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51. 发明授权

US5780748A Flow device having parallel flow surfaces which move toward and away from one another to adjust the flow channel in proportion to applied force 失效
标题翻译：具有平行的流动表面的流动装置，其相对于彼此移动并远离彼此以与施加的力成比例地调节流动通道
公开(公告)号：US5780748A
公开(公告)日：1998-07-14
申请号：US790687
申请日：1997-01-29
申请人： Phillip W. Barth
发明人： Phillip W. Barth
IPC分类号： F15C5/00 , G01F1/40 , G01F1/38 , G05D11/00
CPC分类号： F15C5/00 , G01F1/40 , Y10S366/03 , Y10T137/2514
摘要： This disclosure provides a novel flow device having a fourth root pressure versus flow characteristic. The flow device includes an inlet, an orifice that focusses fluid pressure, a pair of parallel plates (or other surfaces which can be modeled as parallel plates), and an outlet. Preferably, the pair of parallel plates are a pair of two flat disks, one of which has a central aperture. When the device is used as a flow restrictor, the central aperture forms a seat against which the second plate (the impeder plate) is biased to restrict fluid flow. The orifice provides fluid pressure through the aperture, which forces the second plate away from the first plate, and against the bias. Fluid flow through the plates is directly proportional to displacement between the plates, and spent fluid escapes via a radial periphery of the second plate. Preferably, the second plate is mounted to a housing by a set of springs which also contain a strain gauge, such that displacement can be electronically measured. The flow restrictor of the present invention is expected to have particular application in the fields of biological and chemical analysis instruments.
摘要翻译：本公开提供了具有第四根压力对流动特性的新型流动装置。流动装置包括入口，聚焦流体压力的孔口，一对平行板（或可被建模为平行板的其它表面）和出口。优选地，该对平行板是一对两个平盘，其中一个具有中心孔。当该装置用作流量限制器时，中心孔形成一个座，第二板（阻力板）偏向该座，以限制流体流动。孔口通过孔提供流体压力，迫使第二板离开第一板，并抵抗偏压。通过板的流体流动与板之间的位移成正比，并且废流体经由第二板的径向周边逸出。优选地，第二板通过一组还包含应变计的弹簧安装到壳体，使得可以电子地测量位移。预期本发明的限流器在生物和化学分析仪器领域具有特殊的应用。

52. 发明授权

US5333831A High performance micromachined valve orifice and seat 失效
标题翻译：高性能微加工阀孔和阀座
公开(公告)号：US5333831A
公开(公告)日：1994-08-02
申请号：US19945
申请日：1993-02-19
申请人： Phillip W. Barth , Gary B. Gordon
发明人： Phillip W. Barth , Gary B. Gordon
IPC分类号： F16K31/70 , F15C5/00 , F16K99/00 , F16K31/02 , F16K7/14
CPC分类号： F16K99/0001 , F15C5/00 , F16K99/0009 , F16K99/0015 , F16K99/0036 , F16K2099/0074 , F16K2099/008 , F16K99/0034
摘要： A microminiature valve includes a crystalline substrate having a flow via and a raised valve seat structure. The valve seat structure has a planar bearing surface. The inner edge of the bearing surface defines an orifice to the flow via. The flow via has a varying cross sectional area and is narrowest at the orifice. From both the inner and outer edges of the bearing surface, parallel sloped walls along {111} planes are formed by an anisotropic etch. The microminiature valve has a high ratio of the area of the flow via at the orifice to the area within the outer edges of the valve seat structure.
摘要翻译：微型阀包括具有流通孔和升高的阀座结构的结晶基底。阀座结构具有平面的支承表面。轴承表面的内缘限定了流通孔的孔口。流通孔具有变化的横截面积，并且在孔口处最窄。从轴承表面的内边缘和外边缘两侧，沿{111}平面的平行倾斜壁由各向异性蚀刻形成。微型阀具有在孔口处的流动通道的面积与阀座结构的外边缘内的区域的高比率。

53. 发明授权

US5060526A Laminated semiconductor sensor with vibrating element 失效
标题翻译：具有振动元件的层压半导体传感器
公开(公告)号：US5060526A
公开(公告)日：1991-10-29
申请号：US358771
申请日：1989-05-30
申请人： Phillip W. Barth , Kurt E. Petersen , Joseph R. Mallon, Jr.
发明人： Phillip W. Barth , Kurt E. Petersen , Joseph R. Mallon, Jr.
IPC分类号： G01L1/10 , G01L9/00 , H01L29/84
CPC分类号： G01L9/0019
摘要： An electromechanical sensor is provided which comprises: a first silicon wafer which defines a resonant element; wherein the resonant element is doped with approximately the same impurity concentration as a background dopant concentration of the first wafer; and a second single crystal wafer which defines a device for coupling mechanical stress from the second wafer to the resonant element; wherein the first and second wafers are fusion bonded together.

54. 发明授权

US4882933A Accelerometer with integral bidirectional shock protection and controllable viscous damping 失效
标题翻译：具有整体双向冲击保护和可控粘性阻尼的加速度计
公开(公告)号：US4882933A
公开(公告)日：1989-11-28
申请号：US202081
申请日：1988-06-03
申请人： Kurt E. Petersen , Phillip W. Barth
发明人： Kurt E. Petersen , Phillip W. Barth
IPC分类号： G01P1/00 , G01P15/08 , G01P15/12
CPC分类号： G01P15/12 , G01P1/003 , G01P15/0802 , G01P2015/0828
摘要： A micromachined accelerometer includes integral bidirectional shock protection and controllable viscous damping. The accelerometer includes a frame in which a seismic mass is disposed and coupled to the frame by one or more cantilever beams. Upper and lower stops are provided around the periphery of the seismic mass and around the interior of the frame to limit the travel distance of the seismic mass. The accelerometer is fabricated, preferably from monocrystalline silicon, by defining an annular recess which extends into a first surface of a silicon substrate. Next, a layer is formed over the surface of the substrate but not in contact with the lower surface of the recessed region. An annular-shaped region of the substrate extending from the bottom surface of the substrate to the layer is then removed to define the seismic mass and frame. Finally, portions of the layer are removed to define the cantilever beams and integral bidirectional stops.
摘要翻译：微机械加速度计包括整体双向冲击保护和可控粘性阻尼。加速度计包括框架，其中地震质量块通过一个或多个悬臂梁布置并耦合到框架。上部和下部挡块设置在震动周围的周围，并围绕框架的内部，以限制地震块的行进距离。通过限定延伸到硅衬底的第一表面中的环形凹槽来制造加速度计，优选地由单晶硅制成。接下来，在基板的表面上形成层，但不与凹陷区域的下表面接触。然后，从衬底的底表面延伸到层的衬底的环形区域被去除以限定地震质量和框架。最后，去除层的部分以限定悬臂梁和整体双向挡块。

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