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    • 52. 发明授权
    • Method for producing thin film transistor and thin film transistor using the same
    • 使用该薄膜晶体管和薄膜晶体管的薄膜晶体管的制造方法
    • US06218206B1
    • 2001-04-17
    • US09153332
    • 1998-09-15
    • Kazunori InoueMasaru AokiMunehito KumagaiShigeaki NoumiTohru Takeguchi
    • Kazunori InoueMasaru AokiMunehito KumagaiShigeaki NoumiTohru Takeguchi
    • H01L2100
    • H01L29/66765
    • To provide a method of producing a TFT array and a liquid crystal display apparatus in which a contact resistivity of a pixel electrode and a drain electrode through a contact hole in an interlayer insulating film can be not more than 10E4&OHgr; stably. A method of producing TFT of the present invention for a liquid crystal display apparatus includes the step of forming TFT, the step of forming an interlayer insulating film, in which the surface is made to be flat so that a level difference due to the TFT area is eliminated, on a transparent insulating substrate, the step of providing a contact hole on a drain electrode of the interlayer insulating film so as to forming a pixel electrode on the interlayer insulating film so that the pixel electrode is electrically connected with the drain electrode through the contact hole, and the step of after forming the contact hole on the interlayer insulating film, applying a surface treatment for cleaning the surface of the contact portion to the surface of the substrate including the surface of the drain electrode exposed from the contact hole.
    • 为了提供一种制造TFT阵列的方法和液晶显示装置,其中通过层间绝缘膜中的接触孔的像素电极和漏极的接触电阻率可以稳定在10E4OMEGA以下。 本发明的液晶显示装置的TFT的制造方法包括以下步骤:形成TFT,形成层间绝缘膜的步骤,其中使所述表面平坦,使得由TFT区域引起的电平差 在透明绝缘基板上消除了在层间绝缘膜的漏电极上设置接触孔的步骤,以在层间绝缘膜上形成像素电极,使得像素电极通过与漏极电连接而电连接 所述接触孔以及在所述层间绝缘膜上形成所述接触孔之后的步骤,对所述接触部的表面进行表面处理,将所述接触部的表面进行表面处理,所述表面处理包括从所述接触孔露出的所述漏电极的表面。
    • 56. 发明申请
    • VECTOR GENERATION DEVICE, VECTOR GENERATING METHOD, AND INTEGRATED CIRCUIT
    • 矢量生成装置,矢量生成方法和集成电路
    • US20090165085A1
    • 2009-06-25
    • US11568318
    • 2006-02-21
    • Ken NakaKazunori InoueMikio Morioka
    • Ken NakaKazunori InoueMikio Morioka
    • H04L9/32G06F17/15G06F17/16
    • G06K9/00885G06F21/32G07C9/00158
    • An object of the invention is to provide a vector generation apparatus, a vector generation method, and an integrated circuit for generating data (vector) as a basis for authentication processing such as biometric authentication while protecting information that can be authenticated at high speed using the resources of a server and should be handled as secrete information typified by a biometric template against secondary use.A terminal 100 includes a reception section 101 for receiving a feature extraction vector as a first vector from the outside; a storage section 102 for storing a biometric template vector as a second vector; a vector computation section 103 for calculating a correlation efficient between the first vector and the second vector and generating a third vector different from the second vector, with the correlation coefficient matching the correlation efficient; and a transmission section 104 for transmitting the third vector to a server 10.
    • 本发明的目的是提供一种矢量生成装置,矢量生成方法和用于生成数据(矢量)的集成电路,作为用于诸如生物认证的认证处理的基础,同时保护可以高速认证的信息,使用 服务器的资源,应以生物识别模板为代表的隔离信息进行处理,防止二次使用。 终端100包括:接收部分101,用于从外部接收特征提取矢量作为第一矢量; 存储部102,用于存储作为第二矢量的生物体模板矢量; 矢量计算部分103,用于计算第一矢量和第二矢量之间的相关效率,并产生与第二矢量不同的第三矢量,相关系数与相关效率相匹配; 以及用于将第三矢量发送到服务器10的发送部分104。
    • 60. 发明申请
    • Etchant and method of etching
    • 蚀刻剂和蚀刻方法
    • US20060189123A1
    • 2006-08-24
    • US11289382
    • 2005-11-30
    • Noriyuki SaitouTakuji YoshidaKazunori InoueMakoto IshikawaYoshio Kamiharaguchi
    • Noriyuki SaitouTakuji YoshidaKazunori InoueMakoto IshikawaYoshio Kamiharaguchi
    • H01L21/4763H01L21/302
    • C23F1/44C23F1/20C23F1/26H01L21/32134
    • A fine wiring line profile with satisfactory precision is formed from a multilayer film containing a first layer made of an aluminum alloy and a second layer formed thereon made of a molybdenum-niobium alloy, by simultaneously etching the two layers constituting the multilayer film through only one etching operation while preventing the upper layer from forming overhangs. An etchant for etching a multilayer film containing an aluminum alloy layer formed over a substrate and a molybdenum-niobium alloy layer formed thereon having a niobium content of 2-19% by weight contains an aqueous solution of an acid mixture containing phosphoric acid, nitric acid, and an organic acid; and a method of etching is carried out with this etchant. The etchant preferably has a phosphoric acid concentration Np of 50-75% by weight, a nitric acid concentration Nn of 2-15% by weight, and an acid ingredient concentration defined by Np+(98/63)Nn of 55-85% by weight.
    • 由含有由铝合金制成的第一层和由钼铌合金构成的第二层的多层膜通过仅通过一个同时蚀刻构成多层膜的两层形成精细的布线线廓 同时防止上层形成悬垂。 用于蚀刻含有在基材上形成的铝合金层的多层膜的蚀刻剂和其上形成的铌含量为2〜19重量%的钼 - 铌合金层含有含有磷酸,硝酸的酸混合物的水溶液 ,和有机酸; 并且用该蚀刻剂进行蚀刻的方法。 蚀刻剂的磷酸浓度优选为50〜75重量%,硝酸浓度N 2〜2重量%,酸成分 浓度由55-85%(重量)的N + P +(98/63)N 所定义。