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    • 53. 发明授权
    • Polishing fluid composition and polishing method
    • 抛光液组成和抛光方法
    • US5885334A
    • 1999-03-23
    • US857366
    • 1997-05-15
    • Tetsuo SuzukiYoshihiro Hara
    • Tetsuo SuzukiYoshihiro Hara
    • C09G1/02C09K3/14C09K13/04
    • C09G1/02C09K3/1463
    • The present invention provides a polishing fluid composition which can effectively polish a surface of a semiconductor silicon wafer or a surface of a film comprising silicon to be formed on silicon wafers with a markedly reduced amount of colloidal silica to be used as abrasives, or a polishing fluid composition which is particularly useful for a polishing step after removal of an oxide layer in a two-step polishing method. The former polishing fluid composition comprises an alkaline suspension which contains a water-soluble silicic acid component, colloidal silica and an alkaline component, and which has a pH value of 8.5 to 13. Meanwhile, the latter polishing fluid composition comprises an alkaline solution which contains a water-soluble silicic acid component and an alkaline component, and which has a pH value of 8.5 to 13; and is substantially free of abrasive particles.
    • 本发明提供了一种抛光液组合物,其可以有效地抛光半导体硅晶片的表面或包含待形成硅晶片的表面,其中硅晶片的显微减少量用作研磨剂,或抛光 流体组合物,其特别可用于在两步抛光方法中除去氧化物层之后的抛光步骤。 前述抛光液组合物含有含有水溶性硅酸成分,胶体二氧化硅和碱性成分的碱性悬浮液,其pH值为8.5〜13。另外,后者的研磨液组合物含有碱溶液,其含有 水溶性硅酸成分和碱性成分,pH值为8.5〜13, 并且基本上不含磨料颗粒。
    • 54. 发明授权
    • Process for recovering substrates
    • 回收底物的方法
    • US5855735A
    • 1999-01-05
    • US538265
    • 1995-10-03
    • Satoru TakadaHidetoshi InoueYoshihiro Hara
    • Satoru TakadaHidetoshi InoueYoshihiro Hara
    • H01L21/66B24B9/06B24B21/00B24B37/04H01L21/02H01L21/30H01L21/304C23F3/00
    • H01L21/02032B24B21/00B24B37/04B24B9/065H01L21/02079H01L21/30
    • A process comprising removing surface layer materials from the wafer by inducing micro-fractures in the surface using a rotating pad and an abrasive slurry until all of the surface layer materials are removed; and chemically etching the surfaces of the wafer until all micro-fractures are removed therefrom. Edge materials are removed by abrasive tape. Wafer thickness reduction during recycling is less than 30 microns per cycle. One of the front and back surfaces of the wafer substrate is polished, any dots or grooves being on the non-polished side. The abrasive slurry contains more than 6 volume percent abrasive particles, and the abrasive slurry has a viscosity greater than about 2 cP at ambient temperature. The preferred pad comprises an organic polymer having a hardness greater than about 40 on the Shore D scale, optimally a polyurethane. The pressure of the pad against the wafer surface preferably does not exceed about 3 psi. Preferably, the chemical etching solution contains potassium hydroxide. An acidic solution can then be applied to the wafer surface. The reclaimed semiconductor wafer can be a silicon wafer having a matted side having etch pits which does not exceed 20 microns in width, an average roughness not exceeding 0.5 microns and a peak-to-valley roughness not exceeding 5 microns. Any laser markings from the original wafer are present on the matted side of the wafer.
    • 一种方法,其包括通过使用旋转垫和研磨​​剂浆料在表面中诱导微裂纹从晶片去除表面层材料,直到除去所有表面层材料; 并化学蚀刻晶片的表面,直到从中除去所有的微裂缝。 边缘材料由砂带除去。 回收期间的晶片厚度减少每周期小于30微米。 对晶片基板的正面和背面之一进行抛光,任何点或凹槽位于非抛光侧。 研磨浆料含有超过6体积%的磨料颗粒,研磨浆料在环境温度下的粘度大于约2cP。 优选的垫包括在肖氏D刻度上硬度大于约40的有机聚合物,最佳地是聚氨酯。 衬垫对晶片表面的压力优选不超过约3psi。 优选地,化学蚀刻溶液含有氢氧化钾。 然后可以将酸性溶液施加到晶片表面。 回收的半导体晶片可以是具有无光泽面的蚀刻凹坑的硅晶片,其宽度不超过20微米,平均粗糙度不超过0.5微米,峰 - 谷粗糙度不超过5微米。 来自原始晶片的任何激光标记存在于晶片的无光泽侧。
    • 56. 发明授权
    • Driving device made of shape-memory alloy
    • 由形状记忆合金制成的驱动装置
    • US08434303B2
    • 2013-05-07
    • US12812572
    • 2009-01-14
    • Yasuhiro HondaYasutaka TanimuraNatsuko ShiotaYoshihiro Hara
    • Yasuhiro HondaYasutaka TanimuraNatsuko ShiotaYoshihiro Hara
    • F01B29/10H02N10/00G02B7/04
    • F03G7/065G02B7/08
    • A storing section (70) stores a second initial contact instruction value, which is predefined as an instruction value for positioning a movable portion (5) to a second contact position where the movable portion (5) is contacted with a stopper (8), and an initial standby instruction value, which is predefined as an instruction value for positioning the movable portion (5) to a specified standby position within a moving range of the movable portion (5). A correcting section (42) calculates an actual standby instruction value by correcting the initial standby instruction value, based on a second actual contact instruction value obtained when a contact detection section (41) has detected that the movable portion (5) is positioned to the second contact position, and the second initial contact instruction value. A setting section (43) sets a standby position corresponding to the actual standby instruction value, as an actual standby position of the movable portion (5).
    • 存储部(70)存储第二初始接触指示值,其被预先定义为用于将可动部(5)定位到可动部(5)与止动件(8)接触的第二接触位置的指示值, 以及初始待机指令值,其被预先定义为用于将可动部分(5)定位在可动部分(5)的移动范围内的指定待机位置的指令值。 校正部件(42)基于当接触检测部件(41)检测到可动部分(5)位于所述第二实际接触指令值时获得的第二实际接触指令值,通过校正初始待机指令值来计算实际待机指令值 第二接触位置和第二初始接触指令值。 设定部(43)将与实际待机指示值对应的待机位置设定为可动部(5)的实际备用位置。
    • 58. 发明授权
    • Transmission circuit and communication device
    • 传输电路和通信设备
    • US08055215B2
    • 2011-11-08
    • US12100856
    • 2008-04-10
    • Yoshihiro HaraShunsuke HiranoToru MatsuuraShigeru Morimoto
    • Yoshihiro HaraShunsuke HiranoToru MatsuuraShigeru Morimoto
    • H04B1/04
    • H04B1/0483
    • Provided is a transmission circuit capable of operating with high linearity and with low noise. An AM variable fc filter uses an AM cutoff frequency to remove a high frequency component from an amplitude signal. An amplifier supplies a power amplifier with a voltage which is a result of amplifying the amplitude signal outputted from the AM variable fc filter. A PM variable fc filter uses a PM cutoff frequency to remove a high frequency component from a phase signal. A phase modulator phase-modulates the phase signal outputted from the PM variable fc filter to output a high-frequency phase-modulated signal. The power amplifier amplifies the high-frequency phase-modulated signal by using the voltage supplied from the amplifier, and outputs a resultant signal as a transmission signal. The AM variable fc filter and the PM variable fc filter respectively control the AM cutoff frequency and the PM cutoff frequency such that the AM cutoff frequency and the PM cutoff frequency each have an opposite characteristic to that of an output power of the transmission signal.
    • 提供了能够以高线性度和低噪声运行的传输电路。 AM变量fc滤波器使用AM截止频率从幅度信号中去除高频分量。 放大器为功率放大器提供电压,该电压是从AM变量fc滤波器输出的幅度信号的放大结果。 PM变量fc滤波器使用PM截止频率从相位信号中去除高频分量。 相位调制器对从PM变量fc滤波器输出的相位信号进行相位调制,以输出高频相位调制信号。 功率放大器通过使用从放大器提供的电压放大高频相位调制信号,并输出合成信号作为发送信号。 AM变量fc滤波器和PM变量fc滤波器分别控制AM截止频率和PM截止频率,使得AM截止频率和PM截止频率各自具有与发送信号的输出功率相反的特性。
    • 59. 发明授权
    • Transmitter and communication apparatus
    • 发射机和通信设备
    • US07840193B2
    • 2010-11-23
    • US11907380
    • 2007-10-11
    • Yoshihiro HaraShigeru Morimoto
    • Yoshihiro HaraShigeru Morimoto
    • H04B1/02
    • H03C1/62
    • A modulator 23 corrects an amplitude signal Rd by adding thereto an offset value α and generates, based on the corrected amplitude signal Rd, an amplitude signal Ra for amplitude-modulating a radio-frequency signal. The modulator 23 includes: an offset voltage measurement section 109 operable to measure an offset voltage V2cal of the amplitude signal Ra; a correction value calculation section 110 operable to obtain a difference value ΔV2cal between the offset voltage V2cal measured by the offset voltage measurement section 109 and an initial value of the offset voltage V2cal and operable to calculate, based on the difference value ΔV2cal, a correction value VODAC for correcting the offset voltage V2cal; and an addition section 106 operable to add the correction value VODAC calculated by the correction value calculation section 110 to a signal processed until the amplitude signal Ra is generated from the amplitude signal Rd.
    • 调制器23通过加上偏移值α来校正幅度信号Rd,并且基于校正的振幅信号Rd生成用于幅度调制射频信号的振幅信号R. 调制器23包括:偏移电压测量部109,用于测量振幅信号Ra的偏移电压V2cal; 校正值计算部分110,用于获得由偏移电压测量部分109测量的偏移电压V2cal与偏移电压V2cal的初始值之间的差值Dgr; V2cal,并且可操作以基于差值Dgr; V2cal ,用于校正偏移电压V2cal的校正值VODAC; 以及附加部分106,其可操作以将由校正值计算部分110计算出的校正值VODAC与从振幅信号Rd产生振幅信号Ra之前的处理信号相加。
    • 60. 发明授权
    • Driving apparatus
    • 驱动装置
    • US07640741B2
    • 2010-01-05
    • US11598358
    • 2006-11-13
    • Yoshihiro Hara
    • Yoshihiro Hara
    • F01B29/10
    • H04N5/23248G03B2205/0023G03B2205/0076H04N5/2251H04N5/23258H04N5/23287
    • In an auto image stabilization system, a driving member formed as a wire of shape memory alloy (SMA) is retained by a projection of an image capturing unit. A distance Lb from the rotation center of an elastic deforming part to center of gravity (point of application) of the image capturing unit is longer than a distance La from the rotation center of the elastic deforming part to the projection (power point). In the configuration, equivalent mass (apparent mass) of the image capturing unit becomes (Lb/La) times, and it causes deterioration in response. Consequently, the driving member having an ellipse-shaped section in which a value obtained by dividing the width in the longer direction of the section by the width in the shorter direction is 1.3 or larger is employed. As a result, heat dissipation of the driving member increases, so that response in the SMA actuator can be properly improved.
    • 在自动图像稳定系统中,形成为形状记忆合金(SMA)的线的驱动构件由图像捕获单元的投影保持。 从弹性变形部的旋转中心到图像拍摄单元的重心(施加点)的距离Lb比从弹性变形部的旋转中心到投影(动力点)的距离La长。 在该结构中,图像拍摄单元的等效质量(视在质量)变为(Lb / La)倍,并且导致响应恶化。 因此,采用具有椭圆形截面的驱动构件,其中通过将截面的长度方向上的宽度除以短边方向的宽度获得的值为1.3或更大。 结果,驱动构件的散热增加,从而可以适当地改善SMA致动器中的响应。