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    • 60. 发明授权
    • Surface inspection with variable digital filtering
    • 可变数字滤波表面检测
    • US07791721B2
    • 2010-09-07
    • US11878197
    • 2007-07-23
    • Kazuo TakahashiTakahiro Jingu
    • Kazuo TakahashiTakahiro Jingu
    • G01N21/88
    • G01N21/956G01N21/8851
    • A semiconductor wafer, which is an inspection object, is stuck by vacuum on a chuck and this chuck is mounted on an inspection object movement stage consisting of a rotational stage and a translational stage, located on a Z-stage. The rotational stage provides a rotational movement and the translational stage provides a translational movement. And when a foreign particle or a defect on an inspection object surface is detected, the parameter of digital filtering is dynamically changed during inspection, and the foreign particle or the defect is differentiated using the result after removing a low frequency fluctuation component to be a noise component.
    • 作为检查对象的半导体晶片通过真空卡在卡盘上,该卡盘安装在由位于Z平台上的旋转台和平移台构成的检查对象移动台上。 旋转台提供旋转运动,平移台提供平移运动。 并且当检测到异物或检查物体表面的缺陷时,在检查期间动态地改变数字滤波的参数,并且在将低频波动分量除去为噪声之后,使用结果将异物或缺陷区分开来 零件。