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51. 发明申请

US20130025718A1 MIXED GAS SUPPLY APPARATUS 有权
标题翻译：混合气体供应装置
公开(公告)号：US20130025718A1
公开(公告)日：2013-01-31
申请号：US13520824
申请日：2010-10-22
申请人： Masaaki Nagase , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
发明人： Masaaki Nagase , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
IPC分类号： F17D1/00
CPC分类号： B01J4/02 , G05D11/132 , H01L21/67017 , Y10T137/87249
摘要： A mixed gas supply device includes a plurality of gas supply lines arranged in parallel that include flow rate control devices and outlet side switching valves, wherein gas outlets of respective outlet side switching valves communicate with a manifold, and another gas supply line at a position close to a mixed gas outlet of the manifold supplies a low flow rate gas, wherein an outlet side of the flow rate control device and an inlet side of the outlet side switching valve are hermetically connected via an outlet side connecting fitting of the flow rate control device and a mounting table having a gas passage, wherein a small hole portion is provided at a part of a flow passage at the outlet side connecting fitting and/or a flow passage, which makes the outlet side switching valve and a mixed gas flow passage in the manifold communicate with one another.
摘要翻译：混合气体供给装置包括并列布置的多个气体供给管线，包括流量控制装置和出口侧切换阀，其中各个出口侧切换阀的气体出口与歧管连通，另一个气体供给管线位于关闭位置到歧管的混合气体出口供给低流量气体，其中流量控制装置的出口侧和出口侧切换阀的入口侧经由流量控制装置的出口侧连接配件气密地连接以及具有气体通道的安装台，其中在出口侧连接配件和/或流路的流路的一部分处设置有小孔部，其使出口侧切换阀和混合气体流路成为歧管彼此通信。

52. 发明授权

US07945414B2 Method for detecting abnormality in fluid supply line using fluid control apparatus with pressure sensor 有权
标题翻译：使用带压力传感器的流体控制装置检测流体供应管线异常的方法
公开(公告)号：US07945414B2
公开(公告)日：2011-05-17
申请号：US12065438
申请日：2006-08-28
申请人： Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino , Kaoru Hirata , Katsuyuki Sugita , Atsushi Matsumoto
发明人： Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino , Kaoru Hirata , Katsuyuki Sugita , Atsushi Matsumoto
IPC分类号： G06F3/48
CPC分类号： G01F1/42 , F16K37/0091 , G05D7/0635
摘要： A method for detecting abnormality in a fluid supply line is provided that uses a fluid control apparatus with a pressure sensor so that abnormality of malfunction and sheet leaks of a plurality of valves incorporated into the fluid supply line can be checked easily, promptly and accurately by operating the flow rate control apparatus possessing the pressure sensor. Specifically, using a fluid supply line provided with the flow rate control apparatus possessing the pressure sensor equipped with a flow rate setting mechanism, a flow rate/pressure display mechanism, and/or a flow rate self-diagnosis mechanism, abnormality of the control valves, installed with the flow rate control apparatus and on the upstream side and downstream side thereof, is detected by using the pressure value displayed and/or the value diagnosed with a self-diagnosis mechanism of the flow rate control apparatus.
摘要翻译：提供了一种用于检测流体供应管线中的异常的方法，其使用具有压力传感器的流体控制装置，使得能够容易地，迅速和准确地检查结合到流体供应管线中的多个阀的故障和片材泄漏的异常操作具有压力传感器的流量控制装置。具体而言，使用设有具有流量设定机构，流量/压力显示机构和/或流量自诊断机构的压力传感器的流量控制装置的流体供给管线，控制阀的异常通过使用显示的压力值和/或用流量控制装置的自诊断机构诊断的值来检测安装有流量控制装置并且在其上游侧和下游侧。

53. 发明授权

US09638560B2 Calibration method and flow rate measurement method for flow rate controller for gas supply device 有权
公开(公告)号：US09638560B2
公开(公告)日：2017-05-02
申请号：US13813219
申请日：2011-06-28
申请人： Masaaki Nagase , Nobukazu Ikeda , Yohei Sawada , Tooru Hirai , Kazuyuki Morisaki , Kouji Nishino , Ryousuke Dohi
发明人： Masaaki Nagase , Nobukazu Ikeda , Yohei Sawada , Tooru Hirai , Kazuyuki Morisaki , Kouji Nishino , Ryousuke Dohi
IPC分类号： G01F1/34 , G01F7/00 , G01F15/00 , G01F25/00 , G05D7/06
CPC分类号： G01F7/005 , G01F1/34 , G01F15/002 , G01F15/005 , G01F25/0053 , G05D7/0652 , Y10T137/0324
摘要： In a gas supply device supplying many different gases to a gas use portion through many flow rate controllers, a flow rate controller calibration unit includes a build-up tank with inner volume, an inlet side on-off valve and an outlet side on-off valve V2 of the tank, and a gas pressure detector and a gas temperature detector for gas inside the tank, joined in a branched form to a gas supply line, with the valve V2 connected to vacuum. The calibration unit is used to calibrate a flow rate controller based on performing a first measurement of gas temperature and pressure inside the tank, and then building-up gas into the tank, and then performing a second measurement of gas temperature and pressure, and from respective measured values, calculating gas flow rate Q and by comparing a set gas flow rate and calculated gas flow rate Q, performing flow rate calibration.

54. 发明授权

US08931506B2 Gas supply apparatus equipped with vaporizer 有权
标题翻译：配有蒸发器的供气装置
公开(公告)号：US08931506B2
公开(公告)日：2015-01-13
申请号：US12935870
申请日：2009-02-17
申请人： Atsushi Nagata , Masaaki Nagase , Atsushi Hidaka , Kaoru Hirata , Atsushi Matsumoto , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda
发明人： Atsushi Nagata , Masaaki Nagase , Atsushi Hidaka , Kaoru Hirata , Atsushi Matsumoto , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda
IPC分类号： F16K49/00 , B01J4/02 , B01B1/00 , C23C16/448 , C23C16/455 , F02M21/06 , F02M21/02 , F02D19/02
CPC分类号： B01J4/02 , B01B1/005 , B01J2219/00162 , B01J2219/00164 , B01J2219/00191 , B01J2219/00198 , B01J2219/00213 , B01J2219/00231 , C23C16/4481 , C23C16/4485 , C23C16/45561 , F02D19/023 , F02D19/027 , F02M21/0239 , F02M21/06 , Y02T10/32 , Y10T137/6416 , Y10T137/6606
摘要： An energy-saving, downsized gas supply apparatus equipped with a vaporizer is provided, wherein the gas supply apparatus is capable of stably and easily performing highly accurate gas flow rate control without requiring rigorous temperature control on the vaporizer side. The present invention pertains to a gas supply apparatus equipped with a vaporizer that includes (a) a liquid receiving tank; (b) a vaporizer that vaporizes liquid; (c) a high-temperature type pressure type flow rate control device that adjusts a flow rate of a vaporized gas; and (d) heating devices that heat the vaporizer, the high-temperature type pressure type flow rate control device, and desired portions of pipe passages connected to the vaporizer and the high-temperature type pressure type flow rate control device.
摘要翻译：提供一种配备有蒸发器的节能的小型化气体供给装置，其中，气体供给装置能够稳定且容易地进行高精度的气体流量控制，而无需对蒸发器侧进行严格的温度控制。本发明涉及一种配备有蒸发器的气体供给装置，该蒸发器包括：（a）液体接收罐; （b）蒸发液体的蒸发器; （c）调节汽化气体的流量的高温型压力式流量控制装置; 以及（d）加热蒸发器，高温型压力式流量控制装置以及连接到蒸发器和高温型压力式流量控制装置的管道的期望部分的加热装置。

55. 发明授权

US08601976B2 Gas supply system for semiconductor manufacturing facilities 有权
标题翻译：半导体制造设备供气系统
公开(公告)号：US08601976B2
公开(公告)日：2013-12-10
申请号：US12680159
申请日：2008-07-17
申请人： Kouji Nishino , Ryousuke Dohi , Masaaki Nagase , Kaoru Hirata , Katsuyuki Sugita , Nobukazu Ikeda
发明人： Kouji Nishino , Ryousuke Dohi , Masaaki Nagase , Kaoru Hirata , Katsuyuki Sugita , Nobukazu Ikeda
IPC分类号： C23C16/52 , H01L21/306 , C23F1/00 , C23C16/06 , C23C16/22
CPC分类号： C23C16/455 , C23C16/45561 , C23C16/52
摘要： A gas supply system includes a main gas supply line; a vent gas supply line; a plurality of gas supply mechanisms disposed in middle of both gas supply lines; a pressure type flow-rate control system disposed on an inlet side of the main gas supply line so a flow of carrier gas is supplied to the main gas supply line; a pressure control system disposed on an inlet side of the vent gas supply line, a carrier gas having a predetermined pressure is supplied to the vent gas supply line while the pressure control system performs a pressure adjustment, a gas pressure of the main gas supply line detected downstream from an orifice of the pressure type flow-rate control system and a gas pressure of the vent gas supply line are compared, and the gas pressure of the vent gas supply line is adjusted so a difference therebetween becomes zero.
摘要翻译：气体供应系统包括主气供应管线; 排气供气管线; 设置在两个气体供给管线的中间的多个气体供给机构; 压力型流量控制系统，设置在主气体供给管线的入口侧，从而将载气流供应到主气体供应管线; 设置在排出气体供给管路的入口侧的压力控制系统，在压力控制系统进行压力调整，主气体供给管线的气体压力的情况下，将具有规定压力的载气供给到排气供给管线从压力式流量控制系统的孔口下游检测出气体供给管路的气体压力，调整排出气体供给管路的气体压力，使其间的差为零。

56. 发明申请

US20090326719A1 METHOD FOR DETECTING ABNORMALITY IN FLUID SUPPLY LINE USING FLUID CONTROL APPARATUS WITH PRESSURE SENSOR 有权
标题翻译：使用压力传感器的流体控制装置检测流体输送管线异常的方法
公开(公告)号：US20090326719A1
公开(公告)日：2009-12-31
申请号：US12065438
申请日：2006-08-28
申请人： Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino , Kaoru Hirata , Katsuyuki Sugita , Atsushi Matsumoto
发明人： Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino , Kaoru Hirata , Katsuyuki Sugita , Atsushi Matsumoto
IPC分类号： G05D7/06 , G06F3/048
CPC分类号： G01F1/42 , F16K37/0091 , G05D7/0635
摘要： A method for detecting abnormality in a fluid supply line is provided that uses a fluid control apparatus with a pressure sensor so that abnormality of malfunction and sheet leaks of a plurality of valves incorporated into the fluid supply line can be checked easily, promptly and accurately by operating the flow rate control apparatus possessing the pressure sensor. Specifically, using a fluid supply line provided with the flow rate control apparatus possessing the pressure sensor equipped with a flow rate setting mechanism, a flow rate/pressure display mechanism, and/or a flow rate self-diagnosis mechanism, abnormality of the control valves, installed with the flow rate control apparatus and on the upstream side and downstream side thereof. is detected by using the pressure value displayed and/or the value diagnosed with a self-diagnosis mechanism of the flow rate control apparatus.
摘要翻译：提供了一种用于检测流体供应管线中的异常的方法，其使用具有压力传感器的流体控制装置，使得能够容易地，迅速和准确地检查结合到流体供应管线中的多个阀的故障和片材泄漏的异常操作具有压力传感器的流量控制装置。具体而言，使用设有具有流量设定机构，流量/压力显示机构和/或流量自诊断机构的压力传感器的流量控制装置的流体供给管线，控制阀的异常安装有流量控制装置，并且在其上游侧和下游侧。通过使用显示的压力值和/或用流量控制装置的自诊断机构诊断的值来检测。

57. 发明申请

US20130319551A1 OPENING DEGREE DETECTION DEVICE FOR AUTOMATICALLY OPERATED VALVE 有权
标题翻译：用于自动操作阀的开启程度检测装置
公开(公告)号：US20130319551A1
公开(公告)日：2013-12-05
申请号：US13988836
申请日：2011-11-17
申请人： Ryousuke Dohi , Atsuo Tomita , Kouji Nishino , Yohei Sawada , Nobukazu Ikeda
发明人： Ryousuke Dohi , Atsuo Tomita , Kouji Nishino , Yohei Sawada , Nobukazu Ikeda
IPC分类号： F16K37/00
CPC分类号： F16K37/0041 , F16K31/1221 , F16K37/00 , F16K37/0083 , Y10T137/8158 , Y10T137/8242
摘要： To provide an opening degree detection device for an automatically operated valve which is easily assembled into an automatically operated valve, makes it easy to ensure detection accuracy at the time of assembling the opening degree detection device, and is easily applicable to an existing automatically operated valve. The opening degree detection device includes: a base plate 4 which is detachably mounted on an automatically operated valve 2; a displacement sensor 5; and a target 6 having an inclined detection surface 6a which is detected by the displacement sensor 5. The target 6 is fixed to the base plate 4. The displacement sensor 5 is supported on a valve stem 14 by way of a sensor support member 21, and the sensor support member 21 is supported on the base plate 4 by way of a guide means.
摘要翻译：为了提供易于组装成自动操作的阀的自动操作阀的开度检测装置，能够容易地确保组装开度检测装置时的检测精度，并且容易应用于现有的自动操作阀。开度检测装置包括：可拆卸地安装在自动操作的阀2上的基板4; 位移传感器5; 以及具有由位移传感器5检测出的倾斜检测面6a的目标6。目标6固定在基板4上。位移传感器5通过传感器支撑部件21支撑在阀杆14上，并且传感器支撑构件21通过引导装置支撑在基板4上。

58. 发明授权

US08587180B2 Pressure control valve driving circuit for pressure type flow rate control device with flow rate self-diagnosis function 有权
标题翻译：压力式流量控制装置的压力控制阀驱动电路具有流量自我诊断功能
公开(公告)号：US08587180B2
公开(公告)日：2013-11-19
申请号：US12989614
申请日：2009-02-18
申请人： Katsuyuki Sugita , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Kaoru Hirata , Takatoshi Nakatani
发明人： Katsuyuki Sugita , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Kaoru Hirata , Takatoshi Nakatani
IPC分类号： H01L41/09
CPC分类号： G05D7/0635 , Y10T137/7762
摘要： A pressure control valve piezoelectric element driving circuit is provided for a pressure type flow rate control device provided with a flow rate self-diagnosis function for comparing initial pressure drop characteristics data measured and with pressure drop characteristics data in a flow rate diagnosis which are measured under conditions that are the same for both measurements to detect malfunction in flow rate control from a difference between both characteristics data, wherein a first discharge circuit slowly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a step-down command signal from a CPU, through a step-down command circuit to step down the voltage, and a second discharge circuit that rapidly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a high-speed step-down command signal from the CPU, through a high-speed step-down command circuit to step down the voltage.
摘要翻译：为压力式流量控制装置设置压力式流量控制装置，该压力式流量控制装置具有用于比较测定的初始压降特性数据和流量诊断中的压降特性数据的流量自我诊断功能，两个测量结果相同的条件是根据两个特性数据之间的差异来检测流量控制的故障，其中第一放电电路根据来自一个压电元件的降压命令信号缓慢放电施加到压电元件的压电元件驱动电压 CPU通过降压指令电路降低电压，以及第二放电电路，其根据来自CPU的高速降压命令信号快速放电施加到压电元件的压电元件的驱动电压，通过高速降压指令电路降压。

59. 发明授权

US07654137B2 Corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed 失效
标题翻译：用于流体的耐腐蚀金属制传感器和使用传感器的流体供应装置
公开(公告)号：US07654137B2
公开(公告)日：2010-02-02
申请号：US10598290
申请日：2005-01-13
申请人： Kaoru Hirata , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi
发明人： Kaoru Hirata , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi
IPC分类号： G01F1/68
CPC分类号： G01L19/0023 , G01F1/6842 , G01F1/6845 , Y10T137/7761
摘要： The present invention provides a corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed.More specifically, the corrosion-resistant metal made sensor for fluid is equipped with a corrosion-resistant metal substrate, a mass flow rate sensor part comprising a corrosion resistant metal substrate, a thin film forming a temperature sensor and a heater mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and a pressure sensor part comprising a thin film forming a strain sensor element mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and the sensor is so constituted that the mass flow rate and pressure of the fluid are measured.
摘要翻译：本发明提供了用于流体的耐腐蚀金属制传感器和使用该传感器的流体供应装置。更具体地说，用于流体的耐腐蚀金属制传感器配备有耐腐蚀金属基板，包含耐腐蚀金属基板的质量流量传感器部件，形成温度传感器的薄膜和安装在背面上的加热器耐压金属基板的流体接触面的一侧，以及包含形成安装在耐腐蚀金属基板的流体接触面的背面侧的应变传感器元件的薄膜的压力传感器部，以及传感器如此构成，即测量流体的质量流量和压力。

60. 发明授权

US08757197B2 Automatic pressure regulator for flow rate regulator 有权
标题翻译：用于流量调节器的自动压力调节器
公开(公告)号：US08757197B2
公开(公告)日：2014-06-24
申请号：US12996370
申请日：2009-04-06
申请人： Kaoru Hirata , Katsuyuki Sugita , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda
发明人： Kaoru Hirata , Katsuyuki Sugita , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda
IPC分类号： F16K31/02
CPC分类号： G05D7/0635 , Y10T137/7761
摘要： The invention prevents overshoot from occurring in flow rate on the output side of a flow rate regulator when output flow rate is changed or the gas type distributed is changed. Thus, an automatic pressure regulator is provided to supply gas pressure to a flow rate regulator that includes a piezoelectric element driving type pressure regulating valve, a control pressure detector provided on the output side of the pressure regulating valve, and a controller to which a detected value P2 of the control pressure detector and a set value Pst for control pressure are input, wherein the controller supplies a control signal to a piezoelectric element driving unit of the pressure regulating valve using a proportional control system to perform valve opening regulation in which the proportional control system of the controller is set to control to bring about a residual deviation in control pressure by disabling an integral action.
摘要翻译：本发明防止了当流量改变或气体分布改变时流量调节器的输出侧的流量发生过冲。因此，提供了一种自动压力调节器，用于向包括压电元件驱动型压力调节阀的流量调节器，设置在压力调节阀的输出侧的控制压力检测器和控制器提供气体压力，输入控制压力检测器的值P2和用于控制压力的设定值Pst，其中控制器使用比例控制系统向压力调节阀的压电元件驱动单元提供控制信号，以执行阀开度调节，其中比例控制器的控制系统设置为通过禁用积分作用来控制控制压力的残留偏差。

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