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51. 发明授权

US4171482A Mass spectrometer for ultra-rapid scanning 失效
标题翻译：质谱仪用于超快速扫描
公开(公告)号：US4171482A
公开(公告)日：1979-10-16
申请号：US864702
申请日：1977-12-27
申请人： Jean Vastel
发明人： Jean Vastel
IPC分类号： H01J49/26 , G01N27/62 , H01J49/28 , B01D59/44 , H01J39/34
CPC分类号： H01J49/284
摘要： The invention relates to a mass spectrometer for rapid scanning. A magnetic sector focuses a collimated beam containing the various ion species in a focal plane. The focused beams reach this focal plane at an angle of 45.degree.. The beams emerging from this focal plane are refocused in an electrostatic deflector having parallel plates. One of these plates is provided with a slit through which the beams are received. Scanning is brought about by varying the voltage applied to the electrostatic deflector.
摘要翻译：本发明涉及一种用于快速扫描的质谱仪。磁性扇区将包含各种离子种类的准直束聚焦在焦平面中。聚焦光束以45度的角度到达该焦平面。从该焦平面出射的光束被重新聚焦在具有平行板的静电偏转器中。这些板中的一个设置有一个狭槽，梁被接收。通过改变施加到静电偏转器的电压来实现扫描。

52. 发明授权

US4054796A Mass spectrometer with superimposed electric and magnetic fields 失效
标题翻译：具有叠加电场和磁场的质谱仪
公开(公告)号：US4054796A
公开(公告)日：1977-10-18
申请号：US698316
申请日：1976-06-22
申请人： Motohiro Naito
发明人： Motohiro Naito
IPC分类号： H01J49/28 , G01N27/62 , H01J49/32 , H01J39/34
CPC分类号： H01J49/32
摘要： A mass spectrometer comprising superimposed electric and magnetic fields arranged substantially at right angles. The central orbit of the ion beam produced by an ion source is located on an equipotential surface in the electric field. The ion beam is accelerated by a means for producing a constant accelerating voltage. The electric field is swept by a sweep means. The change of the focal length of the superimposed field when the electric field is swept by said sweep means is compensated by a compensating means, thereby providing a mass spectrometer capable of measuring ions having a wide range of mass to charge ratios and capable of scanning at high speed and having a high accuracy mass marker.
摘要翻译：质谱仪包括基本成直角排列的叠加的电场和磁场。由离子源产生的离子束的中心轨道位于电场中的等势面上。通过用于产生恒定加速电压的装置来加速离子束。电场被扫掠装置扫过。当通过所述扫描装置扫描电场时，叠加场的焦距的变化由补偿装置补偿，从而提供能够测量具有宽范围的质荷比并可以扫描的离子的质谱仪高速度并具有高精度的质量标记。

53. 发明授权

US3939354A Method and apparatus for separation of ions from a plasma 失效
标题翻译：离子与等离子体分离的方法和装置
公开(公告)号：US3939354A
公开(公告)日：1976-02-17
申请号：US328954
申请日：1973-02-02
申请人： George Sargent Janes
发明人： George Sargent Janes
IPC分类号： B01D59/34 , B01D59/50 , G01N27/62 , H01J49/28 , H05H1/00 , H05H7/08 , B01D59/44 , H01J39/34
CPC分类号： H01J49/288 , B01D59/34 , B01D59/50 , H05H1/00
摘要： In a system for isotope separation, method and apparatus empolying crossed-field MHD particle accelerating techniques for collecting ions of a desired isotope after selective ionization of that isotope. In the plasma of electrons and selectively ionized atoms which results from selective isotope ionization, the ions are collected by inducing a circulation of the plasma electrons to provide a JXB relationship for MHD acceleration of the ions. The electron circulation enhances penetration of the plasma by the accelerating electric field and avoids the generation of large Hall voltages within the system as well as reducing the required magnitude of electrode currents.
摘要翻译：在用于同位素分离的系统中，方法和装置使得交叉场MHD粒子加速技术用于在该同位素选择性离子化之后收集所需同位素的离子。在电子等离子体和选择性同位素电离产生的选择性离子化原子中，通过诱导等离子体电子的循环来收集离子，为离子的MHD加速提供JXB关系。电子循环通过加速电场增强了等离子体的穿透，并避免了在系统内产生大的霍尔电压以及减少所需的电极电流量。

54. 发明授权

US3916188A Method of electrostatic filtration 失效
标题翻译：静电过滤方法
公开(公告)号：US3916188A
公开(公告)日：1975-10-28
申请号：US43469574
申请日：1974-01-18
申请人： ANVAR
发明人： DEVIENNE FERNAND MARCEL
IPC分类号： H01J49/10 , G01N27/62 , H01J49/14 , H01J49/28 , H01J39/34 , B01D59/44
CPC分类号： H01J49/286 , H01J49/14
摘要： Electrostatic filtration of secondary ions of mass m in a given mass ratio with a primary ion of mass M which has formed the secondary ions by fission is carried out by a method which consists in forming a singly-charged primary ion of the substance having a molecular mass M and extracting the ion at a voltage V1 with respect to ground, in causing the primary ion to cross a potential barrier V2, in producing the dissociation of said ion into at least two fragments of secondary ions, in extracting the fragment ion of mass m at a voltage V2, in carrying out a filtration in an electrostatic analyzer through which only the ions of energy eV'''' are permitted to pass, in detecting the ions which have thus been filtered and the mass m of which is such that

D R A W I N G
摘要翻译：通过裂变形成二次离子的质量为M的质量m的质量m的二次离子的静电过滤通过一种方法进行，该方法包括形成具有分子的物质的单一带电的一次离子质量M并且以相对于地面的电压V1提取离子，在使主离子穿过势垒V2时，在产生质量的碎片离子中产生离子到至少两个次级离子的片段中的解离在电压V2下进行过滤，在静电分析仪中进行过滤，在静电分析仪中仅允许能量eV“的离子通过，以检测已经被过滤的离子，其质量m使得M V1 - V2 =。 m V“ - V2

55. 发明授权

US3840743A Ion microanalyzer 失效
标题翻译：离子微量汞
公开(公告)号：US3840743A
公开(公告)日：1974-10-08
申请号：US32768373
申请日：1973-01-29
申请人： HITACHI LTD
发明人： TAMURA H , KONDO T
IPC分类号： G01N23/227 , G01N23/225 , G01Q60/00 , H01J37/252 , H01J37/256 , H01J49/28 , H01J37/26
CPC分类号： H01J37/256 , H01J49/286
摘要： An ion microanalyzer wherein the intensity of a condenser lens for focusing an ion beam is periodically varied, to vary the spot diameter of the ion beam which is to impinge on a specimen, whereby the precision of analysis in the direction of the depth of the specimen can be enhanced.

56. 发明授权

US3816748A Ion accelerator employing crossed-field selector 失效
标题翻译：使用交叉场景选择器的离子加速器
公开(公告)号：US3816748A
公开(公告)日：1974-06-11
申请号：US24841772
申请日：1972-04-28
申请人： ALPHA IND INC
发明人： HARRISON S
IPC分类号： G21K1/08 , H01J37/317 , H01J49/28 , H05H5/04 , H01J39/34
CPC分类号： H05H5/04 , G21K1/08 , H01J37/3171 , H01J49/288
摘要： In the ion accelerator disclosed herein, the desired ion species is selected by means of a filter or selector of the crossed-field type which is self-focusing on at least one axis and which permits ion energy to be easily varied while maintaining focus and desired species selection. In the selector, the electric field provided has a strength which, on the centerline of the beam, is proportional to the square-root of the ion energy and has a gradient, in the direction of the field, which is proportional to the ion energy.
摘要翻译：在本文公开的离子加速剂中，期望的离子种类通过交叉场类型的过滤器或选择器来选择，该过滤器或选择器在至少一个轴上自聚焦，并且允许离子能量容易地变化，同时保持聚焦和期望的物种选择。在选择器中，所提供的电场具有在光束的中心线上与离子能量的平方根成比例的强度，并且在场的方向上具有与离子能量成比例的梯度。

57. 发明授权

US3786359A Ion accelerator and ion species selector 失效
标题翻译：离子加速器和离子物种选择器
公开(公告)号：US3786359A
公开(公告)日：1974-01-15
申请号：US3786359D
申请日：1969-03-28
申请人： ALPHA IND INC
发明人： KING W
IPC分类号： G21K1/14 , H01J37/317 , H01J49/28 , H01J23/10 , H01J37/26
CPC分类号： H01J37/3171 , G21K1/14 , H01J49/284
摘要： The apparatus disclosed herein provides high energy positive ions, suitable for semiconductor doping, by projecting positive ions through an electron stripping gas at relatively low energy thereby to obtain positive ions which are multiply ionized or charged. Those ions which are raised to a preselected ionization level or state are segregated, and then accelerated by a relatively high accelerating voltage to achieve an energy suitable for ion implantation in a semiconductor matrix. Since the ions subjected to the relatively high accelerating voltage are multiply ionized, the energy imparted thereto, measured in electron volts, is substantially equal to an integer multiple of the accelerating voltage.
摘要翻译：本文公开的装置通过以相对低的能量将正离子投射通过电子剥离气体来提供适合于半导体掺杂的高能正离子，从而获得多重电离或带电的正离子。升高到预选电离水平或状态的那些离子被分离，然后通过相对高的加速电压加速，以获得适合于半导体基质中的离子注入的能量。由于经受相对高的加速电压的离子被多次电离，所以以电子伏特测量的赋予的能量基本上等于加速电压的整数倍。

58. 发明授权

US3621241A Electrostatic analyzers with auxiliary focusing electrodes 失效
标题翻译：具有辅助聚焦电极的静电分析仪
公开(公告)号：US3621241A
公开(公告)日：1971-11-16
申请号：US3621241D
申请日：1969-10-07
申请人： PERKIN ELMER LTD
发明人： TURNER DAVID W
IPC分类号： H01J49/28 , H01J49/48 , H01J39/34
CPC分类号： H01J49/282 , H01J49/48
摘要： An electrostatic analyzer of the energy spectrum of charged particles is provided comprising spaced apart analyzer plates adapted for operation in a velocity-focusing mode of operation and auxiliary electrode means adjoining an inner face of an analyzer plate. Circuit means apply a potential to each analyzer plate and a potential of opposite polarity to an associated auxiliary electrode means for establishing an electrostatic field between the plates which in a zone of influence of the auxiliary electrode means is modified to direct peripheral particle trajectories towards a focus substantially common with that of paraxial trajectories.

59. 发明授权

US3610922A Combined mass spectrometer and ionization manometer 失效
标题翻译：组合质谱仪和离子流量计
公开(公告)号：US3610922A
公开(公告)日：1971-10-05
申请号：US3610922D
申请日：1969-10-16
申请人： PHILIPS CORP
发明人： WERNER HELMUT WILHELM WERNER
IPC分类号： G01L21/30 , G01N27/62 , H01J49/14 , H01J49/26 , H01J49/28 , H01J49/30 , H01J39/34
CPC分类号： H01J49/28 , H01J49/14 , H01J49/30
摘要： A mass spectrometer of the sector type which can be changed to an ionization manometer in which the ion collector current is a measure of the overall pressure of the gas to be analyzed utilizes a supply circuit for the system of accelerating electrodes in the ion source. The supply circuit provides the system of accelerating electrodes with a constant voltage or a pulsatory voltage in accordance with use as a mass spectrometer or an ionization manometer respectively.

60. 发明授权

US3445650A Double focussing mass spectrometer including a wedge-shaped magnetic sector field 失效
标题翻译：双重聚焦质谱仪，包括一个楔形磁性领域
公开(公告)号：US3445650A
公开(公告)日：1969-05-20
申请号：US3445650D
申请日：1965-10-11
申请人： APPLIED RES LAB
发明人： LIEBL HELMUT J
IPC分类号： G01Q10/00 , G01Q30/06 , H01J29/58 , H01J37/05 , H01J37/252 , H01J37/256 , H01J49/02 , H01J49/14 , H01J49/20 , H01J49/28 , H01J49/30 , H01J49/32 , H01J39/34 , B01D59/44 , H01J37/26
CPC分类号： H01J49/30 , H01J29/58 , H01J37/05 , H01J37/252 , H01J37/256 , H01J49/022 , H01J49/142 , H01J49/20 , H01J49/286 , H01J49/32 , H01J49/322

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