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51. 发明授权

US06544111B1 Polishing apparatus and polishing table therefor 有权
标题翻译：抛光设备及抛光台
公开(公告)号：US06544111B1
公开(公告)日：2003-04-08
申请号：US09485862
申请日：2000-02-17
申请人： Norio Kimura , Yu Ishii
发明人： Norio Kimura , Yu Ishii
IPC分类号： B24B722
CPC分类号： B24B37/11 , B24B37/015
摘要： A polishing apparatus can strictly control the degree of material removal by providing close control over the operating temperature in the polishing table (12). The polishing apparatus has a polishing table (12) and a workpiece holder (14) for pressing a workpiece (W) towards the polishing table (12). The polishing table (12) has a polishing section (30) or a polishing tool attachment section at a surface thereof and a thermal medium passage (32) formed along the surface. The thermal medium passage (32) has a plurality of temperature adjustment passages provided respectively in a plurality of temperature adjustment regions which are formed by radially dividing a surface area of the polishing table (12).
摘要翻译：抛光装置可以通过对抛光台（12）中的工作温度进行紧密控制来严格控制材料去除的程度。抛光装置具有用于将工件（W）朝向抛光台（12）按压的研磨台（12）和工件保持器（14）。抛光台（12）的表面具有抛光部（30）或抛光工具安装部，沿着表面形成有热介质通路（32）。热介质通道（32）具有多个温度调节通道，分别设置在通过径向分割抛光台（12）的表面积而形成的多个温度调节区域中。

52. 发明授权

US06439980B1 Workpiece carrier and polishing apparatus having workpiece carrier 失效
标题翻译：具有工件载体的工件载体和抛光装置
公开(公告)号：US06439980B1
公开(公告)日：2002-08-27
申请号：US09679307
申请日：2000-10-06
申请人： Norio Kimura
发明人： Norio Kimura
IPC分类号： B24B500
CPC分类号： B24B37/30 , B24B41/042
摘要： A workpiece carrier has a top ring body for holding a workpiece, a drive shaft for rotating the top ring body and moving the top ring body toward a turntable to press the workpiece against a polishing surface, and a universal joint for transmitting a pressing force from the drive shaft to the top ring body while allowing the drive shaft and the top ring body to be tilted relative to each other. The universal joint includes two members having curved surfaces formed along arcs having a predetermined radius of curvature from a center positioned on a surface of the workpiece which is held in contact with the polishing surface on the turntable, and four rollers held in rolling contact with the curved surfaces. Two of the rollers held in rolling contact with each respective two of the curved surfaces to allow the top ring body to be tilted relative to the drive shaft about a point positioned on the surface which is held in contact with the polishing surface on the turntable.
摘要翻译：工件托架具有用于保持工件的顶环体，用于使顶环体旋转的驱动轴，并将顶环体朝向转盘移动，以将工件压靠在研磨面上;以及万向节，用于将压力从驱动轴到顶环体，同时允许驱动轴和顶环体相对于彼此倾斜。万向接头包括两个构件，其具有沿着弧形形成的弯曲表面，该弧形表面具有预定的曲率半径，该中心位于工件的与转台上的抛光表面保持接触的表面上的中心，并且保持与滚子接触的四个辊曲面。两个辊保持与每个相应的两个弯曲表面滚动接触，以允许顶环体相对于驱动轴倾斜，位于与转台上的抛光表面保持接触的表面上的点上。

53. 发明授权

US06328629B1 Method and apparatus for polishing workpiece 失效
标题翻译：抛光工件的方法和设备
公开(公告)号：US06328629B1
公开(公告)日：2001-12-11
申请号：US09026122
申请日：1998-02-19
申请人： Tetsuji Togawa , Norio Kimura , Koji Ono
发明人： Tetsuji Togawa , Norio Kimura , Koji Ono
IPC分类号： B24B4908
CPC分类号： B24B37/30 , B24B37/0053 , B24B37/013 , B24B49/08 , B24B49/16
摘要： A workpiece such as a semiconductor wafer is held by a top ring, and a lower surface of the workpiece is polished to a flat mirror finish by being pressed against a polishing surface of the turntable while the top ring and the turntable are rotated. While the workpiece is being polished, at least one of the pressure and the flow rate of a fluid which is supplied to an upper surface of the workpiece is detected. When at least one of the detected pressure and the detected flow rate changes, the polishing of the workpiece is stopped.
摘要翻译：诸如半导体晶片的工件由顶环保持，并且当顶环和转盘旋转时，通过被压靠在转盘的抛光表面上而将工件的下表面抛光成平坦的镜面。当工件被抛光时，检测供给到工件的上表面的流体的压力和流速中的至少一个。当检测到的压力和检测到的流量中的至少一个改变时，停止对工件的抛光。

54. 发明授权

US06196903B1 Workpiece carrier and polishing apparatus having workpiece carrier 失效
标题翻译：具有工件载体的工件载体和抛光装置
公开(公告)号：US06196903B1
公开(公告)日：2001-03-06
申请号：US09210899
申请日：1998-12-16
申请人： Norio Kimura
发明人： Norio Kimura
IPC分类号： B24B2900
CPC分类号： B24B37/30 , B24B41/042
摘要： A workpiece carrier has a top ring body for holding a workpiece, a drive shaft for rotating the top ring body and moving the top ring body toward a turntable to press the workpiece against a polishing surface, and a universal joint for transmitting a pressing force from the drive shaft to the top ring body while allowing the drive shaft and the top ring body to be tilted relatively to each other. The universal joint includes two members having curved surfaces formed along arcs having a predetermined radius of curvature from a center positioned on a surface of the workpiece which is held in contact with the polishing surface on the turntable, and four rollers held in rolling contact with the curved surfaces. Two of the rollers are held in rolling contact with each respective two of the curved surfaces to allow the top ring body to be tilted relatively to the drive shaft about a point positioned on the surface which is held in contact with the polishing surface on the turntable.
摘要翻译：工件托架具有用于保持工件的顶环体，用于使顶环体旋转的驱动轴，并将顶环体朝向转盘移动，以将工件压靠在研磨面上;以及万向节，用于将压力从驱动轴到顶环体，同时允许驱动轴和顶环体相对于彼此倾斜。万向接头包括两个构件，其具有沿着弧形形成的弯曲表面，该弧形表面具有预定的曲率半径，该中心位于工件的与转台上的抛光表面相接触的表面上的中心，以及与滚子接触的四个辊曲面。两个辊子与每个相应的两个弯曲表面保持滚动接触，以允许顶环体相对于驱动轴倾斜，位于与转台上的抛光表面保持接触的表面上的点上。

55. 发明授权

US6002543A Receiving apparatus and method for selectively receiving and recording image data in response to setting of an automatic receiving mode and reproducing image data in response to a manual instruction 失效
标题翻译：响应于自动接收模式的设置和响应于手动指令再现图像数据而选择性地接收和记录图像数据的接收装置和方法
公开(公告)号：US6002543A
公开(公告)日：1999-12-14
申请号：US466512
申请日：1995-06-06
申请人： Tsuguhide Sakata , Tomishige Taguchi , Norio Kimura , Kunio Tsuruno , Masahiro Takei , Yasutomo Suzuki
发明人： Tsuguhide Sakata , Tomishige Taguchi , Norio Kimura , Kunio Tsuruno , Masahiro Takei , Yasutomo Suzuki
IPC分类号： G11B19/02 , G11B19/04 , G11B19/12 , H04N1/00 , H04N1/32 , G11B5/55
CPC分类号： H04N1/00405 , G11B19/022 , G11B19/04 , G11B19/12 , H04N1/00408 , H04N1/0049 , H04N1/2158 , H04N1/2323 , H04N1/32358 , H04N1/32379 , H04N2201/0098 , H04N2201/214 , H04N2201/3298
摘要： There is a receiving apparatus in which the received data is recorded by a recording head which accesses each portion of a recording medium. This receiving apparatus comprises: a discriminating circuit to discriminate whether the portion accessed by the recording head is the recorded portion or the unrecorded portion upon reception; and a control circuit for allowing the recording head to access the unrecorded portion on the basis of the result of the discrimination of the discriminating circuit. Upon reception, the control circuit controls the recording head so as to automatically access the unrecorded portion. Further, upon reception, an amount of unrecorded portions is displayed.
摘要翻译：存在一个接收装置，其中所接收的数据由访问记录介质的每个部分的记录头记录。该接收装置包括：鉴别电路，用于鉴别在接收时由记录头访问的部分是记录部分还是未记录部分; 以及控制电路，用于根据识别电路的鉴别结果，允许记录头访问未记录部分。接收时，控制电路控制记录头，以便自动访问未记录部分。此外，在接收时，显示未记录部分的量。

56. 发明授权

US5989107A Method for polishing workpieces and apparatus therefor 失效
标题翻译：抛光工件的方法及其设备
公开(公告)号：US5989107A
公开(公告)日：1999-11-23
申请号：US857252
申请日：1997-05-16
申请人： Noburu Shimizu , Norio Kimura
发明人： Noburu Shimizu , Norio Kimura
IPC分类号： B24B27/00 , B24B37/04 , B24B37/07 , B24B37/10 , B24B37/11 , B24B1/00
CPC分类号： B24B37/042 , B24B27/0023 , B24B37/07 , B24B37/10 , B24B37/11
摘要： A polishing method and a compact apparatus for the method are presented for efficient production of a polished workpiece for manufacturing high technology devices. The polishing method comprises a first and second steps for polishing a work surface. In the first polishing step, the work surface is pressed against an abrading surface of a first polishing tool which is being rotated. In the second step, the work surface is pressed against a rubbing surface of a second polishing tool which is being moved in a planar translation motion relatively to the work surface.
摘要翻译：提出了用于该方法的抛光方法和紧凑的装置，用于有效地生产用于制造高技术装置的抛光工件。抛光方法包括用于抛光工作表面的第一和第二步骤。在第一抛光步骤中，将工作表面按压在正在旋转的第一抛光工具的研磨表面上。在第二步骤中，工作表面被压在相对于工作表面平面移动运动的第二抛光工具的摩擦表面上。

57. 发明授权

US5857898A Method of and apparatus for dressing polishing cloth 失效
标题翻译：抛光布的修整方法及装置
公开(公告)号：US5857898A
公开(公告)日：1999-01-12
申请号：US974598
申请日：1997-11-19
申请人： Hirokuni Hiyama , Norio Kimura , Tomoyuki Yahiro
发明人： Hirokuni Hiyama , Norio Kimura , Tomoyuki Yahiro
IPC分类号： B24B53/00 , B24B53/007 , B24B53/017 , B24B53/095 , B24B57/02 , H01L21/304 , B24B5/00 , B24B29/00
CPC分类号： B24B53/017
摘要： A polishing cloth is dressed between polishing processes each for polishing a workpiece such as a semiconductor wafer. The polishing cloth is dressed while supplying a dressing liquid such as water during a dressing process, and an abrasive liquid for polishing a workpiece is supplied to the polishing cloth for a predetermined period of time prior to a polishing process. The predetermined period of time may be present within the dressing process and immediately precedes the polishing process, and the dressing process may be carried out while supplying the abrasive liquid to the polishing cloth. Alternatively, the predetermined period of time may be present between the dressing process and the polishing process.
摘要翻译：在抛光工艺之间穿着抛光布，用于抛光诸如半导体晶片的工件。在修整过程中，在提供诸如水的修整液的同时，对抛光布进行修整，并且在抛光处理之前将抛光工件的研磨液供给到抛光布预定的时间。预定的时间段可以存在于修整过程中并且紧接在抛光过程之前，并且可以在将磨料液体供应到抛光布的同时进行修整过程。或者，在修整处理和抛光处理之间可以存在预定时间段。

58. 发明授权

US5639388A Polishing endpoint detection method 失效
标题翻译：抛光端点检测方法
公开(公告)号：US5639388A
公开(公告)日：1997-06-17
申请号：US588241
申请日：1996-01-18
申请人： Norio Kimura , Fumihiko Sakata , Tamami Takahashi
发明人： Norio Kimura , Fumihiko Sakata , Tamami Takahashi
IPC分类号： B24B37/013 , B24B37/07 , B24B49/16 , H01L21/66
CPC分类号： B24B37/013 , B24B49/16
摘要： An endpoint detection in a polishing process of a polishing object which has a first layer and a second layer, formed under the first layer, is performed by holding the polishing object on a top ring and pressing a surface of the first layer of the polishing object onto a polishing cloth mounted on a rotating turntable so as to remove the first layer, oscillating the top ring in contact with the turntable, periodically measuring a torque on the rotating turntable when the top ring is positioned at a specific radial location defined by a radius from a rotational center of the turntable, and determining the endpoint based on a change in the torque generated when the first layer is removed and the second layer comes into contact with the polishing cloth.
摘要翻译：通过将抛光对象保持在顶环上并按压抛光对象的第一层的表面来进行在第一层下方形成有第一层和第二层的抛光对象的抛光工序中的端点检测到安装在旋转转台上的抛光布上，以便去除第一层，使顶环与转台相接触，使顶环周期性地测量旋转转台上的转矩，当顶环位于由半径限定的特定径向位置时并且基于当去除第一层并且第二层与抛光布接触时产生的扭矩的变化来确定端点。

59. 发明授权

US5148291A Apparatus for displaying image signal drop-out 失效
标题翻译：用于显示图像信号丢失的装置
公开(公告)号：US5148291A
公开(公告)日：1992-09-15
申请号：US764074
申请日：1991-09-23
申请人： Norio Kimura , Tomishige Taguchi , Tsuguhide Sakata , Kunio Tsuruno , Masahiro Takei
发明人： Norio Kimura , Tomishige Taguchi , Tsuguhide Sakata , Kunio Tsuruno , Masahiro Takei
IPC分类号： H04N1/00 , H04N1/409 , H04N9/877 , H04N9/885
CPC分类号： H04N1/00002 , H04N1/409 , H04N9/877 , H04N9/885
摘要： In an image signal processing apparatus, a drop-out period of an image signal is detected while the image signal is stored in a memory, the detected results are stored in another memory. Based on the information stored in the other memory, the signal drop-out period is displayed and the drop-out signal in the image signal is compensated.
摘要翻译：在图像信号处理装置中，当将图像信号存储在存储器中时，检测图像信号的丢失周期，将检测结果存储在另一个存储器中。基于存储在另一个存储器中的信息，显示信号丢失周期并补偿图像信号中的丢失信号。

60. 发明授权

US5023730A Information recording system and apparatus 失效
标题翻译：信息记录系统和装置
公开(公告)号：US5023730A
公开(公告)日：1991-06-11
申请号：US539306
申请日：1990-06-18
申请人： Tsuguhide Sakata , Norio Kimura , Masahiro Takei
发明人： Tsuguhide Sakata , Norio Kimura , Masahiro Takei
IPC分类号： G11B20/00 , G11B20/10
CPC分类号： G11B20/00007 , G11B20/10527
摘要： An information recording system and apparatus records on a recording medium an audio signal, which is time-base compressed at a predetermined compression ratio, together with a data signal indicative of the compression ratio. A start signal indicative of the start of the audio signal, the data signal, the audio signal and the end signal indicative of the end of an audio signal are recorded in this order. A recording medium recorded by such system and apparatus is disclosed. A reproduction apparatus is also disclosed which reproduces the information out of such recording medium.

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