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    • 51. 发明授权
    • Method for manufacturing an ink jet recording head
    • 喷墨记录头的制造方法
    • US06315853B1
    • 2001-11-13
    • US08721311
    • 1996-10-15
    • Masahiko KubotaMasami KasamotoToshihiro MoriTeruo Ozaki
    • Masahiko KubotaMasami KasamotoToshihiro MoriTeruo Ozaki
    • B05D512
    • B41J2/1604B41J2/14129B41J2/1623B41J2/1628B41J2/1631B41J2/1632B41J2/1642B41J2/1646Y10T29/49401Y10T156/1064
    • A method for manufacturing an ink jet recording head by combining each of the processes to fabricate a heater board comprises (I) the first step of patterning a resistive layer on a substrate, (II) the second step of laminating a first protection layer and patterning the protection layer to form a groove by removing an area for wiring electrode layers to be formed later, (III) the third step of laminating a layer formed by material for use of the wiring electrode layers, (IV) the forth step of continuously giving heat treatment to the surface of the substrate, while the surface is not allowed to be exposed to the air outside, to enable the layer formed by the material of the wiring electrode layers to flow into only the groove on the first protection layer provided in the first step, and making the surface flat, as a result of which, a pair of electrode layers are formed to enable the resistive layer between them to be constituted as the heat generating unit and (V) the fifth step of forming a second protection layer. With this method of manufacture, it is possible to provide an ink jet recording head whose power dissipation is small, while having a good durability and capability of recording in high quality.
    • 通过组合加热板的各个工序来制造喷墨记录头的方法包括:(I)在基板上图形化电阻层的第一步骤,(II)层压第一保护层和图案化的第二步骤 保护层,通过去除稍后要形成的布线电极层的区域来形成沟槽;(III)层叠由用于布线电极层的材料形成的层的第三步骤,(IV)连续给予第四步骤 对基板的表面进行热处理,而不允许表面暴露在外部的空气中,使得由布线电极层的材料形成的层仅能够流入设置在第一保护层中的第一保护层中的凹槽中 第一步骤,使表面平坦化,由此形成一对电极层以使其之间的电阻层能够被构成为发热单元,(V)第五步骤f 建立第二个保护层。 利用这种制造方法,可以提供功率小的喷墨记录头,同时具有良好的耐久性和高质量的记录能力。
    • 54. 发明授权
    • Method of processing substrate and method of manufacturing substrate for use in liquid ejection head
    • 基板的处理方法及液体喷射头用基板的制造方法
    • US08211719B2
    • 2012-07-03
    • US12885257
    • 2010-09-17
    • Hiroyuki MorimotoMasahiko Kubota
    • Hiroyuki MorimotoMasahiko Kubota
    • H01L21/66
    • B41J2/1603B41J2/1629B41J2/1631B41J2/1634B41J2/1639B41J2/1645Y10S438/94
    • A substrate processing method includes preparing a substrate, a first mask adjacent to a first surface of the substrate and including a first light transmitting portion allowing light to be transmitted therethrough, a condenser adjacent to the first surface, a second mask including a second light transmitting portion, and a photo detecting member including a photo detecting portion detecting light having passed through the second light transmitting portion, the condenser condensing light having passed through the first light transmitting portion toward the second light transmitting portion, the second light transmitting portion allowing the light condensed by the condenser to be transmitted therethrough, and forming a recess in the substrate by laser beam irradiation from a direction opposite to the first surface. When an intensity of the laser beam detected by the photo detecting portion is at or above a specific intensity, the irradiation of the laser beam is stopped.
    • 衬底处理方法包括:准备衬底,与衬底的第一表面相邻的第一掩模,并且包括允许光透射的第一透光部分,与第一表面相邻的电容器;第二掩模,包括第二透光 以及光检测部件,其包括检测通过第二透光部的光的光检测部,通过第一透光部朝向第二透光部的聚光灯,第二透光部,允许光 通过冷凝器冷凝以透过其中,并且通过从与第一表面相反的方向的激光束照射在基板中形成凹部。 当由光电检测部分检测的激光束的强度处于或高于特定强度时,停止激光束的照射。
    • 59. 发明授权
    • Method of manufacturing microstructure, method of manufacturing liquid discharge head, and liquid discharge head
    • 制造微结构的方法,制造液体排出头的方法和排液头
    • US06951380B2
    • 2005-10-04
    • US10615305
    • 2003-07-09
    • Masahiko KubotaWataru Hiyama
    • Masahiko KubotaWataru Hiyama
    • B41J2/05B41J2/14B41J2/16B81C1/00G03F7/004G03F7/26B41J2/015G03C5/00
    • B41J2/1639B41J2/1404B41J2/1433B41J2/1603B41J2/162B41J2/1628B41J2/1629B41J2/1631B41J2/1645
    • A liquid discharge head which is inexpensive, accurate, and highly reliable, and a method of manufacturing such a liquid discharge head are provided. On a substrate, a thermal crosslinking positive photosensitive material layer (a first positive photosensitive material layer) and a second positive photosensitive material layer are formed. First a pattern is formed on the second positive photosensitive material layer, then another pattern is formed on the first positive photosensitive material layer. Next, a negative resin for forming a liquid channel wall is laminated on the patterned first and second positive photosensitive material layers. A discharge port is formed in the negative resin layer and then the positive photosensitive material layers are removed. At this time, the first positive photosensitive material layer is an ionizing radiation decompositive positive resist composed of a methacrylic copolymer composite mainly containing methacrylic acid where a metacrylic acid unit is 2 to 30 wt % and molecular weight is 5,000 to 50,000, and the second positive photosensitive material layer is an ionizing radiation decompositive positive resist mainly containing polymethyl isopropenyl ketone.
    • 提供廉价,准确,高可靠性的液体排出头,以及制造这种排液头的方法。 在基板上形成热交联正性感光材料层(第一正性感光材料层)和第二正性感光材料层。 首先,在第二正性感光材料层上形成图案,然后在第一正性感光材料层上形成另一图形。 接下来,在图案化的第一和第二正性感光材料层上层压用于形成液体通道壁的负型树脂。 在负树脂层中形成排出口,然后除去正性感光材料层。 此时,第一正性感光材料层是由主要含有甲基丙烯酸的甲基丙烯酸共聚物复合体构成的电离辐射分解正性抗蚀剂,其中甲基丙烯酸单元为2〜30重量%,分子量为5000〜50,000,第二正极 感光材料层是主要含有聚甲基异丙烯基酮的电离辐射分解正性抗蚀剂。