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    • 51. 发明授权
    • Self-aligned process to fabricate a memory cell array with a surrounding-gate access transistor
    • 自对准工艺制造具有周围栅极存取晶体管的存储单元阵列
    • US08853662B2
    • 2014-10-07
    • US14076267
    • 2013-11-11
    • International Business Machines Corporation
    • Matthew J. BrightSkyChung H. LamGen P. Lauer
    • H01L29/02H01L45/00H01L27/24
    • H01L45/06H01L27/2454H01L45/143H01L45/144
    • A memory array including a plurality of memory cells. Each word line is electrically coupled to a set of memory cells, a gate contact and a pair of dielectric pillars positioned parallel to the word line. Dielectric pillars are placed on both sides of the gate contact. Also a method to prevent a gate contact from electrically connecting to a source contact for a plurality of memory cells on a substrate. The method includes formation of a pair of pillars made of an insulating material over the substrate, depositing an electrically conductive gate material between and over the pillars, etching the gate material such that it both partially fills a space between the pair of pillars and forms a word line for the memory cells, and depositing a gate contact between the dielectric pillars such that the gate contact is in electrical contact with the gate material.
    • 一种包括多个存储单元的存储器阵列。 每个字线电耦合到一组存储器单元,栅极接触和平行于字线定位的一对电介质柱。 绝缘柱放置在栅极接触的两侧。 也是防止栅极接触与衬底上的多个存储器单元的源极接触电连接的方法。 该方法包括在衬底上形成由绝缘材料制成的一对支柱,在支柱之间和之上沉积导电栅极材料,蚀刻栅极材料,使得其部分地填充在该对柱之间的空间并形成 用于存储单元的字线,以及在介电柱之间沉积栅极接触,使得栅极接触与栅极材料电接触。
    • 54. 发明申请
    • RELIABLE PHYSICAL UNCLONABLE FUNCTION FOR DEVICE AUTHENTICATION
    • 用于设备认证的可靠的物理不可靠功能
    • US20140140513A1
    • 2014-05-22
    • US13680688
    • 2012-11-19
    • INTERNATIONAL BUSINESS MACHINES CORPORATION
    • Matthew J. BrightSkyChung H. LamDirk Pfeiffer
    • H04L9/08
    • H04L9/08G06F21/60G06F21/73H04L9/06H04L9/0816H04L9/0866H04L9/3278Y10T29/49002
    • A method of manufacturing a secure device having a physical unclonable function includes embedding a phase change memory in the secure device, where the phase change memory includes a plurality of cells, and setting the phase change memory in a manner that results in a phase variation over the plurality of cells, wherein the phase variation is the physical unclonable function. A method for retrieving a cryptographic key from an integrated circuit, wherein the cryptographic key is stored in the integrated circuit, includes measuring a property of a phase change memory embedded in the integrated circuit, wherein the phase change memory includes a plurality of cells and the property is a function of a phase variation over the plurality of cells, deriving a signature from the property, and deriving the cryptographic key from the signature.
    • 一种制造具有物理不可克隆功能的安全装置的方法包括:将相变存储器嵌入到安全装置中,其中相变存储器包括多个单元,并以导致相位变化的方式设置相变存储器 所述多个单元,其中所述相位变化是所述物理不可克隆函数。 一种用于从集成电路检索加密密钥的方法,其中所述加密密钥存储在所述集成电路中,包括测量嵌入在所述集成电路中的相变存储器的属性,其中所述相变存储器包括多个单元,并且 属性是多个单元上的相位变化的函数,从属性导出签名,以及从签名导出密码密钥。
    • 55. 发明申请
    • SELF-ALIGNED PROCESS TO FABRICATE A MEMORY CELL ARRAY WITH A SURROUNDING-GATE ACCESS TRANSISTOR
    • 具有环绕门控存取晶体管的存储器单元阵列的自对准过程
    • US20140061581A1
    • 2014-03-06
    • US14076267
    • 2013-11-11
    • International Business Machines Corporation
    • Matthew J. BrightSkyChung H. LamGen P. Lauer
    • H01L45/00
    • H01L45/06H01L27/2454H01L45/143H01L45/144
    • A memory array including a plurality of memory cells. Each word line is electrically coupled to a set of memory cells, a gate contact and a pair of dielectric pillars positioned parallel to the word line. Dielectric pillars are placed on both sides of the gate contact. Also a method to prevent a gate contact from electrically connecting to a source contact for a plurality of memory cells on a substrate. The method includes formation of a pair of pillars made of an insulating material over the substrate, depositing an electrically conductive gate material between and over the pillars, etching the gate material such that it both partially fills a space between the pair of pillars and forms a word line for the memory cells, and depositing a gate contact between the dielectric pillars such that the gate contact is in electrical contact with the gate material.
    • 一种包括多个存储单元的存储器阵列。 每个字线电耦合到一组存储器单元,栅极接触和平行于字线定位的一对电介质柱。 绝缘柱放置在栅极接触的两侧。 也是防止栅极接触与衬底上的多个存储器单元的源极接触电连接的方法。 该方法包括在衬底上形成由绝缘材料制成的一对支柱,在支柱之间和之上沉积导电栅极材料,蚀刻栅极材料,使得其部分地填充在该对柱之间的空间并形成 用于存储单元的字线,以及在介电柱之间沉积栅极接触,使得栅极接触与栅极材料电接触。