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51. 发明授权

US07152473B1 Integrated and multi-axis sensor assembly and packaging 有权
标题翻译：集成和多轴传感器组装和包装
公开(公告)号：US07152473B1
公开(公告)日：2006-12-26
申请号：US09936634
申请日：2000-03-17
申请人： Larry Rushefsky , Axel Sigmar , Howard D. Goldberg , W. Marc Stalnaker , Ray Rinne , Demetrios Balderes , Guido Lemke , Matthew Ip , Lawrence P. Behn , Klaus Domagalski , Lianzhong Yu , Arjun Selvakumar , Duli Yu , James L. Marsh , Peter Maxwell , David Morgan , Thomas Buie , Kees Faber , Sjoerd Altman , Richard Laroo
发明人： Larry Rushefsky , Axel Sigmar , Howard D. Goldberg , W. Marc Stalnaker , Ray Rinne , Demetrios Balderes , Guido Lemke , Matthew Ip , Lawrence P. Behn , Klaus Domagalski , Lianzhong Yu , Arjun Selvakumar , Duli Yu , James L. Marsh , Peter Maxwell , David Morgan , Thomas Buie , Kees Faber , Sjoerd Altman , Richard Laroo
IPC分类号： G01D11/10 , G01P15/00
CPC分类号： B81B7/0074 , B81B2201/0242 , G01D11/245 , G01P1/023 , G01P15/18 , H01L2224/48091 , H01L2224/48472 , H01L2924/00014
摘要： A sensor apparatus (104) includes a plural different spatial direction axis of sensitivity positioned sensor package containing sensor module (305) supported by a planar surface (345) within a cavity (340) of a housing (205) coupled to a first end cap (210) by a PC-board connection (355). Housing (205) is further coupled to first end cap (210) by a first coupling member (315) and a second coupling member (320) and is also coupled to an opposite second end cap (215) by a third coupling member (320) and a fourth coupling member (325). Interface sealing members (330a, 330b, 330c, 330d) seal between housing (205) and first end cap (210). Interface sealing members (335a, 335b, 335c, 335d) seal between housing (205) and second end cap (215).
摘要翻译：传感器装置（104）包括灵敏度定位的传感器组件的多个不同的空间方向轴，所述传感器组件包含传感器模块（305），所述传感器组件由平面（345）支撑在壳体（205）的空腔（340）内，所述壳体耦合到第一端盖（210）通过PC板连接（355）。壳体（205）还通过第一联接构件（315）和第二联接构件（320）进一步联接到第一端盖（210），并且还通过第三联接构件（320）联接到相对的第二端盖（215））和第四联接构件（325）。接口密封构件（330a，330b，330c，330d）在壳体（205）和第一端盖（210）之间密封。接口密封构件（335a，335b，335c，335d）在壳体（205）和第二端盖（215）之间密封。

52. 发明申请

US20050076725A1 Method and apparatus of vibration isolation, in particular for electron beam metrology tools 有权
标题翻译：振动隔离的方法和装置，特别是电子束计量工具
公开(公告)号：US20050076725A1
公开(公告)日：2005-04-14
申请号：US10949069
申请日：2004-09-24
申请人： Peter Heiland
发明人： Peter Heiland
IPC分类号： G01B15/00 , F16F15/02 , G01B21/00 , G01N23/225 , G05D19/02 , H01J37/02 , H01J37/20 , H01J37/26 , G21K5/10 , G01D11/10
CPC分类号： H01J37/20 , H01J37/02 , H01J2237/0216
摘要： There is provided a method and an apparatus for isolating mechanical vibrations reacting to beam metrology tools. The apparatus includes an outer structure for supporting a metrology instrument, and a chuck for holding a specimen with respect to the metrology instrument in an intended defined position for performing measurements on the specimen by the metrology instrument,. The apparatus also includes at least one active vibration isolator means coupled to the chuck for compensating relative movement between the specimen and the metrology instrument. A method is also provided that includes detecting a change of position of the specimen in response to mechanical vibrations, and effectuating an active modification of the position of the chuck in response to the detection for counteracting a relative displacement between the specimen and the metrology instrument.
摘要翻译：提供了一种用于隔离对梁计量工具反应的机械振动的方法和装置。该装置包括用于支撑计量仪器的外部结构和用于相对于计量仪器将样本保持在用于由计量仪器对样本进行测量的预定限定位置的卡盘。该装置还包括耦合到卡盘的至少一个主动隔振装置，用于补偿试样和计量仪器之间的相对运动。还提供了一种方法，其包括响应于机械振动来检测样本的位置变化，并且响应于用于抵消样本和计量仪器之间的相对位移的检测而实现卡盘的位置的有效修改。

53. 发明授权

US5348267A Apparatus for isolating a sensor 失效
标题翻译：用于隔离传感器的设备
公开(公告)号：US5348267A
公开(公告)日：1994-09-20
申请号：US947148
申请日：1992-09-18
申请人： Mark L. Lanting , Alan R. Davis , Stephen A. Edelen
发明人： Mark L. Lanting , Alan R. Davis , Stephen A. Edelen
IPC分类号： F16F15/08 , G01D11/10 , G01D11/30 , G01H1/00 , G12B9/08 , F16M13/00
CPC分类号： G01D11/10 , F16F15/08 , G01D11/30
摘要： Apparatus is provided for isolating a sensor from a vibrating surface. The sensor has first and second spaced surfaces, a bore extending between the surfaces and a groove in the second surface. The apparatus includes a flanged sleeve adapted to extend through the bore to the vibrating surface. The sleeve is sufficiently long when extending through the bore to provide a first gap between the vibrating surface and the second surface of the sensor and sufficiently narrow when extending through the bore to provide a second gap between the sleeve and the sensor. The flange overlays the first surface of the sensor and the second gap. The apparatus also includes a bolt, which extends through the bore and into engagement with the vibrating surface, for attaching the sleeve to the vibrating surface. The apparatus also includes a first O-ring positioned between the first surface of the sensor and the sleeve flange and a second O-ring positioned in the groove of the second surface. The first O-ring spaces the sensor from the sleeve and the flange and the second O-ring is adapted to abut the vibrating surface and space the sensor from the vibrating surface and the sleeve, such that the sensor floats between the first and second O-rings in isolation from the sleeve and the vibrating surface.
摘要翻译：提供用于将传感器与振动表面隔离的装置。传感器具有第一和第二间隔表面，在表面之间延伸的孔和第二表面中的凹槽。该装置包括适于延伸穿过孔到凸缘表面的凸缘套筒。当延伸穿过孔时，套筒足够长，以在振动表面和传感器的第二表面之间提供第一间隙，并且当延伸穿过孔时足够窄，以在套筒和传感器之间提供第二间隙。该法兰覆盖传感器的第一表面和第二间隙。该装置还包括螺栓，其延伸穿过孔并与振动表面接合，用于将套筒附接到振动表面。该装置还包括位于传感器的第一表面和套筒凸缘之间的第一O形环和位于第二表面的凹槽中的第二O形环。第一O形环将传感器与套筒隔开并且法兰和第二O形环适于邻接振动表面并将传感器与振动表面和套筒隔开，使得传感器浮在第一和第二O - 与套筒和振动表面隔离。

54. 发明授权

US4669327A Vibration preventing device in intermittent driving mechanism 失效
标题翻译：隔振驱动机构中的防振装置
公开(公告)号：US4669327A
公开(公告)日：1987-06-02
申请号：US899771
申请日：1986-08-22
申请人： Syuichi Aratsu
发明人： Syuichi Aratsu
IPC分类号： B41J19/04 , F16F7/06 , F16F15/02 , G01D11/10 , F16H55/18 , F16C3/00 , F16F15/10
CPC分类号： G01D11/10 , Y10T464/50 , Y10T74/19623
摘要： A vibration preventing device in an intermittent driving mechanism for intermittently operating a driven member having a specified mass with a motor, includes an elastic body interposed between an operating member and a stationary member facing thereto which are disposed in a motor power transmission system, and a friction surface formed between the elastic body and the operating member or between the elastic body and the stationary member, whereby at the time of starting the motor, the load on rotation of the motor is gradually increased by elastic deformation of the elastic body.
摘要翻译：用于间歇地操作具有电动机的特定质量的从动构件的间歇驱动机构中的防振装置包括设置在电动机动力传递系统中的位于操作构件和面向其的固定构件之间的弹性体，摩擦面形成在弹性体与操作部件之间或弹性体与固定部件之间，由此在起动电动机时，由于弹性体的弹性变形，电动机的转动负荷逐渐增加。

55. 发明授权

US4627285A Pointer for liquid filled gauges 失效
标题翻译：液体填充计的指针
公开(公告)号：US4627285A
公开(公告)日：1986-12-09
申请号：US718892
申请日：1985-04-02
申请人： Edwin H. King
发明人： Edwin H. King
IPC分类号： G01D11/12 , G01D11/10
CPC分类号： G01D11/12
摘要： An improved liquid filled gauge for measuring the temperature or pressure of a fluid. Gauge temperature or pressure readings are indicated by a pointer configured to produce substantial resistance to motion during pointer rotation. The preferred embodiment employs an elongated flat sheet pointer having three 90.degree. twists; two in the indication end of the pointer to bound a first resistive surface, and a third in the tail of the pointer to bound a second resistive surface.
摘要翻译：用于测量流体温度或压力的改进的液体填充量规。测量温度或压力读数由指针构成，用于在指针旋转期间产生实质的阻力。优选实施例采用具有三个90度捻度的细长平板指针; 指示器的指示端中的两个限制第一电阻表面，并且在指针的尾部中的第三个以绑定第二电阻表面。

56. 发明授权

US4198863A Electromagnetic torsional stiffness element 失效
标题翻译：电磁扭转刚度元件
公开(公告)号：US4198863A
公开(公告)日：1980-04-22
申请号：US822421
申请日：1977-08-05
申请人： Gerhard Bartek , Hartmut Euer
发明人： Gerhard Bartek , Hartmut Euer
IPC分类号： G01D5/20 , G01L3/14 , G01R1/14 , G01R17/00 , H01F7/14 , H01F29/14 , H02K24/00 , G01D11/10
CPC分类号： H01F29/146 , G01D5/2066 , G01L3/14 , G01R1/14 , G01R17/00 , H01F7/145 , H02K24/00 , Y10T74/1257
摘要： An electromagnetic torsion stiffness arrangement with integrated auxiliary elements in which a magnetic field exerts restoring forces on a current-carrying conductor when moved from its rest position. The magnitude of the restoring forces are dependent on variation of current density. The current-carrying conductor serves as a primary winding of a position sensor, while serving simultaneously also for indicating torsion stiffness. A monitoring winding coil is displaced half a pole graduation from the conductor and moves along with the conductor. The magnetic field is produced by two multi-pole magnetic systems which form an air gap and face each other so that opposite poles face each other at the air gap. The conductor is movable within the air gap. A secondary winding of the position sensor is located outside of the air gap of the magnetic systems. The conductor is located on a disk rotating in the air gap between the magnetic systems, and the disks also serve simultaneously the function of electrical damping of the motion.
摘要翻译：具有集成辅助元件的电磁扭转刚度布置，其中磁场在从静止位置移动时对载流导体施加恢复力。恢复力的大小取决于电流密度的变化。载流导体用作位置传感器的初级绕组，同时用于指示扭转刚度。监控绕组线圈从导体移位一半磁极刻度并与导体一起移动。磁场由两个多极磁系统产生，这两个磁极系形成一个气隙并且彼此面对，使得相对极在气隙处彼此面对。导体可在气隙内移动。位置传感器的次级绕组位于磁性系统的气隙外部。导体位于在磁系统之间的气隙中旋转的盘上，并且盘也同时用于运动的电阻尼功能。

57. 发明授权

US3953861A Recording stylus 失效
标题翻译：录音笔
公开(公告)号：US3953861A
公开(公告)日：1976-04-27
申请号：US572978
申请日：1975-04-30
申请人： Barry John Kipling
发明人： Barry John Kipling
IPC分类号： B43K8/00 , G01D15/00 , G01D11/10
CPC分类号： B43K8/00
摘要： A recording stylus comprising a metal blade having a stem portion and a stylus point at one end, a second metal blade adjacent said stem portion and a resilient material between the two metal portions forming an adhesive bond between them.
摘要翻译：一种记录触针，其包括具有杆部分和在一端的触针点的金属刀片，与所述杆部分相邻的第二金属刀片和在两个金属部件之间的弹性材料，在它们之间形成粘结剂。

58. 发明授权

US3919632A Fluid damping system for analog instruments 失效
标题翻译：用于模拟仪器的流体阻尼系统
公开(公告)号：US3919632A
公开(公告)日：1975-11-11
申请号：US50212874
申请日：1974-08-30
申请人： WESTINGHOUSE ELECTRIC CORP
发明人： ROERTY DENNIS F
IPC分类号： G01D11/12 , G01R1/14 , G01D11/10
CPC分类号： G01D11/12 , G01R1/14
摘要： A fluid damped electrical measuring instrument in which damping is attained by the movement of a projecting part, from a projecting arm that is carried by the rotor, through damping fluid contained within an annularly shaped outwardly open channel fixed with respect to the stator.
摘要翻译：一种流体阻尼电测量仪器，其中通过突出部分从由转子承载的突出臂的移动通过包含在相对于定子固定的环形形状的向外开口的通道内的阻尼流体来实现阻尼。

59. 发明授权

US2167872A Resilient linkage for measuring instruments 失效
标题翻译：测量仪器的弹性连接
公开(公告)号：US2167872A
公开(公告)日：1939-08-01
申请号：US16675437
申请日：1937-10-01
申请人： BRISTOL COMPANY
发明人： BRISTOL CARLTON W
IPC分类号： G01D11/10
CPC分类号： G01D11/10

60. 发明授权

US1711003A Damping means for indicators 失效
标题翻译：指示器的阻尼手段
公开(公告)号：US1711003A
公开(公告)日：1929-04-30
申请号：US73811024
申请日：1924-09-16
申请人： FORD INSTR CO INC
发明人： UHL ARTHUR W
IPC分类号： G01D11/10
CPC分类号： G01D11/10

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