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    • 54. 发明申请
    • POLISHING APPARATUS
    • 抛光装置
    • US20110034106A1
    • 2011-02-10
    • US12668065
    • 2008-06-24
    • Toshifumi KimbaHiroaki KusaMasaki Fujii
    • Toshifumi KimbaHiroaki KusaMasaki Fujii
    • B24B49/04B24B49/12
    • B24B49/12B24B9/065B24B37/005
    • A polishing apparatus is disclosed. The apparatus includes a stage (20) configured to hold a substrate W, a stage-rotating mechanism (40) configured to rotate the stage, a polishing head (42) configured to polish a periphery of the substrate held by the stage, a controller (70) configured to control operations of the stage (20), the stage-rotating mechanism (40), and the polishing head (42), an image-capturing device (61) configured to capture an image of the periphery of the substrate through at least one terminal imaging element (60) arranged so as to face the periphery of the substrate, an image processor (62) configured to process the image captured by the image-capturing device, and a liquid ejector (51) configured to eject a light-transmissive liquid toward the periphery of the substrate to fill a space between the periphery of the substrate and the terminal imaging element with the liquid.
    • 公开了一种抛光装置。 该装置包括:配置成保持基板W的台架(20),配置成旋转台架的台架旋转机构(40),配置成抛光由台架保持的基板的周边的抛光头(42),控制器 (70),被配置为控制所述载物台(20),所述载物台旋转机构(40)和所述抛光头(42)的操作;图像捕获装置(61),其构造成捕获所述基板的周边的图像 通过被配置为面对基板周边的至少一个终端成像元件(60),被配置为处理由图像捕获装置捕获的图像的图像处理器(62)和被配置为喷射的液体喷射器 透光液体朝向基板的周边,以用液体填充基板的周边与端子成像元件之间的空间。
    • 57. 发明授权
    • Fuel control system for engine
    • 发动机燃油控制系统
    • US5271368A
    • 1993-12-21
    • US43846
    • 1993-04-07
    • Masaki FujiiShigetoshi KawanoHideki Kobayashi
    • Masaki FujiiShigetoshi KawanoHideki Kobayashi
    • F02D29/04F02D41/12
    • F02D41/123
    • In a fuel control system of an engine having an air conditioner driven by the engine, fuel supply is cut during deceleration of the engine when the engine speed is higher than a first preset value with the air conditioner on and when the engine speed is higher than a second preset value with the air conditioner off, the first preset value being higher than the second preset value. When the air conditioner is turned off during the deceleration of the engine, fuel supply is cut when the engine speed is higher than the first preset value, and when the air conditioner is turned on during the deceleration of the engine, fuel supply is cut when the engine speed is higher than the second preset value.
    • 在具有由发动机驱动的空调的发动机的燃料控制系统中,当发动机转速高于第一预设值时,在发动机减速期间燃料供给被切断,并且当发动机转速高于 空调器关闭的第二预设值,第一预设值高于第二预设值。 当在发动机减速期间空调关闭时,当发动机转速高于第一预设值时,燃料供给被切断,并且当在发动机减速期间空调打开时,燃料供应被切断 发动机转速高于第二预设值。