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    • 51. 发明授权
    • Method for simultaneously forming features of different depths in a semiconductor substrate
    • 同时形成半导体衬底中不同深度的特征的方法
    • US08492280B1
    • 2013-07-23
    • US13465050
    • 2012-05-07
    • Habib HichriXi LiRichard S. Wise
    • Habib HichriXi LiRichard S. Wise
    • H01L21/311
    • H01L21/3065H01L21/76229H01L21/84H01L27/1087H01L29/66181
    • Embodiments of the invention may include first providing a stack of layers including a semiconductor substrate, a buried oxide layer on the semiconductor substrate, a semiconductor-on-insulator layer on the buried-oxide layer, a nitride layer on the semiconductor-on-insulator layer, and a silicon oxide layer on the nitride layer. A first opening and second opening with a smaller cross-sectional area than the first opening are then formed in the silicon oxide layer, the nitride layer, the semiconductor-on-insulator layer, and the buried-oxide layer. The first opening and the second opening are then etched with a first etching gas. The first opening and the second opening are then etched with a second etching gas, which includes the first etching gas and a halogenated silicon compound, for example, silicon tetrafluoride or silicon tetrachloride. In one embodiment, the first etching gas includes hydrogen bromide, nitrogen trifluoride, and oxygen.
    • 本发明的实施例可以包括首先提供包括半导体衬底,半导体衬底上的掩埋氧化物层,掩埋氧化物层上的绝缘体上半导体层,绝缘体上半导体上的氮化物层 层和氮化物层上的氧化硅层。 然后在氧化硅层,氮化物层,绝缘体上半导体层和掩埋氧化物层上形成具有比第一开口更小的横截面面积的第一开口和第二开口。 然后用第一蚀刻气体蚀刻第一开口和第二开口。 然后用第二蚀刻气体蚀刻第一开口和第二开口,第二蚀刻气体包括第一蚀刻气体和卤化硅化合物,例如四氟化硅或四氯化硅。 在一个实施方案中,第一蚀刻气体包括溴化氢,三氟化氮和氧。
    • 52. 发明授权
    • Managing events within supply chain networks
    • 管理供应链网络中的事件
    • US08165928B2
    • 2012-04-24
    • US09919567
    • 2001-07-30
    • John J. DooleyXi Li
    • John J. DooleyXi Li
    • G06Q10/00
    • G06Q10/08G06K2017/0045G06Q10/06G06Q10/0637G06Q10/087G06Q20/203G06Q20/208
    • A supply chain network system comprises a site data appliance (SDA) and a Universal Data Appliance Protocol (UDAP) adapter coupled with one or more data source equipments (DSE). The SDA collects specification information comprising event information from the one or more DSE. A server is coupled with the SDA in the supply chain network. In response to the server requesting the specification information, the SDA sends to the server the specification information in a Description Document. A data center (DC) is coupled with the server in the supply chain network. The DC receives the Description Document and maps the event information in the specification information with event handlers. A mapping of the event information with the event handlers is sent from the DC to the server. When an event is generated by the one or more DSE, the map is used to select an appropriate event handler to execute.
    • 供应链网络系统包括与一个或多个数据源设备(DSE)耦合的站点数据设备(SDA)和通用数据设备协议(UDAP)适配器。 SDA从一个或多个DSE收集包括事件信息的规范信息。 服务器与供应链网络中的SDA配合使用。 响应于请求规范信息的服务器,SDA向服务器发送描述文档中的规范信息。 数据中心(DC)与供应链网络中的服务器相连。 DC接收描述文档,并使用事件处理程序将规范信息中的事件信息映射。 将事件信息与事件处理程序的映射从DC发送到服务器。 当一个或多个DSE生成事件时,该映射用于选择要执行的适当的事件处理程序。
    • 53. 发明授权
    • Post STI trench capacitor
    • 后STI沟槽电容器
    • US07683416B2
    • 2010-03-23
    • US11935698
    • 2007-11-06
    • Anil K. ChinthakindiDeok-kee KimXi Li
    • Anil K. ChinthakindiDeok-kee KimXi Li
    • H01L27/108
    • H01L29/94H01L28/91H01L29/66181
    • A design structure for capacitor having a suitably large value for decoupling applications is formed in a trench defined by isolation structures such as recessed isolation or shallow trench isolation. The capacitor provides a contact area coextensive with an active area and can be reliably formed individually or in small numbers. Plate contacts are preferably made through implanted regions extending to or between dopant diffused regions forming a capacitor plate. The capacitor can be formed by a process subsequent to formation of isolation structures such that preferred soft mask processes can be used to form the isolation structures and process commonality and compatibility constraint are avoided while the capacitor forming processes can be performed in common with processing for other structures.
    • 在由诸如凹陷隔离或浅沟槽隔离的隔离结构限定的沟槽中形成用于去耦应用的适当大值的电容器的设计结构。 电容器提供与有源区域共同延伸的接触区域,并且可以单独或少量可靠地形成。 板触点优选通过延伸到形成电容器板的掺杂剂扩散区域之间或之间的注入区域制成。 可以通过形成隔离结构之后的过程形成电容器,使得可以使用优选的软掩模工艺来形成隔离结构和工艺共同性,并避免兼容性约束,同时电容器形成过程可以与其他处理共同执行 结构。
    • 54. 发明授权
    • Post STI trench capacitor
    • 后STI沟槽电容器
    • US07682922B2
    • 2010-03-23
    • US11624385
    • 2007-01-18
    • Anil K. ChinthakindiDeok-Kee KimXi Li
    • Anil K. ChinthakindiDeok-Kee KimXi Li
    • H01L21/20
    • H01L29/94H01L27/0805H01L28/91H01L29/66181
    • A capacitor having a suitably large value for decoupling applications is formed in a trench defined by isolation structures such as recessed isolation or shallow trench isolation. The capacitor provides a contact area coextensive with an active area and can be reliably formed individually or in small numbers. Plate contacts are preferably made through implanted regions extending to or between dopant diffused regions forming a capacitor plate. The capacitor can be formed by a process subsequent to formation of isolation structures such that preferred soft mask processes can be used to form the isolation structures and process commonality and compatibility constraint are avoided while the capacitor forming processes can be performed in common with processing for other structures.
    • 在由诸如凹陷隔离或浅沟槽隔离的隔离结构限定的沟槽中形成具有用于去耦应用的适当大值的电容器。 电容器提供与有源区域共同延伸的接触区域,并且可以单独或少量可靠地形成。 板触点优选通过延伸到形成电容器板的掺杂剂扩散区域之间或之间的注入区域制成。 可以通过形成隔离结构之后的过程形成电容器,使得可以使用优选的软掩模工艺来形成隔离结构和工艺共同性,并避免兼容性约束,同时电容器形成过程可以与其他处理共同执行 结构。
    • 55. 发明申请
    • Post STI Trench Capacitor
    • 后STI沟槽电容器
    • US20080173918A1
    • 2008-07-24
    • US11935698
    • 2007-11-06
    • Anil K. ChinthakindiDeok-kee KimXi Li
    • Anil K. ChinthakindiDeok-kee KimXi Li
    • H01L29/94
    • H01L29/94H01L28/91H01L29/66181
    • A design structure for capacitor having a suitably large value for decoupling applications is formed in a trench defined by isolation structures such as recessed isolation or shallow trench isolation. The capacitor provides a contact area coextensive with an active area and can be reliably formed individually or in small numbers. Plate contacts are preferably made through implanted regions extending to or between dopant diffused regions forming a capacitor plate. The capacitor can be formed by a process subsequent to formation of isolation structures such that preferred soft mask processes can be used to form the isolation structures and process commonality and compatibility constraint are avoided while the capacitor forming processes can be performed in common with processing for other structures.
    • 在由诸如凹陷隔离或浅沟槽隔离的隔离结构限定的沟槽中形成用于去耦应用的适当大值的电容器的设计结构。 电容器提供与有源区域共同延伸的接触区域,并且可以单独或少量可靠地形成。 板触点优选通过延伸到形成电容器板的掺杂剂扩散区域之间或之间的注入区域制成。 可以通过形成隔离结构之后的过程形成电容器,使得可以使用优选的软掩模工艺来形成隔离结构和工艺共同性,并避免兼容性约束,同时电容器形成过程可以与其他处理共同执行 结构。
    • 56. 外观设计
    • Toy
    • USD1043848S1
    • 2024-09-24
    • US29845064
    • 2022-07-05
    • Xi Li
    • Xi Li
    • FIG. 1 is a first perspective view of a toy showing my new design;
      FIG. 2 is a second perspective view thereof;
      FIG. 3 is a front view thereof;
      FIG. 4 is a back view thereof;
      FIG. 5 is a left side view thereof;
      FIG. 6 is a right side view thereof;
      FIG. 7 is a top view thereof;
      FIG. 8 is a bottom view thereof;
      FIG. 9 is another perspective view thereof, but shown in a usage state in an environmental view;
      FIG. 10 is an enlarged view of the selected portion 10 in FIG. 1;
      FIG. 11 is an enlarged view of the selected portion 11 in FIG. 1;
      FIG. 12 is an enlarged view of the selected portion 12 in FIG. 1;
      FIG. 13 is an enlarged view of the selected portion 13 in FIG. 1; and,
      FIG. 14 is an enlarged view of the selected portion 14 in FIG. 1.
      The broken lines illustrate portions of the toy that form no part of the claimed design. In FIG. 9 the additional broken lines illustrate environmental structure that form no part of the claim.
    • 58. 发明申请
    • Method for Simultaneously Forming Features of Different Depths in a Semiconductor Substrate
    • 同时形成半导体基板中不同深度特征的方法
    • US20130295773A1
    • 2013-11-07
    • US13865223
    • 2013-04-18
    • Habib HichriXi LiRichard Wise
    • Habib HichriXi LiRichard Wise
    • H01L21/3065
    • H01L21/3065H01L21/76229H01L21/84H01L27/1087H01L29/66181
    • Embodiments of the invention may include first providing a stack of layers including a semiconductor substrate, a buried oxide layer on the semiconductor substrate, a semiconductor-on-insulator layer on the buried-oxide layer, a nitride layer on the semiconductor-on-insulator layer, and a silicon oxide layer on the nitride layer. A first opening and second opening with a smaller cross-sectional area than the first opening are then formed in the silicon oxide layer, the nitride layer, the semiconductor-on-insulator layer, and the buried-oxide layer. The first opening and the second opening are then etched with a first etching gas. The first opening and the second opening are then etched with a second etching gas, which includes the first etching gas and a halogenated silicon compound, for example, silicon tetrafluoride or silicon tetrachloride. In one embodiment, the first etching gas includes hydrogen bromide, nitrogen trifluoride, and oxygen.
    • 本发明的实施例可以包括首先提供包括半导体衬底,半导体衬底上的掩埋氧化物层,掩埋氧化物层上的绝缘体上半导体层,绝缘体上半导体上的氮化物层 层和氮化物层上的氧化硅层。 然后在氧化硅层,氮化物层,绝缘体上半导体层和掩埋氧化物层上形成具有比第一开口更小的横截面面积的第一开口和第二开口。 然后用第一蚀刻气体蚀刻第一开口和第二开口。 然后用第二蚀刻气体蚀刻第一开口和第二开口,第二蚀刻气体包括第一蚀刻气体和卤化硅化合物,例如四氟化硅或四氯化硅。 在一个实施方案中,第一蚀刻气体包括溴化氢,三氟化氮和氧。