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    • 52. 发明授权
    • Pixel sensor with reduced image lag
    • 具有降低图像滞后的像素传感器
    • US07732845B2
    • 2010-06-08
    • US12099339
    • 2008-04-08
    • James W AdkissonJeffrey P. GambinoRajendran KrishnasamySolomon Mulugeta
    • James W AdkissonJeffrey P. GambinoRajendran KrishnasamySolomon Mulugeta
    • H01L31/062
    • H01L27/14603
    • A tensile-stress-generating structure is formed above a gate electrode in a CMOS image sensor to apply a normal tensile stress between a charge collection well of a photodiode, which is also a source region of a transfer transistor, and a floating drain in the direction connecting the source region and the floating drain. The tensile stress lowers the potential barrier between the source region and the body of the transfer transistor to effect a faster and more through transfer of the electrical charges in the source region to the floating drain. Image lag is thus reduced in the CMOS image sensor. Further, charge capacity of the source region is also enhanced due to the normal tensile stress applied to the source region.
    • 在CMOS图像传感器的栅电极上方形成拉伸应力产生结构,以在也是转移晶体管的源极区域的光电二极管的电荷收集阱和浮动漏极之间施加正常的拉伸应力 连接源极区域和浮动漏极的方向。 拉伸应力降低了源区域和转移晶体管的主体之间的势垒,以实现更快和更多地将源区域中的电荷转移到浮动漏极。 因此CMOS图像传感器中的图像滞后减少。 此外,由于施加到源极区域的正常拉伸应力,源极区域的充电容量也增强​​。