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    • 51. 发明授权
    • Three-dimensional complementary field effect transistor process and
structures
    • 三维互补场效应晶体管工艺及结构
    • US5925909A
    • 1999-07-20
    • US555556
    • 1995-11-08
    • Yowjuang W. LiuYu Sun
    • Yowjuang W. LiuYu Sun
    • H01L21/8234H01L21/8238H01L27/088H01L27/092H01L29/423H01L29/78H01L29/76H01L29/94H01L31/062H01L31/113
    • H01L29/7834H01L21/823487H01L21/823885H01L27/088H01L27/0922H01L29/4238Y10S148/05
    • A field effect transistor has a short gate and is fabricated by: doping the bottom surface of a depression to form a relatively lightly doped region in the bottom of the depression; forming the gate of the field effect transistor on the sidewall of the depression such that the gate is insulated from the sidewall by a thin insulating layer; and implanting dopants to form the drain region and the source region of the transistor using the gate to mask a part of the relatively lightly doped region. The part of the relatively lightly doped region which is masked by the gate during implanting of the source and drain regions constitutes a lightly doped drain region of the transistor. The drain of the transistor is formed into the bottom of the depression. The length of the gate is primarily determined by the depth and/or profile of the sidewall. The source-to-drain on-resistance of the transistor is low because the transistor does not have a lightly doped source region. The transistor has high quality gate oxide because the sidewall of the depression upon which the gate oxide is grown is substantially free of ion impact damage.
    • 场效应晶体管具有短栅极,并且通过以下方式制造:掺杂凹陷的底表面以在凹陷的底部形成相对轻掺杂的区域; 在凹陷的侧壁上形成场效应晶体管的栅极,使得栅极通过薄绝缘层与侧壁绝缘; 以及使用所述栅极注入掺杂剂以形成所述晶体管的漏极区域和源极区域以掩蔽所述相对轻掺杂区域的一部分。 在注入源极和漏极区域期间被栅极掩蔽的相对轻掺杂区域的部分构成晶体管的轻掺杂漏极区。 晶体管的漏极形成凹陷的底部。 栅极的长度主要由侧壁的深度和/或轮廓确定。 晶体管的源极到漏极导通电阻很低,因为晶体管不具有轻掺杂的源极区域。 晶体管具有高质量的栅极氧化物,因为其上生长栅极氧化物的凹陷的侧壁基本上没有离子冲击损伤。
    • 59. 发明授权
    • Method and apparatus for microscopy
    • 显微术的方法和装置
    • US08554344B2
    • 2013-10-08
    • US12922211
    • 2009-03-13
    • Yu SunXinyu Liu
    • Yu SunXinyu Liu
    • G05B19/18
    • G05B19/232G02B21/26G05B19/291G05B19/351G05B2219/41346G05B2219/49368
    • The present invention relates to a compact motorized rotational stage for microscopy applications and control methods for automated sample orientation/rotation. The rotational stage includes a motor, a rotational motion transmission mechanism, and a rotating sample holder for accommodating a holding device such as glass slides/Petri dishes of different sizes. Mouse embryos are used as an example to explain the control methods. A pattern recognition utility was developed for identifying mouse embryo structures. The transformation between the holding device rotational coordinate frame and the translational positioning stage coordinate frame is calibrated during image-based visual servo control. The polar body of an embryo is oriented through purely image-based visual servo control or through coordinate transformation and closed-loop position control.
    • 本发明涉及用于显微镜应用的紧凑型电动旋转台和用于自动取样/旋转的控制方法。 旋转台包括电动机,旋转运动传递机构和用于容纳诸如不同尺寸的玻璃板/培养皿的保持装置的旋转样品保持器。 以小鼠胚胎为例来说明对照方法。 开发了识别小鼠胚胎结构的模式识别实用程序。 在基于图像的视觉伺服控制期间校准保持装置旋转坐标系和平移定位台坐标系之间的变换。 胚胎的极体通过纯粹的基于图像的视觉伺服控制或通过坐标变换和闭环位置控制来定向。