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    • 54. 发明申请
    • Cooling module for charged particle beam column elements
    • 用于带电粒子束柱元件的冷却模块
    • US20070085019A1
    • 2007-04-19
    • US11240279
    • 2005-09-30
    • Thomas JasinskiDieter WinklerWilliam Eckes
    • Thomas JasinskiDieter WinklerWilliam Eckes
    • H01J1/50
    • H01J37/141H01J2237/002
    • We have developed a method and apparatus for cooling electromagnetic lens coils of the kind used in charged particle beams. The method and apparatus provide not only a symmetrical cooling effect around the optical axis of the charged particle beam, but also provide improved uniformity of heat transfer. This improved uniformity enables control over the optical axis of the charged particle beam within about 1 nm for high current charged particle beam columns, wherein the current ranges from about 100 nanoamps to about 1000 nanoamps. The use of a squat and wide electromagnetic lens coil in combination with an essentially flat modular cooling panel, which provides uniform cooling to the electromagnetic lens coil, not only enables control over the optical axis of the charged particle beam, but also provides mechanical stability for the charged particle beam column.
    • 我们开发了一种用于冷却带电粒子束中使用的电磁透镜线圈的方法和装置。 该方法和装置不仅提供了带电粒子束的光轴周围的对称冷却效果,而且提供了改善的传热均匀性。 这种改进的均匀性使得能够对高电流带电粒子束柱控制带电粒子束的光轴在约1nm内,其中电流范围为约100纳安 - 约1000纳帕。 使用蹲式和宽电磁透镜线圈与基本上平坦的模块化冷却面板组合,其提供对电磁透镜线圈的均匀冷却,不仅能够控制带电粒子束的光轴,而且还提供机械稳定性 带电粒子束柱。
    • 58. 发明授权
    • Method and device for producing hot working gases
    • 生产热作用气体的方法和装置
    • US06510693B2
    • 2003-01-28
    • US09975307
    • 2001-10-12
    • Dieter WinklerTimothy Albert GriffinUlf Linder
    • Dieter WinklerTimothy Albert GriffinUlf Linder
    • F01K2506
    • B01D53/22F02C3/22
    • The invention relates to a method for producing hot working gases for a gas turbine system. In a burner, combustion that generates hot combustion waste gas takes place. A portion of the combustion waste gas branches off and feeds into an oxygen separation device. A heat exchanger produces a heated oxygen-containing gas from oxygen-containing gas. The heated oxygen-containing gas feeds to the oxygen separation device. The oxygen separation device includes an oxygen separation means that removes oxygen from the heated oxygen-containing gas and feeds it to the branched-off waste gas. Oxygen-reduced hot gas then leaves the oxygen separation device. Oxygen-enriched branched-off waste gas as well as fuel feed to the burner and form a combustion mixture that bums in the burner while forming the hot combustion waste gases. In order to improve the efficiency of the device, the oxygen-enriched branched-off waste gas heats the oxygen-containing gas.
    • 本发明涉及一种用于生产燃气轮机系统的热作业气体的方法。 在燃烧器中,产生产生热燃烧废气的燃烧。 一部分燃烧废气分支并进料到氧分离装置中。 热交换器从含氧气体产生加热的含氧气体。 加热的含氧气体进料到氧气分离装置。 氧分离装置包括氧分离装置,其从加热的含氧气体中除去氧并将其进料到分支废气。 然后将氧气还原的热气体离开氧气分离装置。 富氧分支废气以及燃料进料到燃烧器并形成燃烧混合物,燃烧器在燃烧器中形成热燃烧废气。 为了提高装置的效率,富氧分支废气加热含氧气体。