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    • 51. 发明授权
    • Self-releasing spring structures and methods
    • 自释弹簧结构及方法
    • US07456092B2
    • 2008-11-25
    • US10959180
    • 2004-10-07
    • Thomas HantschelSven KosgalwiesDavid K. ForkEugene M. Chow
    • Thomas HantschelSven KosgalwiesDavid K. ForkEugene M. Chow
    • H01L21/4763
    • G01R1/06716G01R3/00Y10T29/49609
    • According to various exemplary embodiments, a spring device that includes a substrate, a self-releasing layer provided over the substrate and a stressed-metal layer provided over the self-releasing layer is disclosed, wherein an amount of stress inside the stressed-metal layer results in a peeling force that is higher than an adhesion force between the self-releasing layer and the stressed-metal layer. Moreover, a method of manufacturing a spring device, according to various exemplary embodiments, includes providing a substrate, providing a self-releasing layer over the substrate and providing a stressed-metal layer over the self-releasing layer wherein an amount of stress inside the stressed-metal layer results in a peeling force that is higher than an adhesion force between the self-releasing layer and the stressed-metal layer is also disclosed in this invention.
    • 根据各种示例性实施例,公开了一种弹簧装置,其包括基板,设置在基板上的自放电层和设置在自放电层上的应力金属层,其中应力金属层内部的应力量 导致剥离力高于自释放层和应力金属层之间的粘附力。 此外,根据各种示例性实施例的制造弹簧装置的方法包括提供衬底,在衬底上提供自释放层,并在自释放层上方提供应力金属层,其中, 在本发明中也公开了应力金属层导致比自发层和应力金属层之间的粘附力高的剥离力。
    • 54. 发明授权
    • Sputtered spring films with low stress anisotropy
    • 具有低应力各向异性的溅射弹簧膜
    • US07172707B2
    • 2007-02-06
    • US11029618
    • 2005-01-05
    • David K. ForkScott SolbergKarl A. Littau
    • David K. ForkScott SolbergKarl A. Littau
    • C23F1/00
    • G01R1/06733C23C14/14C23C14/3492C23C14/35G01R1/06727G01R1/06744G01R3/00H01L21/67167H01L21/67207H05K3/4092Y10T428/24
    • Methods are disclosed for fabricating spring structures that minimize helical twisting by reducing or eliminating stress anisotropy in the thin films from which the springs are formed through manipulation of the fabrication process parameters and/or spring material compositions. In one embodiment, isotropic internal stress is achieved by manipulating the fabrication parameters (i.e., temperature, pressure, and electrical bias) during spring material film formation to generate the tensile or compressive stress at the saturation point of the spring material. Methods are also disclosed for tuning the saturation point through the use of high temperature or the incorporation of softening metals. In other embodiments, isotropic internal stress is generated through randomized deposition (e.g., pressure homogenization) or directed deposition techniques (e.g., biased sputtering, pulse sputtering, or long throw sputtering). Cluster tools are used to separate the deposition of release and spring materials.
    • 公开了用于制造弹簧结构的方法,其通过减少或消除通过操纵制造工艺参数和/或弹簧材料组成形成弹簧的薄膜中的应力各向异性来最小化螺旋扭转。 在一个实施例中,通过在弹簧材料膜形成期间操纵制造参数(即,温度,压力和电偏压)来实现各向同性内部应力,以在弹簧材料的饱和点处产生拉伸或压缩应力。 还公开了通过使用高温或软化金属的引入来调节饱和点的方法。 在其他实施例中,通过随机沉积(例如,压力均化)或定向沉积技术(例如,偏置溅射,脉冲溅射或长投射溅射)产生各向同性的内部应力。 集群工具用于分离释放和弹簧材料的沉积。
    • 57. 发明授权
    • Laser beam conditioner using partially reflective mirrors
    • 使用部分反射镜的激光束调节器
    • US5861991A
    • 1999-01-19
    • US769360
    • 1996-12-19
    • David K. Fork
    • David K. Fork
    • G02B27/14G02B27/10
    • G02B27/1073G02B27/145
    • A laser beam conditioner consists of a partially reflective surface having a uniform reflectivity of approximately 38.2 percent and a totally reflective surface on opposite sides of a substrate. A coherent light beam incident onto the partially reflective surface of the laser beam conditioner will be partially reflected and partially transmitted. The partially transmitted portion of the coherent light beam will be multiply reflected between the totally reflective mirror and the partially reflective mirror within the beam conditioner, with a portion of light transmitted through the partially reflective mirror at each multiple reflection. The initially reflected portion of the coherent light beam and the transmitted portions of the multiply reflected beams form a conditioned light beam for a homogenizer. The partially reflective surface and the totally reflective surface are slightly less than parallel in order to introduce a minute angular spread among the delayed components of the multiply reflected beam. The spacing between the partially and totally reflective surfaces is at least half the coherence length of the laser beam.
    • 激光束调节器由具有大约38.2%的均匀反射率的部分反射表面和在基底的相对侧上的全反射表面组成。 入射到激光束调节器的部分反射表面上的相干光束将被部分反射并部分透射。 相干光束的部分透射部分将在光束调节器内的全反射镜和部分反射镜之间被多次反射,一部分光在每次多次反射时透过部分反射镜。 相干光束的初始反射部分和多次反射光束的透射部分形成用于均化器的调节光束。 部分反射表面和全反射表面稍微小于平行的,以便在乘法反射光束的延迟分量之间引入微小的角度扩展。 部分和全反射表面之间的间距至少是激光束的相干长度的一半。
    • 59. 发明授权
    • Melt planarization of solar cell bus bars
    • 太阳能电池母线的熔融平坦化
    • US08692110B2
    • 2014-04-08
    • US12905975
    • 2010-10-15
    • David K. ForkAndre KalioRanjeet Rao
    • David K. ForkAndre KalioRanjeet Rao
    • H01L31/00
    • H01L31/022425Y02E10/50
    • Solar cells include bus bars and high aspect-ratio gridlines that are printed on a substrate, and localized melting is induced to slump or flatten the gridline “vertex” portions that are disposed on the bus bars, while maintaining the high aspect-ratio of gridlines portions disposed on the substrate between the bus bars. The localized melting process is induced using one of several disclosed methods, such as rheological melting in which the two printed inks produce a compound that is relatively liquid. Localized melting is also induced using a deliquescing material (e.g., a flux or a solvent film) that is applied to the bus bar or gridline material. Also, eutectic melting is induced using a processing temperature that is between a melting point of the combined gridline/bus bar inks and the individual melting points of the inks alone. Laser-based melting and the use of copolymers is also disclosed.
    • 太阳能电池包括印刷在基板上的母线和高纵横比网格线,并且局部熔化被引起塌陷或平坦化布置在母线上的网格线“顶点”部分,同时保持网格线的高纵横比 在母线之间设置在基板上的部分。 使用几种公开的方法之一诱导局部熔化过程,例如其中两种印刷油墨产生相对液体的化合物的流变熔融。 还使用施加到母线或网格线材料的潮解材料(例如,助熔剂或溶剂膜)来诱导局部熔化。 此外,使用在组合网格线/母线墨水的熔点和单独的墨水的各个熔点之间的加工温度来诱导共晶熔融。 还公开了基于激光的熔融和共聚物的用途。