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51. 发明申请

US20050185162A1 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus 失效
标题翻译：曝光装置，光学投影装置和调整光学投影装置的方法
公开(公告)号：US20050185162A1
公开(公告)日：2005-08-25
申请号：US11101553
申请日：2005-04-08
申请人： Masashi Tanaka , Masaki Kato
发明人： Masashi Tanaka , Masaki Kato
IPC分类号： G02B13/22 , G02B17/00 , G02B17/06 , G02B17/08 , G02B27/10 , G03F7/20 , G03B27/42
CPC分类号： G02B17/0892 , G02B13/22 , G02B17/002 , G02B17/008 , G02B17/045 , G02B17/0605 , G02B17/08 , G02B17/0812 , G02B17/082 , G02B17/0828 , G02B17/086 , G02B27/144 , G02B27/145 , G03B27/32 , G03F7/70066 , G03F7/70216 , G03F7/70225 , G03F7/70241 , G03F7/70275 , G03F7/70358 , G03F7/70791
摘要： An exposure apparatus includes a plurality of projection optical systems and a substrate stage. Each of the plurality of projection optical systems forms an exposure field on the substrate. The substrate stage holds the substrate and moves in at least a scanning direction extending in a straight line. The plurality of exposure fields are arranged along a direction crossing the scanning direction. The plurality of projection optical systems and the substrate relatively move during an exposure field forming operation along the scanning direction.
摘要翻译：曝光装置包括多个投影光学系统和基板台。多个投影光学系统中的每一个在基板上形成曝光场。基板台保持基板并沿至少沿直线延伸的扫描方向移动。多个曝光区域沿与扫描方向交叉的方向排列。多个投影光学系统和基板沿着扫描方向在曝光场形成操作期间相对移动。

52. 发明授权

US06567140B2 Liquid crystal display device provided with reflection sheet and method of fabricating reflection sheet 失效
标题翻译：设置有反射片的液晶显示装置和反射片的制造方法
公开(公告)号：US06567140B2
公开(公告)日：2003-05-20
申请号：US10228335
申请日：2002-08-27
申请人： Masashi Tanaka , Yukito Toriumi
发明人： Masashi Tanaka , Yukito Toriumi
IPC分类号： G02F11335
CPC分类号： G02F1/133553
摘要： The production of a defective liquid crystal display device is restrained and a yield of the liquid crystal display device is improved by detecting previously a flying of an adhesive on a reflection sheet of the liquid crystal display device. The liquid crystal display device comprises glass substrates, liquid crystal sealed between the glass substrates, and polarization films attached to the glass substrates and the like, wherein an adhesive for bonding the reflection sheet onto the back side of the liquid crystal display device is colored with a color which is different from that of the reflection sheet so as to easily visually recognize and detect the flying of the adhesive within an effective display region of the reflection sheet when the adhesive is printed.
摘要翻译：通过检测液晶显示装置的反射片上的粘合剂的飞行，可以抑制有缺陷的液晶显示装置的制造，提高液晶显示装置的成品率。液晶显示装置包括玻璃基板，密封在玻璃基板之间的液晶和附着到玻璃基板等的偏振膜，其中用于将反射片粘合到液晶显示装置的背面上的粘合剂着色为与反射片的颜色不同的颜色，以便在印刷粘合剂时容易地目视识别和检测在反射片的有效显示区域内的粘合剂的飞行。

53. 发明授权

US06556278B1 Exposure/imaging apparatus and method in which imaging characteristics of a projection optical system are adjusted 失效
标题翻译：调整投影光学系统的成像特性的曝光/成像装置和方法
公开(公告)号：US06556278B1
公开(公告)日：2003-04-29
申请号：US09722516
申请日：2000-11-28
申请人： Masashi Tanaka , Masato Kumazawa , Kinya Kato , Masaki Kato , Hiroshi Chiba , Hiroshi Shirasu
发明人： Masashi Tanaka , Masato Kumazawa , Kinya Kato , Masaki Kato , Hiroshi Chiba , Hiroshi Shirasu
IPC分类号： G03B2754
CPC分类号： G02B17/0892 , G02B13/22 , G02B17/002 , G02B17/008 , G02B17/045 , G02B17/0605 , G02B17/08 , G02B17/0812 , G02B17/082 , G02B17/0828 , G02B17/086 , G02B27/144 , G02B27/145 , G03B27/32 , G03F7/70066 , G03F7/70216 , G03F7/70225 , G03F7/70241 , G03F7/70275 , G03F7/70358 , G03F7/70791
摘要： An exposure/imaging apparatus and method effects projection exposure while moving a first object and a second object in a predetermined moving direction, effecting projection exposure of an image of the first object onto the second object. An adjusting member is used to adjust imaging characteristics of a projection optical system that is used to perform the projection exposure.
摘要翻译：曝光/成像装置和方法在预定的移动方向上移动第一物体和第二物体时实现投影曝光，从而将第一物体的图像投射到第二物体上。调整构件用于调整用于进行投影曝光的投影光学系统的成像特性。

54. 发明授权

US06480262B1 Illumination optical apparatus for illuminating a mask, method of manufacturing and using same, and field stop used therein 失效
标题翻译：用于照明面罩的照明光学装置，其制造和使用方法以及其中使用的野外停止
公开(公告)号：US06480262B1
公开(公告)日：2002-11-12
申请号：US09722278
申请日：2000-11-28
申请人： Masashi Tanaka , Kinya Kato , Masaki Kato
发明人： Masashi Tanaka , Kinya Kato , Masaki Kato
IPC分类号： G03B2754
CPC分类号： G02B17/0892 , G02B13/22 , G02B17/002 , G02B17/008 , G02B17/045 , G02B17/0605 , G02B17/08 , G02B17/0812 , G02B17/082 , G02B17/0828 , G02B17/086 , G02B27/144 , G02B27/145 , G03B27/32 , G03F7/70066 , G03F7/70216 , G03F7/70225 , G03F7/70241 , G03F7/70275 , G03F7/70358 , G03F7/70791
摘要： An illumination optical apparatus and method forms a plurality of illumination regions on a first object, and positional relationships between the plurality of illumination regions can be adjusted. An exposure apparatus that includes the illumination optical apparatus can, while moving the first object and a second object in a certain moving direction, effect projection exposure of an image of the first object onto the second object. The plurality of illumination regions can have polygon shapes. A field stop used in the illumination optical apparatus can have an aperture portion with first and second regions, the second region corresponding to an overlap region on the first object, wherein a transmittancy of the second region is smaller than a transmittancy of the first region.
摘要翻译：照明光学装置和方法在第一物体上形成多个照明区域，并且可以调整多个照明区域之间的位置关系。包括照明光学装置的曝光装置可以在第一物体和第二物体沿某一移动方向移动的同时，将第一物体的图像投射到第二物体上。多个照明区域可以具有多边形形状。在照明光学装置中使用的场停止件可以具有带有第一和第二区域的开口部分，第二区域对应于第一物体上的重叠区域，其中第二区域的透射率小于第一区域的透射率。

55. 发明授权

US06044052A Method and apparatus for high speed data recovery from CD-ROMs or like disks of varying qualities 失效
标题翻译：用于从具有不同质量的CD-ROM或类似盘进行高速数据恢复的方法和装置
公开(公告)号：US06044052A
公开(公告)日：2000-03-28
申请号：US345152
申请日：1999-06-30
申请人： Mitsumasa Kubo , Yuichi Sakamoto , Masashi Tanaka
发明人： Mitsumasa Kubo , Yuichi Sakamoto , Masashi Tanaka
IPC分类号： G11B7/09 , G11B7/095 , G11B19/04 , G11B3/90
CPC分类号： G11B19/04 , G11B7/09 , G11B7/0901 , G11B7/0908 , G11B7/095 , G11B7/0953 , G11B7/0956
摘要： CD-ROMS of more or less poor quality, such as those having eccentric center holes or uneven weight distributions circumferentially, tend to overload tracking and focusing servos and hence to invite read errors and retries. Each CD-ROM on being loaded into a CD-ROM drive is therefore checked as to its quality preparatory to reading. Either or both of the servos may fail to keep the read beam under control if the disk is not of good quality. Such unlocking of either or both servos is detected in terms of the number of transducer output pulses, the magnitude of transducer output voltage, or the number of read errors, during a complete disk revolution. Disk quality is first checked at four times the standard audio CD speed, then at eight times that speed, and finally at twelve times that speed. Disks of poor quality are read at two times the standard audio CD speed, those of below-average quality at four times that speed, those of above-average quality at eight times that speed, and those of good quality at twelve times that speed.
摘要翻译：质量差异较小的CD-ROMS（例如具有偏心中心孔或不均匀重量分布在周向上）倾向于过载跟踪和聚焦伺服，并因此引起读取错误和重试。因此，在加载到CD-ROM驱动器中的每个CD-ROM的质量准备阅读。如果磁盘质量不好，则伺服器中的任何一个或两个可能无法使读取光束受到控制。根据传感器输出脉冲的数量，换能器输出电压的大小或读取错误的数量，在完整的盘旋转期间检测这两个或两个伺服的这种解锁。磁盘质量首先是标准音频CD速度的四倍，然后是该速度的八倍，最后是该速度的十二倍。质量差的磁盘读取标准音频CD速度的两倍，低于平均质量的四倍速度，高于平均质量的八倍速度，以及高达十二倍的质量。

56. 发明授权

US5859707A Position detection apparatus and aligner comprising same 失效
标题翻译：位置检测装置和包括其的对准器
公开(公告)号：US5859707A
公开(公告)日：1999-01-12
申请号：US796320
申请日：1997-02-06
申请人： Masahiro Nakagawa , Ayako Sugaya , Masashi Tanaka , Koichiro Komatsu
发明人： Masahiro Nakagawa , Ayako Sugaya , Masashi Tanaka , Koichiro Komatsu
IPC分类号： G03F9/00 , G01B11/00
CPC分类号： G03F9/7065 , G03F9/7049
摘要： Position-detection apparatus (alignment sensors) are disclosed for determining the position of an object (e.g., wafer, bearing a position-detection mark) as required in microlithography processes for manufacturing semiconductor devices and displays. The apparatus comprises an irradiation optical system, a condenser optical system, a first photoelectric detector, a fiducial body bearing a fiducial mark, a combining optical system, a second photoelectric detector, and a processor. The position-detection and fiducial marks are illuminated with coherent illumination light from the irradiation optical system. Light diffracted from the marks is condensed by the condenser optical system. The first photoelectric detector receives the condensed diffracted light and produces first electrical signals. The combining optical system receives the diffracted light from the fiducial mark. The second photoelectric detector receives multiple diffracted light beams from the fiducial mark and produces second electrical signals. From the electrical signals, the processor determines the position of the position-detection mark relative to the fiducial mark.
摘要翻译：公开了用于在用于制造半导体器件和显示器的微光刻工艺中根据需要确定物体（例如，晶片，承载位置检测标记）的位置的位置检测装置（对准传感器）。该装置包括照射光学系统，聚光镜系统，第一光电检测器，具有基准标记的基准体，组合光学系统，第二光电检测器和处理器。位置检测和基准标记被来自照射光学系统的相干照明光照射。从标记衍射的光被冷凝光学系统冷凝。第一光电检测器接收冷凝的衍射光并产生第一电信号。组合光学系统接收来自基准标记的衍射光。第二光电检测器从基准标记接收多个衍射光束并产生第二电信号。从电信号，处理器确定位置检测标记相对于基准标记的位置。

57. 发明授权

US5729331A Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus 失效
公开(公告)号：US5729331A
公开(公告)日：1998-03-17
申请号：US453538
申请日：1995-05-30
申请人： Masashi Tanaka , Masato Kumazawa , Kinya Kato , Masaki Kato , Hiroshi Chiba , Hiroshi Shirasu
发明人： Masashi Tanaka , Masato Kumazawa , Kinya Kato , Masaki Kato , Hiroshi Chiba , Hiroshi Shirasu
IPC分类号： G02B13/22 , G02B17/00 , G02B17/06 , G02B17/08 , G02B27/10 , G03F7/20 , H01L21/027 , G03F7/22
CPC分类号： G02B17/0892 , G02B13/22 , G02B17/002 , G02B17/008 , G02B17/045 , G02B17/0605 , G02B17/08 , G02B17/0812 , G02B17/082 , G02B17/0828 , G02B17/086 , G02B27/144 , G02B27/145 , G03B27/32 , G03F7/70066 , G03F7/70216 , G03F7/70225 , G03F7/70241 , G03F7/70275 , G03F7/70358 , G03F7/70791
摘要： There is disclosed an exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of the first object onto the second object.

58. 发明授权

US5581232A Ultrasonic wave reception apparatus and obstacle detection apparatus 失效
标题翻译：超声波接收装置和障碍物检测装置
公开(公告)号：US5581232A
公开(公告)日：1996-12-03
申请号：US77639
申请日：1993-06-17
申请人： Takashi Tanaka , Masashi Tanaka , Yoichi Taniguchi , Shigeru Ito
发明人： Takashi Tanaka , Masashi Tanaka , Yoichi Taniguchi , Shigeru Ito
IPC分类号： B60R21/00 , B60R21/16 , B60W30/00 , G01H11/00 , G01H11/06 , G01S7/521 , G01S15/04 , G01S15/10 , G01S15/93 , B60Q1/00
CPC分类号： G01S15/931 , G01H11/06 , G01S7/521 , G01S2015/938
摘要： An obstacle detection apparatus includes a rubber-like elastic body interspersed with electroconductive particles, and means for applying a voltage to the rubber-like elastic body to obtain an ultrasonic wave reception signal from a change in electrical resistance of the elastic body. An ultrasonic wave transmission apparatus is mounted on a support member for transmitting an ultrasonic wave outward. The rubber-like elastic body interspersed with electroconductive particles is provided along an outer periphery of the support member, and a voltage is applied to the rubber-like elastic body to obtain an ultrasonic wave reception signal from a change in electrical resistance of the elastic body as a result of receiving the ultrasonic wave reflected from an obstacle.
摘要翻译：障碍物检测装置包括散布有导电颗粒的橡胶状弹性体，以及用于向橡胶状弹性体施加电压以从弹性体的电阻变化中获得超声波接收信号的装置。超声波传输装置安装在用于向外发送超声波的支撑构件上。散布有导电颗粒的橡胶状弹性体沿着支撑构件的外周设置，并且向橡胶状弹性体施加电压，以从弹性体的电阻变化中获得超声波接收信号作为接收从障碍物反射的超声波的结果。

59. 发明授权

US5550290A Benzidine derivative and electrophotosensitive material using the same 失效
标题翻译：联苯胺衍生物和使用它们的电光敏材料
公开(公告)号：US5550290A
公开(公告)日：1996-08-27
申请号：US314375
申请日：1994-09-28
申请人： Yasufumi Mizuta , Masashi Tanaka , Nariaki Muto , Toshiyuki Fukami , Hideo Nakamori , Mikio Kakui , Sakae Saito , Hiroshi Shiomi , Keisuke Sumida , Maki Uchida
发明人： Yasufumi Mizuta , Masashi Tanaka , Nariaki Muto , Toshiyuki Fukami , Hideo Nakamori , Mikio Kakui , Sakae Saito , Hiroshi Shiomi , Keisuke Sumida , Maki Uchida
IPC分类号： C07C211/54 , G03G5/06 , C07C217/92
CPC分类号： C07C211/54 , G03G5/0614
摘要： The present invention relates to a benzidine derivative represented by the general formula (1): ##STR1## wherein R.sup.1 to R.sup.6, m and n are as defined in the present specification. The benzidine derivative improves durability and heat resistance of a membrane containing the same while maintaining high hole transferring capability. Therefore, an electrophotosensitive material, which comprises a photosensitive layer containing the benzidine derivative, has high sensitivity and is superior in durability and heat resistance.
摘要翻译：本发明涉及由通式（1）表示的联苯胺衍生物：其中R1至R6，m和n如本说明书中所定义。联苯胺衍生物在保持高空穴转移能力的同时提高了含有该组合物的膜的耐久性和耐热性。因此，包含含有联苯胺衍生物的感光层的电光敏材料具有高灵敏度，耐久性和耐热性优异。

60. 发明授权

US5408298A Image forming apparatus 失效
标题翻译：图像形成装置
公开(公告)号：US5408298A
公开(公告)日：1995-04-18
申请号：US202362
申请日：1994-02-25
申请人： Toshiyuki Fukami , Masashi Tanaka
发明人： Toshiyuki Fukami , Masashi Tanaka
IPC分类号： G03G5/05 , G03G5/06 , G03G13/02 , G03G15/02 , G03G21/00
CPC分类号： G03G5/0517 , G03G13/02 , G03G15/0291 , G03G5/0609
摘要： The image forming apparatus in this invention uses a positive corona discharger as a main charger. A photosensitive material having a charge accepting ability per run-off current of at least 40 V/.mu.A from a corona discharger (measured by using a discharge length of 230 mm and by taking the peripheral speed of the photosensitive material as 48 mm/sec) is used, and a DC voltage is impressed on the positive corona discharger so that the average ozone concentration of an atmosphere of the photosensitive material 2 ppm or less and the ozone concentration immediately below the corona discharger becomes 5 ppm or less to perform main charging. According to this apparatus, the amount generated of ozone can be decreased, and charging unevenness can be prevented to form a good image.
摘要翻译：本发明的图像形成装置使用正电晕放电器作为主充电器。具有从电晕放电器（通过使用230mm的放电长度测量并通过以感光材料的圆周速度测量为48mm / sec）的每个流过电流为至少40V /μA的电荷接受能力的感光材料），并且在正电晕放电器上施加DC电压，使得感光材料的气氛的平均臭氧浓度为2ppm以下，电晕放电器正下方的臭氧浓度为5ppm以下，进行主充电。根据该装置，可以减少臭氧产生的量，并且可以防止充电不均匀以形成良好的图像。

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