • 54. 发明授权
    • Contamination prevention in extreme ultraviolet lithography
    • 极紫外光刻法防止污染
    • US08084757B2
    • 2011-12-27
    • US12015984
    • 2008-01-17
    • Banqiu WuAjay Kumar
    • Banqiu WuAjay Kumar
    • H05H1/00
    • G03F7/70916G03F7/70858
    • Embodiments of the present invention provide methods and apparatus for removing debris particles using a stream of charged species. One embodiment of the present invention provides an apparatus for removing debris particles from a beam of radiation comprising a charged species source configured to dispense electrically charged species, and a collecting plate biased electrically opposite to the charged species from the charged species source, wherein the collecting plate and the charged species source are disposed on opposite sides of the beam of radiation, a stream of charged species from the charged species source to the collecting plate intersects the beam of radiation, the stream of charged species is configured to attach and remove debris particles from the beam of radiation by electrostatic force, and the collecting plate is configured to receive the charged species and the debris particles removed from the beam of radiation.
    • 本发明的实施例提供了使用带电物质流去除碎屑颗粒的方法和装置。 本发明的一个实施例提供了一种用于从辐射束去除碎屑颗粒的装置,包括被配置成分配带电物质的带电物质源,以及与带电物质源电荷相反的收集板,其中收集 板和带电物质源设置在辐射束的相对侧上,从带电物质源到收集板的带电物流流与辐射束相交,带电物质流被配置为附着和去除碎屑颗粒 通过静电力从辐射束获得,并且收集板被配置为接收带电物质并且从辐射束去除碎屑颗粒。
    • 55. 发明申请
    • POWER DELIVERY UNIT, PLASMA SPRAY SYSTEM, AND METHOD OF USING PLASMA SPRAY SYSTEM
    • 电力输送单元,等离子体喷雾系统和使用等离子体喷雾系统的方法
    • US20110303645A1
    • 2011-12-15
    • US12797240
    • 2010-06-09
    • Yuk-Chiu LauJoseph Albanese
    • Yuk-Chiu LauJoseph Albanese
    • H05H1/00
    • H05H1/36C23C4/134
    • Different plasma spray guns have differing current and voltage requirements for their operation. The spray guns generally fall into low voltage high current and high voltage low current types. The power requirements of the guns vary greatly in terms of overall power ranging from few tens of kilowatts to few hundreds of kilowatts. The guns also have wide ranging requirements for voltage and current. A power delivery unit is described in which the unit is capable of delivering the wide range of power as well as the wide ranges of voltage and current. A plasma spray system with such power delivery unit can universally operate both the low voltage high current and high voltage low voltage spray gun types. Such system can reduce capital and operation costs since shops need not maintain separate and incompatible plasma spray systems.
    • 不同的等离子喷枪对其操作具有不同的电流和电压要求。 喷枪通常属于低压大电流和高压低电流型。 在从几十千瓦到几百千瓦的总功率方面,枪的功率要求差异很大。 枪对电压和电流也有着广泛的要求。 描述了一种功率输送单元,其中该单元能够传送宽范围的功率以及宽范围的电压和电流。 具有这种功率输送单元的等离子体喷射系统可以普遍地操作低压大电流和高压低压喷枪类型。 这样的系统可以降低资本和运营成本,因为商店不需要维持分离和不相容的等离子喷涂系统。
    • 56. 发明申请
    • Method and System for Treating Flexible Films
    • 用于处理柔性薄膜的方法和系统
    • US20110293848A1
    • 2011-12-01
    • US12789483
    • 2010-05-28
    • Christian Kohlweyer
    • Christian Kohlweyer
    • B05D3/06B32B37/00H05H1/00
    • C08J7/123B05D3/08B05D3/144B05D7/04B29C59/08B29C59/14C08J2323/04
    • A system and method for treating films. The method comprises steps of: providing a flexible film having a first side and a second side; flame treating the first side of the flexible film; subsequently treating the first side with plasma. the treated film may subsequently have a coating applied and cured to the first side. The system for treating a flexible film comprises: an unwind element adapted to unwind a wound roll of flexible film, the flexible film having a first side and a second side; a flame treatment element disposed to receive unwound film proceeding from the unwind element and adapted to flame treat the first side of the flexible film; and a plasma treatment element disposed to receive film proceeding from the flame treatment element and adapted to treat the first side of the flexible film with plasma.
    • 一种用于处理薄膜的系统和方法。 该方法包括以下步骤:提供具有第一侧和第二侧的柔性膜; 火焰处理柔性膜的第一面; 随后用等离子体处理第一面。 经处理的膜随后可以涂覆并固化到第一侧。 用于处理柔性膜的系统包括:适于退绕柔性膜的卷绕卷的展开元件,所述柔性膜具有第一侧和第二侧; 火焰处理元件,被设置为接收从展开元件延伸并且适于火焰处理柔性膜的第一侧的退绕膜; 以及等离子体处理元件,其设置成接收从所述火焰处理元件进行的膜并且适于用等离子体处理所述柔性膜的第一侧。
    • 57. 发明授权
    • Method of forming piezoelectric resin film
    • 形成压电树脂薄膜的方法
    • US08048493B2
    • 2011-11-01
    • US11823906
    • 2007-06-29
    • Takeshi HabuTakayuki Sasaki
    • Takeshi HabuTakayuki Sasaki
    • H05H1/00
    • C08G73/1064C08G18/3243C08G18/7657H01L41/257H01L41/45
    • An objective is to provide a method of forming a piezoelectric resin film produced at low cost, and specifically to provide the method in which a large-area piezoelectric resin film is produced at low cost, and at reduced investment in facilities. Disclosed is a method of forming a piezoelectric resin film possessing the steps of polymerizing a monomer at a temperature of 5-60° C. to obtain a resin having a polymerization degree of 4-300, and a polarity group possessing one bond selected from a urea bond, an ester bond, an amide bond and an imide bond, coating the resin onto a substrate; and further polymerizing the resin at 70-250° C. while conducting a poling treatment.
    • 目的是提供一种形成低成本制造的压电树脂膜的方法,具体地提供了以低成本生产大面积压电树脂膜并且在设备中投资减少的方法。 公开了一种形成压电树脂膜的方法,所述压电树脂膜具有在5-60℃的温度下使单体聚合以获得聚合度为4-300的树脂和具有一个键的极性基团的步骤,所述极性基团选自 脲键,酯键,酰胺键和酰亚胺键,将树脂涂布到基底上; 并进一步在70-250℃聚合树脂,同时进行极化处理。